Thin film ferroelectric flat panel display devices, and methods for operating and fabricating same

• US 5,453,661 A
• Filed: 04/15/1994
• Issued: 09/26/1995
• Est. Priority Date: 04/15/1994
• Status: Expired due to Fees

• Current Assignee: Research Triangle Institute
• Original Assignee: MCNC, Inc.
• Inventors: McGuire, Gary E., Auciello, Orlando H.
• Primary Examiner(s): Pascal, Robert J.
• Assistant Examiner(s): Philogene, Haissa
• Application Number:
  US08/228,116
• Time in Patent Office: 529 Days
• Field of Search: 315/169.3, 313/491, 313/497, 313/498, 313/500, 313/502, 313/503, 313/505, 437/21, 437/29, 437/83, 437/84
• US Class Current: 315/1
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: H01J 1/312 having an electric field perpendicular to the surface, e.g. tunnel-effect cathodes of metal-insulator-metal [MIM] type H01J1/304- H01J1/308 take precedence
• CPC Class Codes: H01J 2201/306 Ferroelectric cathodes
• CPC Class Codes: H01J 2329/00 Electron emission display panels, e.g. field emission display panels
• CPC Class Codes: H01J 63/00 Cathode-ray or electron-stream lamps

Abstract

A flat panel display includes a ferroelectric thin film between first and second spaced apart electrodes. The ferroelectric thin film emits electrons upon application of a predetermined voltage between the first and second spaced apart electrodes. The electrons are emitted in an electron emission path and impinge upon a luminescent layer such as a phosphor layer, which produces luminescence upon impingement upon the emitter electrodes. The ferroelectric thin film is preferably about 2 μm or less in thickness and is preferably a polycrystalline ferroelectric thin film. More preferably, the thin ferroelectric film is a highly oriented, polycrystalline thin ferroelectric film. Most preferably, highly oriented ferroelectric thin film has a preferred (001) crystal orientation and is about 2 μm or less in thickness. A flat panel display may be formed of arrays of such display elements. Top and bottom electrodes or side electrodes may be used. The display may be formed using conventional microelectronic fabrication steps.

Claims

1. A flat panel display comprising:

first and second spaced apart electrodes, said first and second spaced apart electrodes producing an electric field therebetween upon application of a predetermined voltage therebetween;

a ferroelectric thin film between said first and second spaced apart electrodes, said ferroelectric thin film emitting electrons therefrom in an electron emission path upon application of said predetermined voltage between said first and second spaced apart electrodes; and

a luminescent layer in said electron emission path, said luminescent layer producing luminescence upon impingement of the emitted electrons thereon.

2. A flat panel display according to claim 1 wherein said ferroelectric thin film is about 2 microns or less in thickness.

3. A flat panel display according to claim 2 wherein said ferroelectric thin film is a polycrystalline ferroelectric thin film.

4. A flat panel display according to claim 3 wherein said ferroelectric thin film is a polycrystalline ferroelectric thin film having (001) crystal orientation.

5. A flat panel display according to claim 1 wherein said luminescent layer is on said second electrode, opposite said ferroelectric thin film.

6. A flat panel display according to claim 1 wherein said luminescent layer is spaced apart from said second electrode to define a gap therebetween.

7. A flat panel display according to claim 1 further comprising a third electrode adjacent said luminescent layer, said third electrode accelerating emitted electrons from said ferroelectric thin film to said luminescent layer.

8. A flat panel display according to claim 1 wherein said ferroelectric thin film is about 2 microns or less in thickness and wherein said flat panel display further comprises means for applying a predetermined voltage of about 50 volts or less between said first and second spaced apart electrodes.

9. A flat panel display according to claim 1 wherein said second electrode is a patterned second electrode and wherein said electron emission path passes through said patterned second electrode.

10. A flat panel display according to claim 1 wherein said electron emission path is transverse to said first and second electrodes.

11. A flat panel display comprising:

first and second spaced apart electrodes, said first and second spaced apart electrodes producing an electric field therebetween upon application of a predetermined voltage therebetween;

a polycrystalline ferroelectric thin film having (001) crystal orientation and having thickness of about 2 microns or less, between said first and second spaced apart electrodes, said ferroelectric thin film emitting electrons therefrom in an electron emission path upon application of said predetermined voltage between said first and second spaced apart electrodes; and

a luminescent layer in said electron emission path, said luminescent layer producing luminescence upon impingement of the emitted electrons thereon.

12. A flat panel display according to claim 11 wherein said luminescent layer is on said second electrode, opposite said ferroelectric thin film.

13. A flat panel display according to claim 11 wherein said luminescent layer is spaced apart from said second electrode to define a gap therebetween.

14. A flat panel display according to claim 11 further comprising a third electrode adjacent said luminescent layer, said third electrode accelerating emitted electrons from said ferroelectric thin film to said luminescent layer.

15. A flat panel display according to claim 11 wherein said ferroelectric thin film is about 2 microns or less in thickness and wherein said flat panel display further comprises means for applying a predetermined voltage of about 50 volts or less between said first and second spaced apart electrodes.

