X-ray mirror and material

• US 5,454,021 A
• Filed: 11/09/1993
• Issued: 09/26/1995
• Est. Priority Date: 11/12/1992
• Status: Expired due to Term

• Current Assignee: Seiko Instruments Incorporated (Seiko Group)
• Original Assignee: Seiko Instruments Incorporated (Seiko Group)
• Inventors: Nakajima, Kunio, Sudo, Shuzo
• Primary Examiner(s): Hannaher, Constantine
• Assistant Examiner(s): WONG, DON KITSUN
• Application Number:
  US08/149,351
• Time in Patent Office: 686 Days
• Field of Search: 378/70, 378/84, 378/85, 378/145, 378/71
• US Class Current: 378/84
• CPC Class Codes: G21K 1/06 using diffraction, refraction or reflection, e.g. monochromators G21K1/10, G21K7/00 take precedence
• CPC Class Codes: G21K 2201/06 using diffractive, refractive or reflecting elements

Abstract

An x-ray mirror material of high reflectance with a surface roughness which is very small and a high film density, the material being a Pt alloy film provided as a mirror surface for reflecting x-ray radiation. The composition of the mirror material is expressed by the general formula: Pt_1-x M_x. This material is deposited on a substrate surface which has been polished to a level form, where M is at least one substance selected from Mo, Ru, Rh, Pd, Ta, W, and Au, and x satisfies the formula: 0.005≦×≦0.10.

Claims

1. An x-ray mirror for reflecting x-ray radiation comprising a reflecting material formed on a substrate and comprising Pt and at least one substance selected from Mo, Ru, Rh, Pd, Ta, W and Au, wherein the reflecting material has an atomic composition expressed by a general formula Pt_1-x M_x, wherein M represents the substance and the value x satisfies the formula:

0.005≦

×

≦

0.10.

2. An x-ray mirror for reflecting x-ray radiation comprising a reflecting material formed on a substrate and made of an alloy having an average grain size under 150 Å

.

3. An x-ray mirror according to claim 2, the alloy has an atomic composition expressed by a general formula Pt_1-x M_x, wherein M is at least one substance selected from Mo, Ru, Rh, Pd, Ta, W and Au and the value x satisfies the formula:

0.005≦

×

≦

0.10.

4. An x-ray reflecting material for reflecting x-ray radiation comprising Pt and at least one substance selected from Mo, Ru, Rh, Pd, Ta, W and Au, wherein said x-ray reflecting material has an atomic composition expressed by a general formula Pt_1-x M_x, wherein M represents the substance and the value x satisfies the formula:

0.005≦

×

≦

0.10.