Mispour-misfill prevention apparatus and process

• US 5,448,499 A
• Filed: 08/24/1992
• Issued: 09/05/1995
• Est. Priority Date: 08/24/1992
• Status: Expired due to Fees

• Current Assignee: OLIN Corporation
• Original Assignee: OLIN Corporation
• Inventors: Palmer, Paul J.
• Primary Examiner(s): Voeltz, Emanuel T.
• Assistant Examiner(s): CHOI, KYLE JAEHUN
• Application Number:
  US07/933,627
• Time in Patent Office: 1,107 Days
• Field of Search: 364/496, 364/497, 364/498, 364/500, 364/413.01, 235/375, 222/52, 73/23.2, 73/40.5 R
• US Class Current: 700/266
• CPC Class Codes: G05D 21/02 characterised by the use of electric means
• CPC Class Codes: G05D 7/0617 specially adapted for fluid materials

Abstract

A system and a process for monitoring the supplying of a working apparatus (e.g., spray etching tool employed in the semiconductor industry) via a flow control valve from a supply container to ensure the proper chemical is delivered to said working apparatus by (1) applying an optical bar code scanning label on the supply container and either the working container or the flow control valve or both and then (2) comparing the sensings of said bar code labels with a microprocessor controller that is programmed to open the flow control valve, if the comparings show a match and to send a visual error message and a signal to leave the flow control valve closed if the comparing shows a mismatch.

Claims

1. A process for monitoring the supplying of a working apparatus with a chemical from a supply container via a flow control valve to ensure the proper chemical is delivered to the working apparatus comprising the steps of:

(a) sensing preprogrammed bar coded information located on said working apparatus that identifies a proper chemical to be used with said working apparatus.

(b) sensing preprogrammed bar coded information located on said flow control valve that identifies a proper chemical to be transferred through said flow control valve;

(c) sensing preprogrammed bar coded information located on said supply container that identifies the chemical held in said supply container;

(d) comparing said preprogrammed bar coded information to determine if the chemical in the supply container, the proper chemical to be transported through the flow control valve and the proper chemical to be used in the working apparatus match; and

(e) sending a signal to an actuator to open said flow control valve connecting said supply container and said working apparatus, thereby permitting the chemical to flow into said working apparatus, if the comparing of the three sensings shows a match or sending a visual error message and a signal to leave said flow control valve closed if the comparing of the three preprogrammed bar coded information sensings show a mismatch.

2. A system for monitoring the supplying of a working apparatus with a chemical from a supply container via a flow control valve to ensure the proper chemical is delivered to the working apparatus, comprising in combination:

(a) a working apparatus employing a chemical and having a first bar code label thereon that is sensed that identifies a proper chemical to be used therein;

(b) a supply container holding the chemical to be used in said working apparatus, said supply container having a second bar coded label thereon that is sensed that identifies the chemical contained therein;

(c) a flow control valve connecting said working apparatus and said supply container, said flow control valve having a third bar coded label thereon that identifies the proper chemical to be transported therethrough;

(d) an optical scanner for sensing the preprogrammed bar coded information from the three bar coded labels; and

(e) a microprocessing controller for (i) comparing the three preprogrammed bar coded information sensings to determine if the proper chemical to be used in said working apparatus, the proper chemical to be transferred through said flow control valve, and the chemical in the supply container match and (ii) sending a signal to an actuator to open the flow control valve connecting the supply container and said working apparatus to permit the chemical to flow to the working apparatus if the comparings of the three preprogrammed information sensings show a match or sending a Visual error message and a signal to leave the flow control valve closed if the comparings of the three preprogrammed bar coded information sensings show a mismatch.

3. A process for monitoring the supplying of a working apparatus with a chemical from a supply container via a flow control valve to ensure the proper chemical is delivered to the working apparatus comprising the steps of:

(a) sensing preprogrammed bar coded information located on said flow control valve connected to said working apparatus that identifies a proper chemical to be used with said working apparatus;

(b) sensing preprogrammed bar coded information located on said supply container that identifies the chemical in said supply container;

(c) comparing said preprogrammed bar coded information sensings to determine if the chemical in said supply container and the proper chemical to be used in said working apparatus match;

(d) sending a signal to an actuator to open said flow control valve connecting said supply container and said working apparatus, thereby permitting the chemical to flow into said working apparatus, if the comparing of the two preprogrammed information sensings show a match or sending an error message and a signal to leave the flow control valve closed if the comparing of the two preprogrammed bar coded information sensing show a mismatch.

