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Mechanical sensor having a U-shaped planar coil and a magnetic layer

  • US 5,450,755 A
  • Filed: 10/19/1993
  • Issued: 09/19/1995
  • Est. Priority Date: 10/21/1992
  • Status: Expired due to Fees
First Claim
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1. A mechanical sensor comprising:

  • a magnetic layer having permeability which is changed in accordance with stress generated therein,a coil having at least two terminals, allowing an electric current to flow therebetween to generate a magnetic flux, thereby magnetizing the magnetic layer; and

    a substrate integrally supporting the magnetic layer and the coil,wherein the coil is a planar coil including at least one winding, each winding having a U-shaped portion formed of a first conductive line portion, a second conductive line portion, and a connecting portion connecting the first and second conductive line portions, the first and second conductive line portions extending in a first direction and magnetizing the magnetic layer in a direction which is substantially perpendicular to the first direction and is parallel to a surface of said magnetic layer, and an impedance between the terminals is changed in accordance with a change of inductance caused by a change of the permeability of the magnetic layer.

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