×

Mechanical force sensing semiconductor device

  • US 5,461,916 A
  • Filed: 08/20/1993
  • Issued: 10/31/1995
  • Est. Priority Date: 08/21/1992
  • Status: Expired due to Term
First Claim
Patent Images

1. A semiconductor mechanical sensor comprising:

  • a semiconductor substrate;

    a beam structure extending in spaced relation over said semiconductor substrate,a weight formed at an end of said beam structure and including first and second surface areas, said weight being movable along a predetermined axial direction;

    a first electrode formed on a surface of said semiconductor substrate and facing said first surface area on said weight;

    a second electrode formed on another surface of said semiconductor substrate, said second electrode facing said second surface area formed on said weight and in a direction generally perpendicular to the direction in which said first electrode faces and perpendicular to said predetermined axial direction;

    said first electrode and said first surface area adapted to have a continuous change in potential difference applied therebetween so that the weight oscillates in said predetermined axial direction, andwherein movement of said weight produces a change in capacitance between said second surface area and said second electrode to enable said sensor to detect mechanical forces acting thereon.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×