Fixture for in-situ noncontact monitoring of wet chemical etching with passive wafer restraint

• US 5,451,289 A
• Filed: 06/30/1994
• Issued: 09/19/1995
• Est. Priority Date: 06/30/1994
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Barbee, Steven G., Li, Leping, Ratzlaff, Eugene H., Heinz, Tony F.
• Primary Examiner(s): Breneman, R. Bruce
• Assistant Examiner(s): CHANG, JONI YUK YING
• Application Number:
  US08/269,859
• Time in Patent Office: 446 Days
• Field of Search: 156/626, 156/627, 156/345, 204/29.2, 204/297 R
• US Class Current: 216/59
• CPC Class Codes: B24B 37/013 Devices or means for detecting lapping completion
• CPC Class Codes: H01L 21/67086 with the semiconductor substrates being dipped in baths or vessels
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring
• CPC Class Codes: H01L 21/67313 Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
• CPC Class Codes: H01L 22/26 Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement endpoint detection arrangements in CMP apparatus B24B37/013, in discharge apparatus H01J37/32
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A fixture for in-situ chemical etch monitoring of an etching process during etching of at least one wafer contained in a wafer carrier is disclosed. The fixture comprises a set of primary guide members for engaging and guiding a front portion of the wafer carrier. A set of rear guide members engages and guides a rear portion of the wafer carrier. A set of electrode arms is included for receiving a respective electrode and corresponding electrode wire thereon. A mounting plate establishes a prescribed spacing of the set of primary guide members with respect to the set of electrode arms. A means for self-locking the first wafer contained in the wafer boat is connected to the mounting plate and further positioned in a prescribed manner with respect to the set of primary guide members and the set of electrode arms. Lastly, a connecting means connects the mounting plate, the set of primary guide members, and the set of electrode arms to the set of rear guide members, whereby insertion of the wafer boat into the fixture establishes a prescribed distance between the set of electrode arms and the first wafer, and further wherein the first wafer is passively fixed by the self-locking means.

Claims

1. A fixture for in-situ chemical etch monitoring of an etching process during etching of at least one wafer contained in a wafer carrier, one of the at least one wafers being positioned in a first slot of the wafer carrier, said fixture comprising:

a) a set of primary guide members for engaging and guiding a front portion of the wafer carrier;

b) a set of rear guide members for engaging and guiding a rear portion of the wafer carrier;

c) a set of electrode arms for receiving a respective electrode and corresponding electrode wire thereon;

d) a mounting plate for establishing spacing of said set of primary guide members with respect to said set of electrode arms;

e) a means for self-locking the first wafer contained in the wafer carrier, said self-locking means connected to said mounting plate and further positioned in a manner with respect to said set of primary guide members and said set of electrode arms; and

f) means for connecting said mounting plate, said set of primary guide members, said set of electrode arms to said set of rear guide members, whereby insertion of the wafer carrier into the fixture establishes a distance between the set of electrode arms and the first wafer, and further wherein the first wafer is passively fixed by said self-locking means.