Diamond-like carbon films from a hydrocarbon helium plasma

• US 5,470,661 A
• Filed: 01/07/1993
• Issued: 11/28/1995
• Est. Priority Date: 01/07/1993
• Status: Expired due to Term

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: Hovel, Harold J., Bailey, Fredric D., Callegari, Alessandro C., Purushothaman, Sampath, Seeger, David E., Buchanan, Douglas A., Doany, Fuad E., Lustig, Naftali E., Pomerene, Andrew T. S., Shaw, Jane M., Flagello, Donis G., Latulipe, Douglas C. Jr., Clearfield, Howard M., Scherpereel, Christopher M.
• Primary Examiner(s): TURNER, ARCHENE A
• Application Number:
  US08/001,374
• Time in Patent Office: 1,055 Days
• Field of Search: 428/408, 428/699, 423/446, 427/249
• US Class Current: 428/408
• CPC Class Codes: C23C 16/26 Deposition of carbon only
• CPC Class Codes: G02B 1/105 Protective coatings
• CPC Class Codes: G02B 1/111 using layers comprising organic materials
• CPC Class Codes: G02B 1/14 Protective coatings, e.g. hard coatings
• CPC Class Codes: G11B 5/255 comprising means for protection against wear in thin film structures G11B5/3106
• CPC Class Codes: Y10S 427/104 Utilizing low energy electromagnetic radiation, e.g. microwave, radio wave, IR, UV, visible, actinic laser
• CPC Class Codes: Y10S 427/106 Utilizing plasma, e.g. corona, glow discharge, cold plasma
• CPC Class Codes: Y10T 428/30 Self-sustaining carbon mass or layer with impregnant or other layer

Abstract

The present invention relates to an improved method of depositing a diamond-like carbon film onto a substrate by low temperature plasma-enhanced chemical vapor deposition (PECVD) from a hydrocarbon/helium plasma. More specifically, the diamond like carbon films of the present invention are deposited onto the substrate by employing acetylene which is heavily diluted with helium as the plasma gas. The films formed using the process of the present invention are characterized as being amorphous and having dielectric strengths comparable to those normally observed for diamond films. More importantly, however is that the films produced herein are thermally stable, optically transparent, absorbent in the ultraviolet range and hard thus making them extremely desirable for a wide variety of applications.

Claims

1. A coated substrate produced by depositing a diamond-like carbon film onto a substrate by plasma-enhanced chemical vapor deposition which comprises the steps of (a) admixing a hydrocarbon gas and helium to provide a gas mixture;

(b) providing a plasma chamber containing a substrate; and

(c) introducing said gas mixture into said plasma chamber wherein a diamond-like carbon film is disposited on said substrate, said diamond-like carbon film having an optical density in the range from about 1 to about 3 at a wavelength of from about 200 nm to about 365 nm and is thermally stable at temperatures of about 590°

C.

2. The coated substrate of claim 1 wherein the diamond-like carbon film is a deep ultraviolet inhibiting antireflective coating.

3. The coated substrate of claim 1 wherein the substrate is quartz and the diamond-like carbon film is patterned by oxygen reactive ion etching to form a patterned layer for use as an attenuated phase shift mask.

6. The coated substrate of claim 1 wherein the diamond-like carbon film has an optical density of from 1 to about 3 at a wavelength of 248 nm.

7. The coated substrate of claim 6 wherein the diamond-like carbon film having an optical density of 2.3.

4. A coated substrate produced by depositing a diamond-like carbon film onto a substrate utilizing a plasma-enhanced chemical vapor deposition process which comprises the steps of (a) admixing acetylene and helium to form a gas mixture;

(b) providing a plasma chamber containing a substrate; and

(c) introducing said acetylene/helium gas mixture into said chamber wherein a diamond-like carbon film is deposited on said substrate, said diamond-like carbon film having an optical density in the range from about 1 to about 3 at a wavelength from about 200 run to about 365 nm and is thermally stable at temperature of about 590°

C.

5. A structure comprising:

(a) a transparent substrate having a surface; and

(b) a layer of carbon on said surface wherein said layer of carbon contains hydrogen, has an optical density in the range from about 1 to about 3 at a wavelength from about 200 nm to about 365 nm and is thermally stable temperatures of about 590°

C.