Plasma enhancement apparatus and method for physical vapor deposition

• US 5,458,754 A
• Filed: 04/15/1994
• Issued: 10/17/1995
• Est. Priority Date: 04/22/1991
• Status: Expired due to Term

• Current Assignee: Ionbond LLC (IHI Corporation)
• Original Assignee: Multi-Arc Scientific Coatings
• Inventors: Coll, Bernard F., Sathrum, Paul E.
• Primary Examiner(s): NGUYEN, NAM X
• Application Number:
  US08/228,185
• Time in Patent Office: 550 Days
• Field of Search: 204/192.38, 204/298.41, 427/581
• US Class Current: 204/192.38
• CPC Class Codes: C23C 14/325 Electric arc evaporation
• CPC Class Codes: H01J 37/32055 Arc discharge
• CPC Class Codes: H01J 37/32623 Mechanical discharge control means
• CPC Class Codes: H01J 37/3266 Magnetic control means
• CPC Class Codes: Y10T 428/265 1 mil or less
• CPC Class Codes: Y10T 428/30 Self-sustaining carbon mass or layer with impregnant or other layer
• CPC Class Codes: Y10T 428/31678 Of metal

Abstract

The present invention provides a plasma enhancement method and apparatus for electric arc vapor deposition. The plasma enhancement apparatus is positioned to act upon plasma generated from a plasma source before the plasma reaches a substrate to be coated by the plasma. The plasma enhancement apparatus includes a magnet disposed about a magnet axis and defining a first aperture, and a core member disposed about a core member axis and at least partially nested within the first aperture. The core member defines a second aperture, and the plasma enhancement apparatus is arranged and configured in such a manner that the evaporated cathode source material passes from the cathode source and through the second aperture toward the substrate to be coated by the evaporated cathode source material. The plasma is favorably conditioned as it passes through the plasma enhancement apparatus.

Claims

1. A plasma enhancement apparatus for use in combination with an electric arc vapor deposition system having a vacuum chamber, a consumable cathode source of coating material defining a cathode evaporation surface and an anode operable with the vacuum chamber, means for supporting a substrate to be coated in spaced line-of-sight relation to said cathode, said line-of-sight extending along an axis line extending between said cathode evaporation surface and said substrate, means for initiating and sustaining an electric arc between the cathode evaporation surface and said anode to create a column of plasma material projecting in line-of-sight manner along said axis line in a vacuum space extending from said cathode evaporation surface toward said substrate, comprising:

field generating means mounted relative to said cathode evaporation surface and said substrate, so as to maintain said line-of-sight therebetween, for generating a magnetic field having magnetic field lines arranged around said axis line and between said cathode evaporation surface and said substrate and of a configuration whereby said field lines are constricted in at least a portion of said vacuum space;

said magnetic field being further characterized by having;

a. strength and orientation relative to said cathode evaporation surface that defines the intensity and confined movement of an arc spot of said arc over said cathode evaporation surface so as to minimize the generation of macroparticles at said cathode evaporation surface and to minimize their presence in said column of plasma material projected therefrom; and

b. strength and orientation that energizes electrons of said column of plasma material within at least a portion of said vacuum space, sufficiently to cause macroparticle vaporization therein, and that significantly increases the ionization, ionic charge and ionization fraction of said column of plasma material at said substrate;

whereby highly ionized substantially macroparticle reduced coating material from said cathode source impinges upon said substrate.

2. The plasma enhancement apparatus as recited in claim 1, wherein that portion of said column of plasma material impinging upon said substrate is virtually macroparticle free and fully ionized.

3. The plasma enhancement apparatus as recited in claim 2, wherein said cathode source comprises titanium.

4. The plasma enhancement apparatus as recited in claim 1, wherein said cathode source comprises graphite material.

5. The plasma enhancement apparatus as recited in claim 4, wherein that portion of said column of plasma material impinging upon said substrate is virtually free of hydrogen.

6. The plasma enhancement apparatus as recited in claim 1, wherein said cathode source comprises difficult to a material with a high melting point or vaporization temperature of the order of or greater than 2000°

kelvin.

7. The plasma enhancement apparatus as recited in claim 1, further including means for introducing a reactive gas into the vacuum chamber such that said reactive gas forms a portion of said column of plasma material;

and wherein said magnetic field enhances and improves ionization of said reactive gas adjacent said cathode evaporation surface, thereby promoting formation of a compound layer on the cathode evaporation surface, which further minimizes generation of macroparticles at said cathode evaporation surface.

8. The plasma enhancement apparatus as recited in claim 1, wherein said field generating means comprises in part, permanent magnets.

9. The plasma enhancement apparatus as recited in claim 1, wherein said magnetic field generating means comprises electromagnets.

10. The plasma enhancement apparatus as recited in claim 9, including means for shaping said column of plasma material about said axis line ;

and wherein said field generating means are generally coaxially aligned with said axis line.

