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Acceleration sensor

  • US 5,461,917 A
  • Filed: 10/05/1993
  • Issued: 10/31/1995
  • Est. Priority Date: 10/10/1992
  • Status: Expired due to Fees
First Claim
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1. An acceleration sensor, comprising:

  • a first outer silicon plate;

    a second outer silicon plate, at least one of the first outer silicon plate and the second outer silicon plate having a hole therethrough;

    a middle silicon plate located between the first outer silicon plate and the second outer silicon plate, the first outer silicon plate, the middle plate and the second outer silicon plate defining a hollow space, the hollow space being aligned with the hole, the middle plate having an acceleration-sensitive moveable element disposed within the hollow space; and

    an additional plate connected to one of the first outer silicon plate and the second outer silicon plate for closing the hole in an air-tight manner.

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