Multiple valve assembly and process

• US 5,449,294 A
• Filed: 01/23/1995
• Issued: 09/12/1995
• Est. Priority Date: 03/26/1993
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Schilling, Ted D., Rench, Michael E.
• Primary Examiner(s): Fox, John C.
• Application Number:
  US08/376,550
• Time in Patent Office: 232 Days
• Field of Search: 137/597, 137/884, 137/240, 437/225, 118/715, 156/345
• US Class Current: 137/1
• CPC Class Codes: C23C 16/4401 Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
• CPC Class Codes: F16K 11/20 operated by separate actuating members with one plug turning in another F16K11/12
• CPC Class Codes: Y10S 438/935 Gas flow control
• CPC Class Codes: Y10T 137/0318 Processes
• CPC Class Codes: Y10T 137/87249 Multiple inlet with multiple outlet

Abstract

A multiple valve assembly incorporates three valves in one valve body. The main body has inlet and outlet ports in the mainline, and two sample ports, one on either side of the main valve seat. The valves and sample ports are oriented in only two planes for easy installation and access.

Claims

1. A method for purging and vacuum testing a semiconductor process system, said system including a semiconductor processing chamber and a source of process gas, and said method comprising:

providing a unitary tri-valve assembly, comprising a principal channel extending between an inlet port and an outlet port;

a first valve for closing the principal channel between said inlet port and said outlet port;

a second channel intersecting said principal channel between said inlet port and said first valve;

a second valve for closing said second channel;

a third channel intersecting said principal channel between said outlet port and said first valve; and

a third valve for closing said third channel;

connecting said tri-valve assembly between said processing chamber and said source of process gas, with said source of process gas connected to said inlet port and said outlet port connected to said processing chamber;

closing said first valve to isolate said outlet port from said inlet port;

with said first valve closed, connecting a vacuum pump to said second channel and opening said second valve to evacuate elements of said system upstream of said valve assembly inlet port; and

with said first valve closed, connecting a source of purge gas to said third channel and opening said third valve to flow said purge gas to purge elements of said system downstream of said valve assembly outlet port.

2. A method as defined in claim 1, wherein said vacuum pump is a helium leak detector;

and said method further comprises a step of spraying helium on joints of said system upstream of said valve assembly input port, and detecting for leaks using said leak detector.

3. A method as defined in claim 1, wherein said source of purge gas is a source of nitrogen purge gas;

said process chamber has an exhaust port; and

said purge gas is flowed to said processing chamber and exhausted through said exhaust port.

4. A method as defined in claim 1, wherein said source of purge gas is a source of nitrogen purge gas;

said process chamber has an exhaust port;

said purge gas is flowed to said processing chamber and exhausted through said exhaust port;

said vacuum pump is a helium leak detector; and

said method further comprises a step of spraying helium on joints of the system upstream of said valve assembly input port, and detecting for leaks using said leak detector.

5. A method for purging used process gas and supplying fresh process gas to connected process chambers in a semiconductor process system;

said method comprising;

providing a unitary tri-valve assembly, comprising;

a principal channel extending between an inlet port and an outlet port;

a first valve for closing the principal channel between said inlet port and said outlet port;

a second channel intersecting said principal channel between said inlet port and said first valve, said second channel has a first port at an end of said channel opposite the end of said second channel that intersects said principal channel;

a second valve for closing said second channel;

a third channel intersecting said principal channel between said outlet port and said first valve, said third channel has a second port at an end of said channel opposite the end of said third channel that intersects said principal channel; and

a third valve for closing said third channel;

connecting said tri-valve assembly between first and second processing chambers, with said first processing chamber connected to said inlet port and said second processing chamber connected to said outlet port;

closing said first valve to isolate said outlet port from said inlet port;

with said first valve closed, opening said second valve and purging used process gas from said first one of said process chambers through said first port, second channel and inlet port; and

with said first valve closed, opening said third valve and supplying new process gas to said other of said process chambers through said second port, third channel and outlet port.

6. A method as defined in claim 5, further comprising the step of:

with said first valve dosed and after purging said used process gas from said first process chamber, opening said second valve and supplying new process gas to said first process chamber through said first port, second channel and inlet port.

7. A method as defined in claim 5, further comprising the step of:

with said first valve closed and before supplying new process gas to said second process chamber, opening said third valve and purging used process gas from said second chamber through said second port, third channel and outlet port.

8. A method as defined in claim 5, further comprising the steps of:

with said first valve closed and after purging said used process gas from said first process chamber, opening said second valve and supplying new process gas to said first process chamber through said first port, second channel and inlet port; and

with said first valve closed and before supplying new process gas to said second process chamber, opening said third valve and purging used process gas from said second chamber through said second port, third channel and outlet port.