11. The plasma enhancement apparatus as recited in claim 10, wherein said field generating means comprises an electromagnet with at least two core members, forming a magnetic circuit;

said core members defining a gap within said magnetic circuit having an axial length, wherein said magnetic field extends across said gap and operatively engages and acts upon said column of plasma material along an axial focus zone coaxially aligned with said axis line, and having an axial length generally corresponding to the axial length of said gap.

12. The plasma enhancement apparatus as recited in claim 11, wherein said field generating means comprises means for selectably changing said core members to selectably vary the axial length of said axial focus zone to accommodate various deposition applications and the use of widely differing cathode source materials.

13. The plasma enhancement apparatus as recited in claim 1, wherein said field generating means comprises an electromagnet with at least two core members, forming a magnetic circuit;

said core members defining a gap within said magnetic circuit wherein said magnetic field extends across said gap and operatively engages and acts upon said column of plasma material.

14. The plasma enhancement apparatus as recited in claim 13, wherein said core members comprise selectable core piece means, that can be selectively changed, for varying the shape and magnitude of the magnetic field across said gap.

15. The plasma enhancement apparatus as recited in claim 1, wherein said field generating means comprises means for establishing a magnetic circuit having a plurality of distinct magnetic field segments within said magnetic field and engaging said column of plasma material along its longitudinal length, said plurality of distinct magnetic field segments collectively defining a focus zone axially aligned along said axis line extending from said cathode evaporation surface to said substrate.

16. A process of enhancing electric arc vapor deposition coating of a substrate within a vacuum deposition chamber by a plasma of coating material from a consumable cathode, comprising the steps of:

a. operatively arranging an evaporation surface of a consumable cathode source of coating material in line-of-sight position relative to a substrate within a vapor deposition chamber;

b. striking and maintaining an electric arc within said vapor deposition chamber, between said cathode evaporation surface and an anode, to create a plasma of coating material from said cathode evaporation surface said electric arc forming one or more arc spots on said cathode evaporation surface;

c. directing a column of said plasma in line-of-sight manner along an axis line extending from said cathode evaporation surface toward said substrate;

d. magnetically controlling the current density and movement of said arc spot over said cathode evaporation surface to reduce formation of macroparticles and to minimize their presence in said plasma column;

e. magnetically energizing electrons in said line-of-sight plasma column sufficiently to cause macroparticle vaporization therein and to significantly increase ionization, the ionic charge and the ionization fraction of said plasma; and

f. impinging said column of energized plasma onto said substrate to form a smooth, dense and virtually macroparticle free coating on said substrate.

17. The method as recited in claim 16, wherein said cathode source of coating material comprises titanium;

and further comprising the step of cooperatively performing the steps of magnetically controlling the current density and movement of the arc spot and of magnetically energizing electrons said plasma column, so as to virtually completely ionize the plasma column material that impinges on the substrate.

18. The method as recited in claim 17, further including the steps of:

introducing a reactive gas into the deposition chamber; and

ionizing said reactive gas adjacent the cathode evaporation surface to promote formation of a compound layer on the cathode evaporation surface that inhibits macroparticle emission into the plasma column.

19. The method as recited in claim 16, wherein said cathode source of coating material comprises carbon-based material, and further comprising cooperatively performing the steps of magnetically controlling the current density and movement of the arc spot and magnetically energizing said plasma column, so that a carbon stream virtually free of hydrogen impinges on said substrate;

thereby forming a diamond-like coating on said substrate.

20. The method as recited in claim 16 wherein the step of magnetically energizing the line-of-sight plasma column is performed in part by means of a magnetic circuit having at least two core members;

and further including the step of varying selection of said core members to respectively accommodate varied cathode source materials.

21. The method as recited in claim 20, wherein the step of variably selecting said core members comprises selectively providing a plurality of core members to define a magnetic circuit having a magnetic field that intersects said plasma column along its line-of-sight length, wherein the strength and shape of said field can be accurately varied.

22. A method of forming virtually macroparticle free coatings on a substrate within an electric arc vapor deposition system which creates a plasma of coating material by striking an electric arc between a consumable cathode and an anode within an evacuated deposition chamber, comprising the steps of:

a. evacuating the deposition chamber to a predetermined pressure;

b. creating and maintaining an electric arc between an evaporation surface of a cathode and an anode, to produce a plasma of coating material projecting from said evaporation surface;

c. directing a column of said plasma of coating material in line-of-sight manner along an axis line between said cathode evaporation surface and a substrate within said deposition chamber;

d. magnetically controlling the intensity and movement of the electric arc on the cathode evaporation surface so as to minimize generation of macroparticle emission into the column of plasma material; and

e. applying a magnetic field to said column of plasma material, by passing the column of plasma material through a core configuration while maintaining said line-of-sight manner of said column of plasma material toward the substrate, to increase the core energy of electrons of said column of plasma material sufficiently to vaporize macroparticles within said column;

whereby said column of plasma material arrives virtually macroparticle free at said substrate.

