Semiconductor laser with COD preventing disordered regions

• US 5,469,457 A
• Filed: 11/10/1993
• Issued: 11/21/1995
• Est. Priority Date: 04/12/1993
• Status: Expired due to Fees

• Current Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Inventors: Nagai, Yutaka, Shima, Akihiro
• Primary Examiner(s): Bovernick, Rodney B.
• Assistant Examiner(s): McNutt, Robert
• Application Number:
  US08/149,958
• Time in Patent Office: 741 Days
• Field of Search: 372/45, 372/46, 372/43, 372/44, 372/103
• US Class Current: 372/45.01
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: H01S 5/02232 Liquid-filled housings
• CPC Class Codes: H01S 5/162 with window regions made by diffusion or disordening of the active layer
• CPC Class Codes: H01S 5/168 with window regions comprising current blocking layers
• CPC Class Codes: H01S 5/221 containing aluminium
• CPC Class Codes: H01S 5/2231 with inner confining structure only between the active layer and the upper electrode
• CPC Class Codes: H01S 5/3432 the whole junction comprising only (AI)GaAs

Abstract

A semiconductor laser includes: a first conductivity type semiconductor substrate; a first conductivity type lower cladding layer disposed on the substrate; a quantum well structure disposed on the lower cladding layer; a second conductivity type upper cladding disposed on the quantum well structure; a ridge including a stripe-shaped second conductivity type semiconductor of a length extending in the laser resonator length direction reaching neither semiconductor laser facet and disposed on the upper cladding layer; disordered regions, i.e, window structures, formed in the quantum well structure in the vicinity of the laser resonator facets by ion-implanting a dopant impurity; and a first conductivity type current blocking layer, disposed on the upper cladding layer on the disordered quantum well structure layer, burying the ridge. Accordingly, in the window structure regions, flow of a current that does not produce laser light is prevented, resulting in a semiconductor laser having a high power light output, a low threshold current, and a low operational current.

Claims

1. A semiconductor laser device comprising:

a first conductivity type semiconductor substrate having a front surface and a rear surface opposite said front surface;

a first conductivity type lower cladding layer disposed on the front surface of said semiconductor substrate;

an active layer including a multiple quantum well structure comprising alternatingly laminated barrier layers and well layers, disposed on said lower cladding layer, and having an effective energy band gap;

a second conductivity type upper cladding layer disposed on said multiple quantum well structure;

opposed facets transverse to said lower and upper cladding layers;

a ridge comprising a stripe-shaped second conductivity type semiconductor having a length extending in a laser resonator length direction of said semiconductor laser, spaced from said facets, disposed on said upper cladding layer, and having a refractive index;

a first conductivity type current blocking layer having an energy band gap larger than the effective energy band gap of said multiple quantum well structure and a refractive index smaller than the refractive index of said ridge, said current blocking layer being disposed on said upper cladding layer adjacent to, contacting, and surrounding said ridge;

a region disposed between said ridge and each of said facets adjacent each of said facets, and penetrating through said second conductivity type upper cladding layer and said multiple quantum well structure and into said first conductivity type lower cladding layer, and including a dopant impurity producing the first conductivity type conductivity in a concentration sufficient to disorder said multiple quantum well structure within the region without converting said second conductivity type upper cladding layer to the first conductivity type in said region;

a second conductivity type contact layer disposed on said current blocking layer and said ridge; and

first and second electrodes disposed on said semiconductor substrate and said second conductivity type contact layer, respectively.

2. The semiconductor laser as defined in claim 1 wherein the region extends between said facets, outside and surrounding said ridge, said multiple quantum well structure being disordered throughout the region but not opposite said ridge.

3. A semiconductor laser comprising:

an n type GaAs semiconductor substrate having a front surface and a rear surface opposite said front surface;

an n type Al_x Ga_1-x As lower cladding layer having an energy band gap and disposed on the front surface of said semiconductor substrate;

an active layer including a multiple quantum well structure comprising alternatingly laminated Al_y Ga_1-y As barrier layers and Al_z Ga_1-z As (0≦

z<

y) well layers, having an effective energy band gap smaller than the energy band gap of said lower cladding layer, disposed on said lower cladding layer;

a p type Al_w Ga_1-w As upper cladding layer having an energy band gap larger than the effective energy band gap of said multiple quantum well structure, disposed on said multiple quantum well structure;

opposed facets transverse to said lower and upper cladding layers;

a ridge comprising a stripe-shaped p type Al_t Ga_1-t As layer having a length extending in a laser resonator length direction of said semiconductor laser, spaced from said facets, disposed on said upper cladding layer, and having a refractive index;

an n type Al_r Ga_1-r As (t<

r) current blocking layer having an energy band gap larger than the effective energy band gap of said multiple quantum well structure and a refractive index smaller than the refractive index of said ridge, said current blocking layer being disposed on said upper cladding layer adjacent to, contacting, and surrounding said ridge;

a region disposed between said ridge and each of said facets adjacent each of said facets, penetrating through said p type Al_w Ga_1-w As upper cladding layer and said multiple quantum well structure and into said n type Al_x Ga_a-x As lower cladding layer and including silicon as a dopant impurity in a concentration sufficient to disorder said multiple quantum well structure within the region without converting said p type Al_w Ga_1-w As upper cladding layer to n type conductivity in said region, said multiple quantum well structure not being disordered opposite said ridge;

a p type GaAs contact layer disposed on said current blocking layer and said ridge; and

first and second electrodes disposed on said semiconductor substrate and said second conductivity type contact layer, respectively.

4. The semiconductor laser as defined in claim 3 wherein the region extends between said facets, outside and surrounding said ridge, said multiple quantum well structure being disordered throughout the region but not opposite said ridge.