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Clean room ventilation system

  • US 5,454,756 A
  • Filed: 01/28/1994
  • Issued: 10/03/1995
  • Est. Priority Date: 08/21/1991
  • Status: Expired due to Term
First Claim
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1. An air diffuser panel for attachment to a clean room ceiling structure, the air diffuser panel comprising:

  • a central region defining a plurality of central perforations of a first size;

    a peripheral region angularly disposed upward with respect to the central region, and joined thereto along a junction; and

    a plurality of peripheral perforations defined at the periphery of the air diffuser panel, at least some of said peripheral perforations being larger than the central perforations, and at least some of the peripheral perforations being defined in registration with the junction between the central region and the peripheral region.

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