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Guarded capacitance probes for measuring particle concentration and flow

  • US 5,459,406 A
  • Filed: 07/01/1994
  • Issued: 10/17/1995
  • Est. Priority Date: 07/01/1994
  • Status: Expired due to Term
First Claim
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1. A guarded capacitance probe structure comprising:

  • a sensor electrode having an aperture formed therein;

    a guard electrode having an outer portion surrounding said sensor electrode and an inner portion contained within said aperture, said guard electrode being electrically insulated from said sensor electrode; and

    an electrically grounded surface surrounding said guard electrode and electrically insulated therefrom.

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