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Hydrocyclosiloxane membrane prepared by plasma polymerization process

  • US 5,463,010 A
  • Filed: 11/12/1993
  • Issued: 10/31/1995
  • Est. Priority Date: 11/12/1993
  • Status: Expired due to Term
First Claim
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1. A composition of matter comprising a membrane formed from the plasma polymerization of hydrocyclosiloxane monomer of the general formula:

  • ##STR5## where R is an aliphatic group having 1 to about 5 carbon atoms and n is an integer from 2 to about 10.

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