Magnetic force microscopy method and apparatus to detect and image currents in integrated circuits

• US 5,465,046 A
• Filed: 03/21/1994
• Issued: 11/07/1995
• Est. Priority Date: 03/21/1994
• Status: Expired due to Term

• Current Assignee: Sandia Corporation (Martin Marietta Corporation)
• Original Assignee: Sandia Corporation (Martin Marietta Corporation)
• Inventors: Anderson, Richard E., Campbell, Ann. N., Cole, Edward I. Jr.
• Primary Examiner(s): Wieder, Kenneth A.
• Assistant Examiner(s): KHOSRAVI, KOURO
• Application Number:
  US08/215,431
• Time in Patent Office: 596 Days
• Field of Search: 324/244, 324/260, 324/754, 324/751, 250/306, 73/105
• US Class Current: 324/244
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 60/54 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G01R 33/0385 in relation with magnetic force measurements magnetic force microscopes G01Q60/50
• CPC Class Codes: Y10S 977/865 Magnetic force probe

Abstract

A magnetic force microscopy method and improved magnetic tip for detecting and quantifying internal magnetic fields resulting from current of integrated circuits. Detection of the current is used for failure analysis, design verification, and model validation. The interaction of the current on the integrated chip with a magnetic field can be detected using a cantilevered magnetic tip. Enhanced sensitivity for both ac and dc current and voltage detection is achieved with voltage by an ac coupling or a heterodyne technique. The techniques can be used to extract information from analog circuits.

Claims

1. A method to non-invasively and nondestructively detect internal current in integrated circuits having internal conductive paths and a top surface, said method comprising the steps of:

(a) positioning an integrated circuit onto a stage of an apparatus having a magnetic tip attached to a cantilever, said cantilever having a base and a resonant frequency;

(b) applying an electrical signal to said integrated circuit to produce magnetic fields from the conductive paths;

(c) approaching said integrated circuit with said magnetic tip of said apparatus to within a distance from said top surface of said integrated circuit small enough for a magnetic interaction to occur between said magnetic tip and the magnetic fields from said internal conductive paths and large enough that said magnetic tip does not physically interact with said top surface of said integrated circuit;

(d) vibrating said cantilever at its resonant frequency;

(e) scanning said integrated circuit and said magnetic tip relative to each other;

(f) detecting changes in the resonance properties of said cantilever caused by interactions in the magnetic forces between said conductive paths and said magnetic tip and determining current paths, magnitudes, and direction in said conductive paths from said changes in the resonance properties of said cantilever; and

(g) generating a map of said current in said integrated circuit.

2. The method of claim 1, further comprising applying a time varying magnetic dipole moment to said magnetic tip at a first frequency, wherein the first frequency is at about an harmonic of said cantilever resonant frequency.

3. The method of claim 2 wherein a time varying current is applied to a solenoid winding around said base to induce a time varying magnetic dipole moment in the magnetic tip to enhance detection sensitivity to said current in said conductive paths.

5. The method of claim 1 wherein said step of scanning said integrated circuit further comprises maintaining said magnetic tip stationary and translating said integrated circuit on a translation stage relative to said tip.

6. The method of claim 1 wherein said step of scanning said integrated circuit further comprises maintaining said integrated circuit stationary and moving said magnetic tip relative to said integrated circuit.

7. The method as claimed in claim 1, wherein said cantilever is coated with a magnetically and electrically conductive material.

8. The method as claimed in claim 7, wherein a voltage is applied directly to said conductive material to permit the apparatus to operate as a charge force microscope and to increase the electric field sensitivity of the charge force microscope.

9. The method as claimed in claim 8, wherein said conductive material is selected from the group consisting of iron, cobalt, nickel, and cobalt-chromium alloy.

10. The method as claimed in claim 1, wherein the apparatus is a magnetic force microscopy system.

11. The method as claimed in claim 1, wherein the magnetic tip has a high enough magnetic dipole moment to detect magnetic fields associated with currents in said conductive paths in said integrated circuit.

