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Method and an apparatus for detecting concentration of a chemical treating solution and an automatic control apparatus thereof

  • US 5,450,870 A
  • Filed: 12/16/1993
  • Issued: 09/19/1995
  • Est. Priority Date: 04/17/1992
  • Status: Expired due to Fees
First Claim
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1. A concentration detection method for detecting the concentration of a predetermined component in a chemical treating solution, the method comprising the steps of:

  • sampling the chemical treating solution at a first time to obtain a first sampled solution, and analyzing, in a first analysis, the first sampled solution for first concentration information corresponding to a first concentration of the predetermined component in the chemical treating solution at the first time, andsampling the chemical treating solution at a second time when a predetermined time has elapsed from the first time to obtain a second sampled solution, and analyzing, in a second analysis, the second sampled solution for second concentration information corresponding to a second concentration of said predetermined component at the second of time; and

    calculating a third concentration of the predetermined component in the chemical treating solution after another predetermined time has elapsed from the second time, said calculating being based on the first and second concentration information and on the times required for said first analysis and said second analysis.

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