Thermal flow sensor and heat-sensitive resistor therefor

• US 5,465,618 A
• Filed: 03/13/1995
• Issued: 11/14/1995
• Est. Priority Date: 04/30/1992
• Status: Expired due to Fees

• Current Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation), Mitsubishi Electric Corporation
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Inventors: Yasui, Katsuaki, Kishimoto, Yuji
• Primary Examiner(s): Chilcot, Richard
• Assistant Examiner(s): PATEL, HARSHAD R
• Application Number:
  US08/403,133
• Time in Patent Office: 246 Days
• Field of Search: 73/204.18, 73/204.25, 73/204.26, 73/204.27, 73/204.19, 73/118.2, 338/22 R, 338/22 SD, 338/308
• US Class Current: 73/204.27
• CPC Class Codes: G01F 1/692 Thin-film arrangements
• CPC Class Codes: G01P 5/10 by measuring thermal variables

Abstract

A thermal flow sensor comprising a heat-sensitive electrical resistor having a substantially uniform temperature profile so that the heat radiation which causes a measurement error is decreased. The resistor element of the resistor comprises a main heat-sensitive section having a first resistance temperature coefficient and a thermal bullet section having a second resistance temperature coefficient greeter than the first temperature coefficient by at least 1,000 ppm, the thermal buffer section being positioned in the vicinity of the support means. The first temperature coefficient may be a negative value and the second temperature coefficient may be a positive value and the base member may be made of zirconia. Alternatively, the thermal flow sensor of the present invention may comprises the heat-sensitive resistor element which has a negative resistance temperature coefficient along its entire length.

Claims

1. A thermal flow sensor, comprising:

a heat-sensitive electrical resistor comprising an electrically insulating base member and a resistor element disposed thereon, the resistance of which changes with temperature at a predetermined resistance temperature coefficient;

support means for supporting said base member within a flow stream of a fluid;

a bridge circuit including said heat-sensitive resistor and a plurality of other resistors; and

a control circuit for controlling a current in said bridge circuit in such a manner that a predetermined thermal equilibrium state is maintained and for detecting the flow of the fluid from the equilibrium state,

wherein said resistor element comprises a main section having a negative first resistance temperature coefficient and a buffer section having a positive second resistance temperature coefficient, said buffer section being positioned between said main section and said support means.

2. A thermal flow sensor as claimed in claim 1, wherein said second resistance temperature coefficient is greater than said first resistance temperature coefficient by at least 1,000 ppm.

3. A thermal flow sensor as claimed in claim 1, wherein said heat-sensitive resistor is an elongated member supported by said support means at only one end.

4. A thermal flow sensor as claimed in claim 1, wherein said heat-sensitive resistor is an elongated member supported by said support means at opposite ends.

5. A thermal flow sensor as claimed in claim 1, wherein said base member is made of zirconia.

6. A thermal flow sensor as claimed in claim 1, wherein said main section and said buffer section of said resistor element are resistive layers which are electrically connected together and attached directly on said base member.

7. A thermal flow sensor as claimed in claim 1, wherein said main section and said buffer section of said resistor element are resistive layers, wherein the main section layer extends substantially entirely over said base member and a further layer for said buffer section is attached on said main layer.

8. A thermal flow sensor as claimed in claim 1, wherein said base member is an elongated cylindrical member and said resistor element comprises a coil disposed around said cylindrical base member.

9. A thermal flow sensor for sensing the flow rate of air through an intake passage of an internal combustion engine, comprising:

a heat-sensitive electrical resistor comprising an electrically insulating base member and a resistor element disposed thereon, the resistance of which changes with temperature at a predetermined resistance temperature coefficient;

support means for supporting said base member within a flow stream of the intake passage;

a bridge circuit including said heat-sensitive resistor and a plurality of other resistors; and

a control circuit for controlling a current in said bridge circuit in such a manner that a predetermined thermal equilibrium state is maintained and for detecting the flow of the air through the intake passage from the equilibrium state,

wherein said resistor element comprises a main section having a first resistance temperature coefficient and a buffer section having a second resistance temperature coefficient greater than said first resistance temperature coefficient, wherein said buffer section is positioned between said main section and said support means.

10. A thermal flow sensor as recited in claim 9, wherein said second resistance temperature coefficient is greater than said first resistance temperature coefficient by at least 1,000 ppm.