23. The method as recited in claim 22 further including the steps of:

a. introducing a reactive gas into the deposition chamber; and

b. ionizing said reactive gas adjacent the cathode evaporation surface to promote formation of a compound layer at the cathode evaporation surface to minimize generation of macroparticle emission into the column of plasma material.

24. The method as recited in claim 22, further including the step of applying a magnetic field to the column of plasma material while maintaining its line-of-sight movement to significantly increase the ionization, the ionic charge and the ionization fraction of said column of plasma material prior to reaching said substrate.

25. The method as recited in claim 24, including the step of coating a surface of the substrate with said line-of-sight column of plasma material.

26. The method as recited in claim 25, further including the step of recovering from said deposition chamber the coated substrate having an adherent homogeneous, dense and virtually macroparticle free coating.

27. An enhanced electric arc vapor deposition system comprising:

a. a vacuum deposition chamber;

b. an anode operatively associated with said deposition chamber;

c. a consumable cathode source mounted within said deposition chamber, said cathode source defining an evaporation surface;

d. a substrate;

e. means for supporting said substrate in spaced line of-sight relation to said cathode evaporation surface within said vacuum deposition chamber;

f. means operatively connected to said anode and said cathode source for establishing and maintaining an electric arc between said cathode evaporation surface and said anode, thereby creating a column of plasma material projecting in line-of-sight manner along an axis line extending from said cathode evaporation surface toward said substrate; and

g. magnetic field generating means mounted so as to maintain the line-of-sight relation between said cathode evaporation surface and said substrate, for creating a magnetic field having;

i. strength and orientation relative to said cathode evaporation surface to control the intensity and movement of said arc over said cathode evaporation surface so as to minimize emission of macroparticles from said cathode evaporation surface into said column of plasma material; and

ii. strength and orientation relative to said column of plasma material to increase the core energy of electrons of said column of plasma material sufficiently to cause macroparticle vaporization therein, and to significantly increase the ionization, the ionic charge and the ionization fraction of said column of plasma material at said substrate;

whereby highly ionized reduced macroparticle plasma material from said cathode impinges upon said substrate.

28. The apparatus as recited in claim 27, wherein said cathode comprises titanium.

29. The apparatus as recited in claim 27, wherein said cathode comprises carbon-based material.

30. The apparatus as recited in claim 27, wherein said cathode comprises a material with a high melting point or vaporization temperature of the order of or greater than 2000°

kelvin, or which displays negative temperature coefficient of resistivity.

31. The apparatus as recited in claim 27, wherein said magnetic field generating means includes means for creating said magnetic field having strength and orientation relative to said cathode evaporation surface sufficient to cause rapid confined movement of the arc across said cathode evaporation surface and to split the arc into multiple cathode spots on the cathode evaporation surface.

32. The apparatus as recited in claim 27, further including:

a. means for introducing a reactive gas into the vacuum deposition chamber; and

b. means for ionizing said reactive gas and for retaining large numbers of ions of said reactive gas directly adjacent said cathode evaporation surface;

thereby causing fewer and smaller macroparticles to be emitted from said cathode evaporation surface.

33. The apparatus as recited in claim 27, wherein said magnetic field generating means creates said magnetic field having an orientation that engages said column of plasma material along an axial focus zone intermediate said cathode evaporation surface and said substrate, and a strength that increases the ionization fraction of the column of plasma material leaving said axial focus zone to about 100 percent.

34. The method of making a hard, smooth film coating directly on a substrate by electric arc vapor deposition from a solid carbon source, said method comprising the steps of:

a. forming a line-of-sight plasma within a deposition zone, under vacuum conditions, by means of an electric arc passing between an arc spot on a consumable carbon-based cathode and an anode, said line-of-sight extending in the deposition zone between said cathode and a substrate spaced therefrom;

b. magnetically controlling the arc at the cathode to increase the stability and lifetime of the arc spot on the cathode, thereby leading to reduction of macroparticle emission;

c. magnetically converging the line-of-sight plasma by a magnetic field having strength and orientation for increasing the energy of electrons in said plasma core sufficient to atomize macroparticles;

d. preparing a substrate within the deposition zone by impacting the line-of-sight plasma from step (c) onto a surface of the substrate to nucleate the substrate surface in preparation for coating;

e. coating the nucleated substrate surface with said line-of-sight plasma from step (c); and

f. recovering from the plasma deposition zone said substrate having an adherent diamond-like carbon coating directly thereon, said coating being homogeneous, dense, smooth and extremely hard.

35. The method of claim 34, wherein said plasma used in said coating step is substantially free of macroparticles.

36. The method of claim 34, in which the substrate is a metal substrate.

37. The method of claim 34, in which the substrate is a ferrous metal.

38. The method of claim 34, wherein the diamond-like coating has a thickness greater than about 3 microns.