Charge detection device, a method for producing the same, and a charge transfer and detection apparatus including such a charge detection device
First Claim
1. A charge detection device for converting a signal charge, consisting of carriers of a first polarity, externally provided, into a voltage signal, the charge detection device comprising a MOS transistor, the MOS transistor including:
- a semiconductor substrate of a first conductivity type;
a first semiconductor layer having a transistor channel for carriers of a second polarity, the first semiconductor layer being formed in the semiconductor substrate and having a second conductivity type, the carriers of the second polarity being majority carriers of the first semiconductor layer;
an insulating layer provided on the first semiconductor layer; and
a gate electrode provided on the insulating layer,wherein transistor characteristics of the MOS transistor are changed by the signal charge accumulated in a surface region of the first semiconductor layer immediately below an interface between the first semiconductor layer and the insulating layer, said charge detection device thereby detecting a quantity of the signal charge.
1 Assignment
0 Petitions
Accused Products
Abstract
A charge detection device for converting a signal charge consisting of carriers of a first polarity externally provided into a voltage signals, the charge detection device comprising a MOS transistor, the MOS transistor including: a first semiconductor layer having a transistor channel for carriers of a second polarity; an insulating layer provided on the first semiconductor layer; and a gate electrode provided on the insulating layer, wherein transistor characteristics of the MOS transistor are changed by the signal charge accumulated in a surface region the first semiconductor layer immediately below in interface between the first semiconductor layer and the insulating layer, thereby detecting a quantity of the signal charge.
28 Citations
13 Claims
-
1. A charge detection device for converting a signal charge, consisting of carriers of a first polarity, externally provided, into a voltage signal, the charge detection device comprising a MOS transistor, the MOS transistor including:
-
a semiconductor substrate of a first conductivity type; a first semiconductor layer having a transistor channel for carriers of a second polarity, the first semiconductor layer being formed in the semiconductor substrate and having a second conductivity type, the carriers of the second polarity being majority carriers of the first semiconductor layer; an insulating layer provided on the first semiconductor layer; and a gate electrode provided on the insulating layer, wherein transistor characteristics of the MOS transistor are changed by the signal charge accumulated in a surface region of the first semiconductor layer immediately below an interface between the first semiconductor layer and the insulating layer, said charge detection device thereby detecting a quantity of the signal charge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. A charge transfer and detection apparatus, comprising:
-
a charge transfer device for transferring a signal charge, consisting of carriers of a first polarity; and a charge detection device for converting the signal charge provided by the charge transfer device into a voltage signal, wherein the charge detection device includes a MOS transistor having; a semiconductor substrate of a first conductivity type; a first semiconductor layer having a transistor channel for carriers of a second polarity, the first semiconductor layer being formed in the semiconductor substrate and having a second conductivity type, the carriers of the second polarity being majority carriers of the first semiconductor layer; a insulating layer provided on the first semiconductor layer; and a gate electrode provided on the insulating layer, and wherein transistor characteristics of the MOS transistor are changed by the signal charge accumulated in a surface region, of the first semiconductor layer, immediately below an interface between the first semiconductor layer and the insulating layer, said apparatus thereby detecting a quantity of the signal charge. - View Dependent Claims (13)
-
Specification