Micro vacuum device
First Claim
1. A micro vacuum device having an electron emitter, a gate, and a collector each provided in a vacuum, wherein said electron emitter is formed into a thin film form on a thin film heater rising in midair and said electron emitter is a provided over a portion of said gate with a space therebetween so that said electron emitter causes field emission of electrons.
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Accused Products
Abstract
In the micro vacuum device according to the present invention, an electron emitter is formed into a thin film form on a thin film heater rising in midair by means of air bridge, or a thin film heater is formed as an electron emitter, and the electron emitter is provided adjacent to a gate with a space therebetween so that field emission of electrons is easily effected, or the electron emitter is heated so that thermoelectrons are easily emitted.
25 Citations
37 Claims
- 1. A micro vacuum device having an electron emitter, a gate, and a collector each provided in a vacuum, wherein said electron emitter is formed into a thin film form on a thin film heater rising in midair and said electron emitter is a provided over a portion of said gate with a space therebetween so that said electron emitter causes field emission of electrons.
- 12. A micro vacuum device having an electron emitter, a gate and a collector each provided in a vacuum, wherein said collector is formed from a conductive substrate, a gate electrode is provided via an insulating thin film on said collector, a hole is formed in said insulating thin film so that said collector is exposed to inside of said gate electrode, an electron emitter formed into a thin film form on a thin film heater is provided near a center of said hole, and said electron emitter is provided over a portion of said gate so that said electron emitter causes field emission of electrons.
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20. A micro vacuum device formed on a silicon substrate having a main surface, comprising:
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an insulating film formed on said main surface of said silicon substrate; a gate formed on said insulating film; a collector formed on said insulating film spaced apart from said gate; and an electron emitter mounted on a thin film heater formed over and spaced apart from a portion of said gate. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A micro vacuum device formed on a silicon substrate having a main surface with a recess therein, comprising:
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an insulating film formed on said main surface of said silicon substrate with an opening exposing at least a portion of said recess; a ring-shaped gate and gate electrode formed on said insulating film with said ring-shaped gate having a circular opening over said recess; a collector formed in the recess in said substrate proximate the center of said circular opening and exposed therethrough; and a electron emitter mounted on a thin film heater positioned over said ring-shaped gate and having a sharpened tip positioned proximate the center of said circular opening facing said collector so as to cause field emission of electrons upon application of a voltage. - View Dependent Claims (32, 33, 34, 35, 36, 37)
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Specification