4. A process for monitoring the supplying of a spray etching tool employed in the semiconductor industry with a chemical from a supply container via a flow control valve to ensure the proper chemical is delivered to said spray etching tool apparatus comprising the steps of:

(a) sensing preprogrammed bar coded information located on said spray etching tool or on said flow control valve connected to said spray etching tool that identifies a proper chemical to be used with said spray etching tool;

(b) sensing preprogrammed bar coded information located on said supply container that identifies the chemical in said supply container;

(c) comparing said preprogrammed bar coded information sensings to determine if the chemical in said supply container and the proper chemical to be used in said spray etching tool match;

(d) sending a signal to an actuator to open said flow control valve connecting said supply container and said spray etching tool, thereby permitting the chemical to flow into said spray etching tool, if the comparing of the two preprogrammed information sensings show a match or sending an error message and a signal to leave the flow control valve closed if the comparing of the two preprogrammed bar coded information sensing show a mismatch.

5. A process for monitoring the supplying of a working apparatus with a chemical from a supply container via a flow control valve to ensure the proper chemical is delivered to the working apparatus comprising the steps of:

(a) sensing preprogrammed bar coded information located on said working apparatus or on said flow control valve connected to said working apparatus that identifies a proper chemical to be used with said working apparatus;

(b) sensing preprogrammed bar coded information located on said supply container that identifies the chemical in said supply container;

(c) comparing said preprogrammed bar coded information sensings to determine if the chemical in said supply container and the proper chemical to be used in said working apparatus match;

(d) sending a signal to an actuator to open said flow control valve connecting said supply container and said working apparatus, thereby permitting the chemical to flow into said working apparatus, if the comparing of the two preprogrammed information sensings show a match or sending an error message and a signal to leave the flow control valve closed if the comparing of the two preprogrammed bar coded information sensing show a mismatch;

(e) displaying a visual signal on a display panel when the flow control valve is open; and

(f) displaying a flashing visual signal on a display panel when the error message is sent.

6. A system for monitoring the supplying of a working apparatus with a chemical from a supply container via a flow control valve to ensure the proper chemical is delivered to the working apparatus, comprising in combination:

(a) a working apparatus employing a chemical and having a flow control valve connected thereto, said flow control valve having a first bar code label thereon that is sensed to identify a proper chemical to be used in said working apparatus;

(b) a supply container holding the chemical to be used in the working apparatus, said supply container being connected to the working apparatus via said flow control having a second bar code label thereon that is sensed to identify the chemical contained therein;

(c) apparatus for sensing said preprogrammed bar coded information on said flow control valve for the chemical to be used with said working apparatus and for sensing said preprogrammed bar coded information on said supply container for the chemical held within the supply container; and

(d) a microprocessing controller for (i) comparing the two preprogrammed bar coded information sensings to determine if the proper chemical to be used in the working apparatus and the chemical in the supply container match and (ii) sending a signal to an actuator to open said flow control valve connecting said supply container and said working apparatus to permit the chemical to flow to said working apparatus if the comparing of the two preprogrammed information sensings show a match or sending an error message and a signal to leave the flow control valve closed if the comparing of the two preprogrammed bar coded information sensings show a mismatch.

7. A system for monitoring the supplying of a spray etching tool employed in the semiconductor industry with a chemical from a supply container via a flow control valve to ensure the proper chemical is delivered to the spray etching tool, comprising in combination:

(a) a spray etching tool employing a chemical and having a flow control valve connected thereto, either said spray etching tool or said flow control valve having a first bar code label thereon that is sensed to identify a proper chemical to be used in said spray etching tool;

(b) a supply container holding the chemical to be used in said spray etching tool, said supply container being connected to said spray etching tool via said flow control having a second bar code label thereon that is sensed to identify the chemical contained therein;

(c) apparatus for sensing said preprogrammed bar coded information on said spray etching tool for the chemical to be used with said spray etching tool and for sensing said preprogrammed bar coded information on said supply container for the chemical held within the supply container; and

(d) a microprocessing controller for (i) comparing the two preprogrammed bar coded information sensings to determine if the proper chemical to be used in said spray etching tool and the chemical in the supply container match and (ii) sending a signal to an actuator to open said flow control valve connecting said supply container and said spray etching tool to permit the chemical to flow to said spray etching tool if the comparing of the two preprogrammed information sensings show a match or sending an error message and a signal to leave the flow control valve closed if the comparing of the two preprogrammed bar coded information sensings show a mismatch.