12. The method as claimed in claim 1, wherein said integrated circuit has a passivation layer over said conductive paths.

13. The method as claimed in claim 1, wherein the detection sensitivity for current in the integrated circuit is at least 1 mA dc and at least 1 μ

A ac.

14. The method as claimed in claim 1, wherein the electrical signal is a dc voltage.

15. The method as claimed in claim 1, wherein the electrical signal is an ac voltage, wherein said ac voltage is at about the resonant frequency of the cantilever.

16. The method as claimed in claim 14, further comprising applying a time varying current at about the resonance frequency of the cantilever to a solenoid winding around said base which induces a time varying magnetic dipole moment to the magnetic tip to enhance detection sensitivity to said current in said conductive paths.

17. The method as claimed in claim 15, further comprising applying a time varying current at about the resonance frequency of the cantilever to a solenoid winding around said base which induces a time varying magnetic dipole moment to the magnetic tip to enhance detection sensitivity to said current in said conductive paths.

18. The method as claimed in claim 1, wherein the electrical signal has ac component and a dc component and said ac component is at about the resonant frequency of said cantilever, and a time varying magnetic field is applied to a solenoid winding around said cantilever enhancing detection sensitivity to said current in said conductive paths.

19. The method as claimed in claim 18, wherein the ac component of said voltage is a few percent of said dc component of said voltage.

20. The method as claimed in claim 1, further comprising the step of calibrating the detected changes in the resonant properties of said cantilever to the relative current magnitude and direction of the current in said conductive paths.

21. The method as claimed in claim 20, wherein the relative current magnitude and direction of the current in said conductive paths is calibrated with the magnetic tip at a fixed lateral distance from said conductive paths.

24. The method as claimed in claim 1, wherein the image of said current is displayed for the integrated circuit in a single scan in an x-y plane.

27. The method as claimed in claim 1, wherein the map of said current is a current contrast image and said current contrast image displays information about current path, magnitude and direction.

4. A method to non-invasively and nondestructively detect internal currents in integrated circuits having internal conductive paths and a top surface, said method comprising the steps of:

(a) positioning an integrated circuit onto a stage of a scanning probe microscope having a magnetic tip attached to a cantilever having a resonant frequency;

(b) applying an electrical signal to said integrated circuit to induce magnetic fields from said currents in the conductive paths, the electrical signal having an ac component at about the resonant frequency of the cantilever and a dc component;

(c) approaching said integrated circuit with a magnetic tip of said scanning probe microscope to within a distance from said top surface of said integrated circuit, wherein said distance is small enough for a magnetic interaction to occur between said magnetic tip and said magnetic fields from said currents in said conductive paths and large enough that said magnetic tip will not physically interact with said top surface of said integrated circuit;

(d) vibrating said cantilever, wherein said cantilever vibrates at about its resonant frequency;

(e) scanning said integrated circuit and said magnetic tip relative to each other;

(f) detecting changes in the resonance properties of said cantilever caused by interactions in the magnetic forces between said currents in said conductive paths and said magnetic tip and determining current paths, magnitudes, and direction from said changes in the resonance properties of said cantilever; and

(g) generating a map of said current in said integrated circuit.

22. The method as claimed in claim 4, wherein said integrated circuit has a passivation layer over said conductive paths.

23. The method as claimed in claim 4, wherein the detection sensitivity of current in the integrated circuit is at least 1 mA dc and at least 1 μ

A ac.

25. The method as claimed in claim 4, wherein the image of said current is displayed for the integrated circuit in a single scan in an x-y plane.

26. The method as claimed in claim 4, wherein the magnetic tip has a high enough magnetic dipole moment to detect magnetic fields associated with currents in said conductive paths in said integrated circuit.

28. The method as claimed in claim 4, wherein the image of said current is a current contrast image and said current contrast image displays information about said current path, magnitude and direction.

29. The method as claimed in claim 4, further comprising applying an ac signal having a second frequency to said magnetic tip which varies said magnetic tip'"'"'s magnetic dipole moment and said second frequency is equal to about an harmonic of said resonant frequency of said cantilever.