Mass simultaneous sealing and electrical connection of electronic devices
First Claim
1. A method of mass sealing and testing electronic devices, comprising the steps of:
- (a) initially aligning a cover wafer having a plurality of electrically conductive elements therein over a plurality of individual electronic devices supported at a single substrate(b) next both;
(i) sealing each electronic device by bonding the aligned cover wafer against the substrate wafer; and
,(ii) forming an electrical communication between the electrically conductive elements in the cover wafer and the electronic devices supported at the substrate wafer; and
,(c) finally testing the plurality of sealed electronic devices;
wherein steps (b)(i) and (b)(ii) both take place while at the wafer level.
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Accused Products
Abstract
The present invention provides a new and effective method for the sealing and electrical testing of electronic devices; and particularly for surface acoustic wave devices. In accordance with the present invention, the cost and size of making hermetically sealed packages for electronic devices and of electrically testing each device is significantly reduced over the prior art by making use of mass simultaneous sealing and electrical connection at the wafer level, and by using substrates with hermetically sealed and electrically conductive via holes. Further, cost reduction is effected by making use of final electrical testing with wafer probe test techniques before dicing.
212 Citations
22 Claims
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1. A method of mass sealing and testing electronic devices, comprising the steps of:
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(a) initially aligning a cover wafer having a plurality of electrically conductive elements therein over a plurality of individual electronic devices supported at a single substrate (b) next both; (i) sealing each electronic device by bonding the aligned cover wafer against the substrate wafer; and
,(ii) forming an electrical communication between the electrically conductive elements in the cover wafer and the electronic devices supported at the substrate wafer; and
,(c) finally testing the plurality of sealed electronic devices; wherein steps (b)(i) and (b)(ii) both take place while at the wafer level. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 19, 20, 21)
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15. A wafer level package comprising:
- a single substrate wafer and a plurality of individual electronic devices, wherein said electronic devices are supported by said substrate wafer at the wafer level;
a cover wafer bonded against said substrate wafer over said electronic devices;
a grid of bonding material patterned upon said substrate wafer in a manner separating each one of said electronic devices supported thereby from the remaining of said electronic devices supported thereby;
wherein said bonding material and said cover wafer aid in forming a seal for substantially each cue of said electronic devices at the wafer level;
a plurality of electrically conductive elements in said cover wafer, wherein said electrically conductive elements are in electrical communication with said electronic devices at the wafer level. - View Dependent Claims (16, 17, 18, 22)
- a single substrate wafer and a plurality of individual electronic devices, wherein said electronic devices are supported by said substrate wafer at the wafer level;
Specification