16. A flat panel display according to claim 11 wherein said luminescent layer includes phosphor.

17. A flat panel display according to claim 11 wherein said second electrode is a patterned second electrode and wherein said electron emission path passes through said patterned second electrode.

18. A flat panel display according to claim 11 wherein said electron emission path is transverse to said first and second electrodes.

19. A flat panel display comprising:

first and second electrode arrays, said first and second electrode arrays being spaced apart from one another to define an array of electrode pairs, said electrode pairs producing an electric field therebetween upon application of a predetermined voltage therebetween;

a ferroelectric thin film between each of said electrode pairs, said ferroelectric thin film emitting electrons therefrom in an electron emission path for each electrode pair, upon application of said predetermined voltage between said electrode pair; and

a luminescent layer in said electron emission path of each electrode pair, said luminescent layer producing luminescence upon impingement of the emitted electrons thereon.

20. A flat panel display according to claim 19 wherein said ferroelectric thin film is about 2 microns or less in thickness.

21. A flat panel display according to claim 20 wherein said ferroelectric thin film is a polycrystalline ferroelectric thin film.

22. A flat panel display according to claim 21 wherein said ferroelectric thin film is a polycrystalline ferroelectric thin film having (001) crystal orientation.

23. A flat panel display according to claim 19 wherein said luminescent layer is on said second electrode array, opposite said ferroelectric thin film.

24. A flat panel display according to claim 19 wherein said luminescent layer is spaced apart from said second electrode array to define a gap therebetween.

25. A flat panel display according to claim 19 further comprising a third electrode adjacent said luminescent layer, said third electrode accelerating emitted electrons from said ferroelectric thin film to said luminescent layer.

26. A flat panel display according to claim 19 wherein said ferroelectric thin film is about 2 microns or less in thickness and wherein said flat panel display further comprises means for applying a predetermined voltage of about 50 volts or less between said first and second spaced apart electrodes.

27. A flat panel display according to claim 19 wherein the electrodes in said second electrode array are patterned electrodes and wherein said electron emission path from each electrode pair passes through the corresponding patterned electrode.

28. A flat panel display according to claim 27 wherein each of said electrodes in said first and second arrays extend in a direction along the respective first and second arrays, to form top and bottom electrode pairs.

29. A flat panel display according to claim 19 wherein said electron emission path from each electrode pair is parallel to said first and second electrodes of the corresponding electrode pair.

30. A flat panel display according to claim 29 wherein each of said electrodes in said first and second arrays extend in a direction transverse to the respective first and second arrays, to form side electrode pairs.

31. A visible image displaying method comprising the steps of:

applying a voltage of about fifty volts or less across a ferroelectric thin film of about two microns or less in thickness, to produce electron emission from said ferroelectric thin film; and

impinging the emitted electrons onto a luminescent layer to produce luminescence.

32. A method according to claim 31 wherein said applying step comprises the step of applying a voltage of about fifty volts or less across a polycrystalline ferroelectric thin film having (001) crystal orientation.

33. A method according to claim 31 wherein said impinging step comprises the step of impinging the emitted electrons from said ferroelectric thin film, across a gap and onto said luminescent layer.

34. A method according to claim 31 wherein the following step is preformed between said applying step and said impinging step:

accelerating the emitted electrons from said ferroelectric layer to said luminescent layer.

35. A method of fabricating a flat panel display comprising the steps of:

forming a first electrode array on a substrate;

forming a polycrystalline ferroelectric thin film on said first electrode array;

forming a second electrode array on said polycrystalline ferroelectric thin film to define an electron emission path from said polycrystalline ferroelectric thin film upon application of a predetermined voltage between said first and second electrode arrays; and

forming a luminescent layer in said electron emission path such that said luminescent layer produces luminescence upon impingement of electrons thereon.

36. A method according to claim 35:

wherein said step of forming a first electrode array on a substrate comprises the step of forming a connecting electrode array on the substrate;

wherein the step of forming a polycrystalline ferroelectric thin film is followed by the step of forming a plurality of first electrodes in said polycrystalline ferroelectric thin film, electrically contacting connecting electrode array; and

wherein the step of forming a second electrode array comprises the step of forming a second electrode array in said polycrystalline ferroelectric thin film, such that said first electrodes and said second electrode array form pairs of side electrodes for said flat panel display.

37. A method according to claim 35 wherein said step of forming a polycrystalline ferroelectric thin film comprises the step of forming a highly oriented polycrystalline ferroelectric thin film.

38. A method according to claim 35 wherein said step of forming a second electrode array is followed by the step of removing said polycrystalline ferroelectric layer between adjacent electrodes of said second electrode array.

39. A method according to claim 35 wherein said step of forming a luminescent layer comprises the steps of:

forming a luminescent layer on a second substrate; and

mounting said second substrate adjacent said luminescent layer.

40. A method according to claim 39 wherein said mounting step comprises the step of mounting said second substrate adjacent, and spaced apart from, said luminescent layer.

41. A method according to claim 35 wherein said step of forming a luminescent layer comprises the step of forming an luminescent layer on said polycrystalline thin film ferroelectric layer.