Digitally-temperature-compensated strain-gauge pressure measuring apparatus

• US 5,460,049 A
• Filed: 01/26/1994
• Issued: 10/24/1995
• Est. Priority Date: 01/26/1994
• Status: Expired due to Fees

• Current Assignee: Seattle Metrics Inc (TASI Holdings, Inc.)
• Original Assignee: Instrumention Northwest Incorporated
• Inventors: Kirsch, Michael S.
• Primary Examiner(s): Chilcot, Richard
• Assistant Examiner(s): FELBER, JOSEPH LEON
• Application Number:
  US08/187,433
• Time in Patent Office: 636 Days
• Field of Search: 73/708, 73/719, 73/720, 73/721, 73/725, 73/726, 73/727, 73/152
• US Class Current: 73/708
• CPC Class Codes: G01L 9/065 with temperature compensating means non electric temperature compensating means G01L19/04

Abstract

A strain gauge exhibits temperature offset errors and span errors which vary from device to device and vary as a function of temperature. A digitally-compensated strain-gauge apparatus executes embedded calibration and compensation programs for improving accuracy over a wide temperature range. Pressure measurement error bands are reduced to approximately to 0.03% of full scale for a 5 psi device over a 0° C. to 50° C. temperature range. A calibration program defines parameters for compensating for such errors. During field operation, a compensation program uses the calibration parameters to generate a more accurate pressure measurement. According to the compensation scheme, current normalized voltage and bridge impedance are derived from the raw data. A first-pass temperature estimate then is derived from the result. The derived first-pass temperature estimate is plugged into a temperature offset error function to find the temperature offset error at the estimated temperature. Such offset error is used to adjust the current normalized voltage. A first-pass pressure estimate is derived from the adjusted current-normalized voltage, then used to correct the bridge impedance. The corrected bridge impedance leads to a corrected temperature estimate, a corrected current normalized voltage and a corrected pressure. The corrected pressure is the compensated pressure measurement.

Claims

1. A pressure sensor, comprising:

a piezoresistive diaphragm having four resistors connected in a bridge configuration, four connection junctions positioned on the bridge, one junction being located between each of the four resistors;

a first resistor connected in series with the bridge at a first one of said four junctions, said first resistor having a first resistance; and

wherein an excitation signal is received at the bridge configuration at the first junction via the first resistor to induce a diaphragm response across opposing second and fourth junctions of said four junctions, the excitation signal having a first voltage; and

wherein a second voltage occurs across the first resistor and a third voltage occurs across said second and fourth junctions of the bridge configuration in response to the excitation signal; and

processing means for executing a first computer program comprising the steps;

calculating a current normalized voltage across the bridge configuration from the second voltage, third voltage and first resistance;

calculating bridge impedance from the first voltage, second voltage and first resistance;

deriving a first-pass estimate of diaphragm temperature based on the calculated bridge impedance;

deriving a first-pass estimate of pressure exerted on the diaphragm from the current normalized voltage and the first-pass temperature estimate;

correcting for temperature-induced errors in the calculated bridge impedance by using the first-pass pressure estimate to derive a corrected bridge impedance;

adjusting the first-pass temperature estimate by using the corrected bridge impedance to derive a corrected estimate of diaphragm temperature;

calculating a temperature offset error and a span error occurring in the diaphragm response;

adjusting the current normalized voltage based on the calculated temperature offset error and span error to generate a corrected current normalized voltage; and

converting the corrected current normalized voltage to a corrected pressure measurement.

2. The pressure sensor of claim 1, further comprising memory for storing calibration parameters used during execution of said first computer program.

3. The pressure sensor of claim 2, in which the calibration parameters comprise non-linear temperature offset error function parameters and non-linear span error function parameters.

4. The pressure sensor of claim 2, in which the step of calculating a temperature offset error comprises execution of a temperature offset error function represented as:

space="preserve" listing-type="equation">β

.sub.el (T)=b.sub.2 T.sup.2 +b.sub.1 T+b.sub.0

where T is the corrected temperature estimate and b₀, b₁, and b₂ are the temperature offset error function parameters.

5. The pressure sensor of claim 2, in which the step of calculating a span error comprises execution of a span error function represented as:

space="preserve" listing-type="equation">α

.sub.e (T)=a.sub.2 T.sup.2 +a.sub.1 T+a.sub.0 ;

where T is the corrected temperature estimate and a₀, a₁, and a₂ are span error function parameters.

6. A pressure measuring apparatus, comprising:

a piezoresistive diaphragm having four resistors connected in a bridge configuration, four connection junctions positioned on the bridge, one junction being located between each of the four resistors;

a first resistor connected in series with the bridge at a first one of said four junctions, said first resistor having a first resistance;

means for generating an excitation signal input to the bridge configuration at the first junction via the first resistor, the excitation signal having a supply voltage, the excitation signal inducing a diaphragm response across opposing second and fourth junctions of said four junctions;

means for detecting the diaphragm response as a second voltage across opposing second and fourth junctions of said four junctions, said second and fourth junctions not including said first junction;

means for detecting a third voltage across the first resistor; and

processing means for executing a first computer program comprising the steps;

calculating a current normalized voltage across the bridge configuration from the second voltage, third voltage and first resistance;

calculating bridge impedance from the supply voltage, third voltage and first resistance;

deriving a first-pass estimate of diaphragm temperature based on the calculated bridge impedance;

deriving a first-pass estimate of pressure exerted on the diaphragm from the current normalized voltage and the first-pass temperature estimate;

correcting for temperature-induced errors in the calculated bridge impedance by using the first-pass pressure estimate to derive a corrected bridge impedance;

adjusting the first-pass temperature estimate by using the corrected bridge impedance to derive a corrected estimate of diaphragm temperature;

calculating a temperature offset error and a span error occurring in the diaphragm response;

adjusting the current normalized voltage based on the calculated temperature offset error and span error to generate a corrected current normalized voltage; and

converting the corrected current normalized voltage to a corrected pressure measurement.

7. The apparatus of claim 6, further comprising:

means for capturing the second voltage and third voltage as calibration data at a plurality of known temperature and known pressure conditions within temperature operating range and pressure operating range of the diaphragm; and

processing means for executing a second computer program which generates calibration parameters, the second computer program comprising the steps;

deriving temperature offset error function parameters from the calibration data;

deriving span error function parameters from the calibration data;

deriving a multiplier parameter and an offset parameter for defining a first-pass pressure estimate function from the calibration data;

deriving corrected temperature function parameters from the calibration data; and

deriving corrected pressure function parameters from the calibration data.

8. The apparatus of claim 6, further comprising memory for storing calibration parameters used during execution of said first computer program.

9. The apparatus of claim 8, in which the calibration parameters comprise non-linear temperature offset error function parameters and non-linear span error function parameters.

10. The apparatus of claim 8, in which the step of calculating a temperature offset error comprises execution of a temperature offset error function represented as:

space="preserve" listing-type="equation">β

.sub.el (T)=b.sub.2 T.sup.2 +b.sub.1 T+b.sub.0

where T is the corrected temperature estimate and b₀, b₁, and b₂ are the temperature offset error function parameters.

11. The apparatus of claim 8, in which the step of calculating a span error comprises execution of a span error function represented as:

space="preserve" listing-type="equation">α

.sub.e (T)=a.sub.2 T.sup.2 +a.sub.1 T+a.sub.0 ;

where T is the corrected temperature estimate and a₀, a₁, and a₂ are span error function parameters.