Guard ring electrostatic chuck

• US 5,463,525 A
• Filed: 12/20/1993
• Issued: 10/31/1995
• Est. Priority Date: 12/20/1993
• Status: Expired due to Term

• Current Assignee: FM Industries Inc. (NGK Insulators Limited)
• Original Assignee: International Business Machines Corporation
• Inventors: Keller, John H., Barnes, Michael S., Westerfield, Robert P. Jr., Tompkins, Robert E., Logan, Joseph S.
• Primary Examiner(s): Gaffin, Jeffrey A.
• Application Number:
  US08/169,932
• Time in Patent Office: 680 Days
• Field of Search: 361/230, 361/233, 361/234, 361/235, 269/8, 269/903, 279/128
• US Class Current: 361/234
• CPC Class Codes: H01J 2237/0206 Extinguishing, preventing or controlling unwanted discharges
• CPC Class Codes: H01L 21/68 for positioning, orientation or alignment
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: H02N 13/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
• CPC Class Codes: Y10T 279/23 with magnetic or electrostatic means

Abstract

An electrostatic chuck suppresses the formation of vacuum arcs between the back of the wafer being processed and the body of the chuck by the interposition of a guard ring that floats close to the self-bias potential induced by the plasma on the wafer, thereby capacitively dividing the voltage between the wafer and the closest electrode.

Claims

1. An electrostatic chuck system for holding, in a vacuum ambient, by electrostatic attraction of a DC potential a workpiece having a workpiece radius comprising:

at least two circularly symmetric, concentric aluminum electrodes having a hard-coat alumina coating and together providing a planar clamping surface, at least one of said aluminum electrodes having gas feed means therein, characterized in that;

an outer electrode of said at least two circularly symmetric, concentric aluminum electrodes has an electrode outer radius less than said workpiece radius by a guard ring distance;

said outer electrode is surrounded by a conductive guard ring having a guard ring outer radius less than said workpiece radius by an overhang amount, having a guard ring top surface substantially coplanar with said planar clamping surface and being dielectrically isolated from and capacitively coupled to said outer electrode and to said workpiece, whereby said guard ring suppresses vacuum arcs between said workpiece and said outer electrode by establishing a equipotential area substantially equal in potential to said workpiece between said workpiece and said outer electrode.

2. A system according to claim 1, further characterized in that:

RF power is fed through said at least two aluminum electrodes and coupled therefrom to said workpiece, said RF power being capacitively coupled to said guard ring and capacitively coupled therefrom to that portion of said workpiece having a radius greater than said electrode outer radius.

3. A system according to claim 2, further characterized in that:

an annular dielectric field shaping ring is disposed radially outward from said guard ring and having a field shaping inner radius substantially equal to said guard ring outer radius, whereby said workpiece overlaps said annular dielectric field shaping ring.

4. A system according to claim 3, further characterized in that:

one of said aluminum electrodes has an annular form and is supported in a recess in the other of said aluminum electrodes, said aluminum electrodes having at least one interface therebetween;

RF power is connected directly to both said aluminum electrodes and RF power is capacitively coupled to said guard ring from said outer electrode; and

said aluminum electrodes are decoupled by an annular dielectric member having a greater thickness in a radial region abutting said interface between said aluminum electrodes.

5. A system according to claim 1, further characterized in that:

gas flows radially outward from a distribution groove an said top surface of said outer electrode and flows between said workpiece and said guard ring.

6. A system according to claim 5, further characterized in that:

RF power is fed through said at least two aluminum electrodes and coupled therefrom to said workpiece, said RF power being capacitively coupled to said guard ring and capacitively coupled therefrom to that portion of said workpiece having a radius greater than said electrode outer radius.

7. A system according to claim 6, further characterized in that:

an annular dielectric field shaping ring is disposed radially outward from said guard ring and having a field shaping inner radius substantially equal to said guard ring outer radius, whereby said workpiece overlaps said annular dielectric field shaping ring.

8. A system according to claim 7, further characterized in that:

one of said aluminum electrodes has an annular form and is supported in a recess in the other of said aluminum electrodes, said aluminum electrodes having at least one interface therebetween;

RF power is connected directly to both said aluminum electrodes and RF power is capacitively coupled to said guard ring from said outer electrode; and

said aluminum electrodes are decoupled by an annular dielectric member having a greater thickness in a radial region abutting said interface between said aluminum electrodes.

9. An electrostatic chuck system for holding, in a vacuum ambient, by electrostatic attraction of a DC potential a workpiece having a workpiece radius comprising:

at least two circularly symmetric, concentric aluminum electrodes having a hard-coat alumina coating and together providing a planar clamping surface, at least one of said aluminum electrodes having gas feed means therein, characterized in that;

an outer electrode of said at least two circularly symmetric, concentric aluminum electrodes has an electrode outer radius less than said workpiece radius by a guard ring distance;

said outer electrode is surrounded by a conductive guard ring having a guard ring outer radius less than said workpiece radius by an overhang amount, having a guard ring top surface substantially coplanar with said planar clamping surface and being dielectrically isolated from to said outer electrode;

said conductive guard ring has at least one sensing pin extending therefrom and exposed to the plasma, thereby raising said guard ring to said plasma potential, whereby said guard ring suppresses vacuum arcs between said workpiece and said outer electrode by establishing a equipotential area substantially equal in potential to said plasma between said workpiece and said outer electrode.

10. A system according to claim 9, further characterized in that:

RF power is fed through said at least two aluminum electrodes and coupled therefrom to said workpiece, said RF power being capacitively coupled to said guard ring and capacitively coupled therefrom to that portion of said workpiece having a radius greater than said electrode outer radius.

11. A system according to claim 10, further characterized in that:

an annular dielectric field shaping ring is disposed radially outward from said guard ring and having a field shaping inner radius substantially equal to said guard ring outer radius, whereby said workpiece overlaps said annular dielectric field shaping ring.

12. A system according to claim 11, further characterized in that:

one of said aluminum electrodes has an annular form and is supported in a recess in the other of said aluminum electrodes, said aluminum electrodes having at least one interface therebetween;

RF power is connected directly to both said aluminum electrodes and RF power is capacitively coupled to said guard ring from said outer electrode; and

said aluminum electrodes are decoupled by an annular dielectric member having a greater thickness in a radial region abutting said interface between said aluminum electrodes.