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Chemically absorbed film comprising fluorocarbon chains

  • US 5,451,459 A
  • Filed: 07/28/1994
  • Issued: 09/19/1995
  • Est. Priority Date: 04/30/1991
  • Status: Expired due to Term
First Claim
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1. A chemically adsorbed laminated film comprising a monomolecular inner layer film having molecule chains comprising mainly fluorocarbon groups and Si atoms at opposing ends of the molecule chains, said monomolecular inner layer being fixed onto a substrate surface by covalent -Si- bonds, and a monomolecular outer layer film having molecule chains comprising mainly fluorocarbon groups, said monomolecular outer layer being fixed onto the monomolecular inner layer by -Si- bonds.

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