Infrared detector using a resonant optical cavity for enhanced absorption

• US 5,455,421 A
• Filed: 08/13/1985
• Issued: 10/03/1995
• Est. Priority Date: 08/13/1985
• Status: Expired due to Fees

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Spears, David L.
• Primary Examiner(s): Buczinski, Stephen C.
• Application Number:
  US06/765,316
• Time in Patent Office: 3,703 Days
• Field of Search: 250/338 SE, 250/339, 250/338.4, 250/339.01, 357/30, 257/436
• US Class Current: 250/338.4
• CPC Class Codes: G01J 1/02 Details
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01J 5/08 Optical arrangements
• CPC Class Codes: G01J 5/0853 having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid
• CPC Class Codes: H01L 31/02327 the optical elements being integrated or being directly associated to the device, e.g. back reflectors optical coatings H01L31/0216

Abstract

A photodetector for detecting optical irradiation at a predetermined wavelength is provided with an integral, resonant optical cavity by forming a plurality of layers of material on a metallic reflector backing, the total optical thickness of those layers being an odd multiple of one-quarter of the predetermined wavelength. One of those layers is an active (i.e. optically-absorptive) semiconductor material. When the materials are deposited, that absorbing layer is formed at a level in the cavity including a region of peak optical field. As a result of the enhanced absorption provided by the resonant structure, the active layer may be very thin (i.e., less than one-tenth of a wavelength thick), yielding many beneficial results.

Claims

1. A photodetector for detecting optical radiation in a band centered about a predetermined wavelength, comprising:

a. an optical cavity having a metallic reflector at a first end thereof and being open to receive optical radiation at a second, opposite end thereof, the total optical distance between the first and second ends of the cavity being an odd multiple of one-quarter of said predetermined wavelength, such that when the first end of the cavity is optically irradiated with energy within said band by a source outside the cavity, optical standing waves are produced in the cavity with the optical field intensity of such standing waves varying with distance from the reflector and having at least one peak of intensity within the cavity;

b. a layer of semiconductor material, termed the "active layer", which is optically absorptive at said predetermined wavelength and which is disposed within the cavity at a location including a region of peak optical intensity; and

c. first and second electrodes electrically coupled to the active layer for connecting the detector to apparatus for sensing changes in the detector resulting from the incidence on the open end of the cavity of radiation in said band.

2. The photodetector of claim 1 wherein the thickness of the active layer is approximately equal to the predetermined wavelength divided by four times the index of refraction of the semiconductor material of which it is composed.

3. The photodetector of claim 2 further including

d. an optically transparent, relatively highly conductive semiconductor layer disposed between and contacting on one side the metallic reflector and on another side the active layer.

4. The photodetector of claim 2 further including

e. a first, optically transparent, relatively highly conductive semiconductor layer, termed the first contacting layer, disposed between and contacting on one side the metallic reflector and on another side the active layer;

and

f. a second, optically transparent, relatively highly conductive semiconductor layer, termed the second contacting layer, disposed between the open end of the cavity and the active layer and contacting the active layer.

5. The photodetector of claim 4 wherein the first electrode is operatively connected to the first contacting layer and the second electrode is operatively connected to the second contacting layer.

6. The photodetector of claim 2 further including

g. a first layer of optically transparent dielectric material disposed between and contacting on one side the metallic reflector and on another side the active layer.

7. The photodetector of claim 6 wherein the first and second electrodes are operatively connected to opposite sides of the active layer.

8. The photodetector of claim 7 further including

h. an optically transparent, electrically dielectric layer disposed on the active layer, between the active layer and the open end of the cavity.

9. The photodetector of claim 1 wherein the thickness of the active layer is substantially less than its absorption length.

10. The photodetector of claim 9 wherein the thickness of the active layer is approximately equal to the predetermined wavelength divided by four times the index of refraction of the active semiconductor material.