Acceleration sensor
First Claim
Patent Images
1. An acceleration sensor, comprising:
- a first outer silicon plate;
a second outer silicon plate, at least one of the first outer silicon plate and the second outer silicon plate having a hole therethrough;
a middle silicon plate located between the first outer silicon plate and the second outer silicon plate, the first outer silicon plate, the middle plate and the second outer silicon plate defining a hollow space, the hollow space being aligned with the hole, the middle plate having an acceleration-sensitive moveable element disposed within the hollow space; and
an additional plate connected to one of the first outer silicon plate and the second outer silicon plate for closing the hole in an air-tight manner.
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Abstract
An acceleration sensor and a method of making an acceleration sensor is described in which a movable sensor element is located in a hollow space formed in the middle of three silicon plates. During production, air can be removed from the hollow space through a hole in one of the two outer plates. The hole is then closed by an additional plate, which allows for a defined pressure to be set in the hollow space.
24 Citations
12 Claims
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1. An acceleration sensor, comprising:
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a first outer silicon plate; a second outer silicon plate, at least one of the first outer silicon plate and the second outer silicon plate having a hole therethrough; a middle silicon plate located between the first outer silicon plate and the second outer silicon plate, the first outer silicon plate, the middle plate and the second outer silicon plate defining a hollow space, the hollow space being aligned with the hole, the middle plate having an acceleration-sensitive moveable element disposed within the hollow space; and an additional plate connected to one of the first outer silicon plate and the second outer silicon plate for closing the hole in an air-tight manner. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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Specification