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Method of making a thin film magnetic head having multi-layer coils

  • US 5,448,822 A
  • Filed: 03/10/1993
  • Issued: 09/12/1995
  • Est. Priority Date: 03/10/1993
  • Status: Expired due to Term
First Claim
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1. A method of making at least two coils formed of metal windings and wherein a first coil is disposed below a second coil and wherein the windings of the first coil are aligned between, and insulated from, the windings of the second coil comprising the steps of:

  • a) forming a first insulative layer;

    b) rendering predetermined areas of the first layer more soluble than other areas and wherein the solubility varies along the thickness of the first layer;

    c) dissolving the more soluble areas of the first layer to produce a pattern of insulation at predetermined locations where the windings for the second coil are to be formed, leaving spaces therebetween, said pattern varying in width from larger to smaller from an upper surface of the first layer to a lower surface;

    d) depositing coil metallization on said pattern such that the windings of the second coil are formed on the top of the pattern and then windings of the first coil are formed in the space between the pattern; and

    e) forming an insulative layer over the metallization.

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