Transparent conductive film consisting of zinc oxide and gallium

• US 5,458,753 A
• Filed: 06/24/1993
• Issued: 10/17/1995
• Est. Priority Date: 07/10/1992
• Status: Expired due to Fees

• Current Assignee: Asahi Glass Company, Limited (AGC, Inc.)
• Original Assignee: Asahi Glass Company, Limited (AGC, Inc.)
• Inventors: Adachi, Kunihiko, Sato, Kazuo, Mitsui, Akira
• Primary Examiner(s): Thibodeau, Paul J.
• Assistant Examiner(s): Sand, Stephen
• Application Number:
  US08/080,522
• Time in Patent Office: 845 Days
• Field of Search: 136/262, 136/265, 106/286.1, 106/286.8, 106/286.2, 252/512, 252/518, 428/457, 428/544, 428/546, 428/632, 428/642, 428/658, 428/689, 428/913, 204/192.1, 204/192.17, 204/192.21, 204/192.29
• US Class Current: 204/192.29
• CPC Class Codes: C03C 17/245 by deposition from the vapour phase
• CPC Class Codes: C03C 2217/216 ZnO
• CPC Class Codes: C03C 2217/24 Doped oxides
• CPC Class Codes: C03C 2218/151 by vacuum evaporation
• CPC Class Codes: C03C 2218/154 by sputtering
• CPC Class Codes: C23C 14/086 of zinc, germanium, cadmium, indium, tin, thallium or bismuth
• CPC Class Codes: C23C 14/3414 Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

Abstract

A transparent conductive film comprising zinc oxide as the main component, which contains gallium in an amount of from 0.5 to 12 atomic % based on the total amount of gallium and zinc, and which has a diffraction peak of the (002) face in its X-ray diffraction pattern, wherein the half value width of the diffraction peak of the (002) face is at most 0.6 degree.

Claims

1. A transparent conductive film comprising zinc oxide and gallium, wherein gallium is present in an amount from 0.5 to 12 atomic % based on the total amount of gallium and zinc, and which has a diffraction peak of the (002) face in its X-ray diffraction pattern, wherein the half-width of the diffraction peak of the (002) face is at most 0.6 degrees.