Methods of fabricating integrated, aligned tunneling tip pairs
First Claim
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1. A submicron tip structure, comprising:
- first and second spaced surfaces;
first and second opposed tips on said first and second surfaces, respectively, each tip having an end portion with at least one dimension in the nanometer size range, said tips being spaced apart to define a gap.
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Abstract
Self-aligned, opposed, nanometer dimension tips are fabricated in pairs, one of each pair being located on a movable, single crystal beam, with the beam being movable in three dimensions with respect to a substrate carrying the other tip of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers formed on the supporting beams. Spring means in each beam allow axial motion of the beam. The tips and beams are fabricated from single crystal silicon substrate, and the tips may be electrically isolated from the substrate by fabricating insulating segments in the beam structure.
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Citations
23 Claims
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1. A submicron tip structure, comprising:
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first and second spaced surfaces; first and second opposed tips on said first and second surfaces, respectively, each tip having an end portion with at least one dimension in the nanometer size range, said tips being spaced apart to define a gap. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A submicron tip structure, comprising:
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first and second spaced surfaces; first and second opposed, tapered tips integral with respective ones of said first and second surfaces, said tips having aligned terminal ends spaced apart to form a gap, the terminal end of at least one of said tips having a dimension in the nanometer size range. - View Dependent Claims (20, 21, 22, 23)
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Specification