Illumination device
First Claim
Patent Images
1. An illumination device, comprising:
- first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction transverse to the optical axis;
an optical system for receiving light passed through said first and second optical integrators, and for forming a secondary light source; and
means for relatively shifting said second optical integrator relative to said first optical integrator, in a direction transverse to the optical axis.
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Abstract
An illumination device includes first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction intersecting the optical axis; a condensing optical system for collecting light passed through the first and second optical integrators, to form a secondary light source; and a mechanism for relatively shifting the second optical integrator relative to the first optical integrator, in a direction intersecting the optical axis.
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Citations
50 Claims
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1. An illumination device, comprising:
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first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction transverse to the optical axis; an optical system for receiving light passed through said first and second optical integrators, and for forming a secondary light source; and means for relatively shifting said second optical integrator relative to said first optical integrator, in a direction transverse to the optical axis. - View Dependent Claims (2, 3, 4, 5, 6, 45)
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7. An illumination device, comprising:
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light source means; first, second and third optical integrators disposed along an optical axis, for receiving light from said light source means, each of said first to third optical integrators having lens elements arrayed in a direction transverse to the optical axis; a first optical system for directing, onto said third optical integrator, light passed through said first and second optical integrators, to form a secondary light source of said third optical integrator; a second optical system for directing light from said secondary light source to a surface to be illuminated; and means for relatively shifting said second optical integrator relative to said first optical integrator, in a direction transverse to the optical axis. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 46)
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16. An exposure apparatus for exposing a substrate to a mask, comprising:
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first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction transverse to the optical axis; an optical system for receiving light passed through said first and second optical integrators, and for forming a secondary light source for illumination of the mask; and means for relatively shifting said second optical integrator relative to said first optical integrator, in a direction transverse to the optical axis. - View Dependent Claims (17, 18, 19, 20, 21)
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22. An illumination device, comprising:
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first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction transverse to the optical axis, said lens elements of said first and second optical integrators having a relative eccentricity in their optical axes; and an optical system for receiving light passed through said first and second optical integrators, and for forming a secondary light source. - View Dependent Claims (23, 24, 25, 26, 47)
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27. An illumination device, comprising:
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light source means; first, second and third optical integrators disposed along an optical axis, for receiving light from said light source means, each of said first to third optical integrators having lens elements arrayed in a direction transverse to the optical axis, said lens elements of said first and second optical integrators having relative eccentricity in their optical axes; a first optical system for directing, onto said third optical integrator, light passed through said first and second optical integrators, to form a secondary light source through said third optical integrator; and a second optical system for directing light from said secondary light source to a surface to be illuminated. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 48)
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35. An exposure apparatus for exposing a substrate to a mask, comprising:
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first and second optical integrators disposed along an optical axis and each having lens elements arrayed in a direction transverse to the optical axis, said lens elements of said first and second optical integrators having a relative eccentricity in their optical axes; and an optical system for receiving light passed through said first and second optical integrators, and for forming a secondary light source. - View Dependent Claims (36, 37, 38, 39, 49)
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40. An exposure apparatus for exposing a substrate to a mask, comprising:
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light source means; first, second and third optical integrators disposed along an optical axis, for receiving light from said light source means, each of said first to third optical integrators having lens elements arrayed in a direction transverse to the optical axis, said lens elements of said first and second optical integrators having relative eccentricity in their optical axes; a first optical system for directing, onto said third optical integrator, light passed through said first and second optical integrators, to form a secondary light source through said third optical integrator; a second optical system for directing light from said secondary light source to a surface to be illuminated; and a projection optical system for projecting an image of a pattern of the mask, irradiated with said secondary light source, to the substrate. - View Dependent Claims (41, 42, 43, 44, 50)
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Specification