Thin film resistor and method of fabrication

• US 5,468,672 A
• Filed: 06/29/1993
• Issued: 11/21/1995
• Est. Priority Date: 06/29/1993
• Status: Expired due to Fees

• Current Assignee: Fairchild Semiconductor International Incorporated (ON Semiconductor Corporation)
• Original Assignee: Raytheon Company (Rtx Corporation)
• Inventors: Rosvold, Warren C.
• Primary Examiner(s): Chaudhuri, Olik
• Assistant Examiner(s): MULPURI, SAVITRI
• Application Number:
  US08/084,883
• Time in Patent Office: 875 Days
• Field of Search: 437/918, 437/60, 437/142, 437/161, 437/164, 148/DIG. 136, 338/308, 338/314, 427/101, 204/192.21, 204/192.15
• US Class Current: 438/385
• CPC Class Codes: H01C 17/12 by sputtering
• CPC Class Codes: H01C 17/232 Adjusting the temperature coefficient; Adjusting value of resistance by adjusting temperature coefficient of resistance
• CPC Class Codes: H01C 7/006 Thin film resistors

Abstract

A method of fabricating a thin film resistor includes a step of sputter depositing a thin film of resistive material such as a chromium diboride compound on an insulative substrate using an argon sputter gas having a percentage of dopant such as nitrogen selected to optimize a trade off between desirably increasing the thickness of the film and undesirably increasing the temperature coefficient of resistance. A cap layer having a solid diffusant such as free chromium is deposited over the thin film of resistive material. The cap layer serves to protect the thin film of resistive material during subsequent patterning of conductors using wet etching, and also the solid diffusant diffuses into the resistive material during subsequent thermal treatment to drive the temperature coefficient of resistance back down.

Claims

1. A method of fabricating a thin film resistor, comprising the steps of:

sputter depositing a thin film of a resistive material having a thickness and a temperature coefficient of resistance on an insulative substrate in a reactive medium to increase, for a given sheet resistance, the thickness of the thin film while also increasing the temperature coefficient of resistance of the resistive material; and

depositing on the thin film a cap layer comprising chromium silicon monoxide and heat treating the thin film and the cap layer wherein free chromium from the cap layer diffuses into the resistive material of the thin film to reduce the increased temperature coefficient of resistance of the resistive material resulting from the sputter depositing in the reactive medium.

2. The method recited in claim 1 wherein the reactive medium comprises a dopant.

3. The method recited in claim 1 wherein the reactive medium comprises nitrogen.

4. The method recited in claim 1 wherein the resistive material comprises chromium diboride.

5. The method recited in claim 4 wherein the resistive material consists of 85% chromium diboride and 15% silicon chromide by atomic weight.

6. The method recited in claim 1 further comprising a step of selecting a thickness ratio between the thin film and the cap layer to determine the temperature coefficient of resistance of the resistive material.