×

Wide range vacuum gauge

  • US 5,452,613 A
  • Filed: 10/04/1993
  • Issued: 09/26/1995
  • Est. Priority Date: 10/04/1993
  • Status: Expired due to Term
First Claim
Patent Images

1. A device for determining a pressure of gas in an evacuated chamber comprising:

  • a cylinder positioned in fluid communication with the evacuated chamber, said cylinder forming a compressed gas chamber;

    a reciprocating piston received within said cylinder and mounted for reciprocal movement within said cylinder;

    a communication means for selectively fluidly communicating said compressed gas chamber with the evacuated chamber;

    a drive means for reciprocating said piston between a retracted position, where said compressed gas chamber communicates with the evacuated chamber, and an extended position where communication between said compressed gas chamber and said evacuated chamber is interrupted;

    a determining means for determining when a predetermined pressure differential between said compressed gas chamber and the evacuated chamber is reached; and

    a processing means for determining the pressure of the gas within the evacuated chamber based on said predetermined pressure differential and when said predetermined pressure differential is reached.

View all claims
  • 6 Assignments
Timeline View
Assignment View
    ×
    ×