Device for the vacuum coating of mass produced products

• US 5,470,388 A
• Filed: 11/23/1994
• Issued: 11/28/1995
• Est. Priority Date: 03/23/1992
• Status: Expired due to Fees

• Current Assignee: Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forsching E.V.
• Original Assignee: Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forsching E.V.
• Inventors: Heisig, Ullrich, Metzner, Christoph, Schmidt, Joerg, Schiller, Siegfried, Goedicke, Klaus, Reschke, Jonathan
• Primary Examiner(s): BUEKER, RICHARD R
• Application Number:
  US08/307,663
• Time in Patent Office: 370 Days
• Field of Search: 118/716, 118/723 EB, 118/726, 204/298.23, 204/298.26, 204/298.28
• US Class Current: 118/716
• CPC Class Codes: C23C 14/22 characterised by the process of coating
• CPC Class Codes: C23C 14/223 specially adapted for coating particles

Abstract

Device for the vacuum coating of mass produced products. By means of the ice small parts, such as screws and bolts, as mass produced products are highly productively coated by vacuum deposition or sputtering, also under plasma action. In a container is located a drum rotatable at high speed about its horizontal axis and in which the parts to be coated are fixed to the inner wall by centrifugal force. The surface of the inner wall is geometrically constructed such that the parts to be coated are reliably held and moved with it. The coating devices are located in the drum. A stripping device, whose spacing with respect to the inner wall is adjustable at programmable time intervals, is located in the drum and has an abutment surface directed opposite to the rotation direction.

Claims

1. Device for the vacuum coating of mass produced products by evaporation, sputtering or plasma-activated coating, comprising:

a drum rotating constantly about its horizontal axis at such a speed that the parts located for coating purposes within said drum are held by centrifugal force on an inner wall of said drum, said drum having at least one coating device and at least one flow resistance, wherein a surface structure of the inner wall is geometrically constructed such that the parts to be coated are reliably fixed in the rotation direction of the drum and are movable with the drum;

a stripping device in said drum, the stripping device being adjustably spaced with respect to the inner wall of the drum, the stripping device being switchable off at programmable time intervals for the parts to be coated and having an abutting surface directed opposite to the rotation direction of the drum.

2. Device according to claim 1, wherein the surface structure of the inner wall of the drum is formed by axially directed notches, said notches having flanks that are steep in the rotation direction and shallow counter to the rotation direction.

3. Device according to claim 2, wherein a spacing between the notches is smaller than an average length of the parts to be coated.

4. Device according to claim 1, wherein the drum contains an emptying device stripping the parts from the inner wall or receiving the parts in another area, a guiding device, and a vacuum lock, said emptying device, said guiding device and said vacuum lock leading said parts to the outside of the drum.

5. Device according to claim 1, wherein the wall of the drum includes cooling ducts through which a coolant flows.

6. Device according to claim 1, wherein the drum has a double-wall construction with a cavity and a coolant flows through the cavity.

7. Device according to claim 1, wherein the at least one coating device is at least one sputtering source.

8. Device according to claim 1, wherein the at least one coating device is at least one electron beam evaporator.

9. Device according to claim 8, further comprising a pivotable screen 6'"'"' above each electron beam evaporator.

10. Device according to claim 1, further comprising, outside the drum, a fixed filling device in conjunction with a vacuum lock and a guiding device leading into the drum.

11. Device according to claim 1, further comprising at least one of resilient elements and brushes on an abutting surface of the stripping device against the wall of the drum.

12. Device according to claim 1, further comprising guide plates arranged in the drum such that during the rotation of the drum the parts are moved from the center of the drum to the edge and vice versa.

13. Device according to claim 1, wherein the drum has a coating zone, and an electron beam evaporator and a sputtering source in the coating zone, and at least one of flow resistances and walls that separate the electron beam evaporator and the sputtering source.

14. Device according to claim 13, further comprising in addition to the electron beam evaporator in the rotation direction upstream thereof at least one of a plasma and ion source shielded from the remaining inner chamber.

15. Device according to claim 1, wherein both sides of the drum have circumferentially inwardly directed edges.