Combination of white-light scanning and phase-shifting interferometry for surface profile measurements

• US 5,471,303 A
• Filed: 05/20/1994
• Issued: 11/28/1995
• Est. Priority Date: 04/29/1994
• Status: Expired due to Term

• Current Assignee: Bruker Nano, Inc. (Bruker Corporation)
• Original Assignee: WYKO, Inc.
• Inventors: Ai, Chiayu, Caber, Paul J.
• Primary Examiner(s): Turner, Samuel A.
• Assistant Examiner(s): VIERRA EISENBERG, JASON D
• Application Number:
  US08/247,065
• Time in Patent Office: 557 Days
• Field of Search: 356/357, 356/359, 356/360, 356/349
• US Class Current: 356/497
• CPC Class Codes: G01B 11/2441 using interferometry
• CPC Class Codes: G01B 9/02048 Rough and fine measurement
• CPC Class Codes: G01B 9/02057 by using common path configuration, i.e. reference and object path almost entirely overlapping
• CPC Class Codes: G01B 9/02083 characterised by particular signal processing and presentation
• CPC Class Codes: G01B 9/0209 Low-coherence interferometers

Abstract

Interferometric apparatus that combines white-light VSI and single-wavelength PSI capabilities to improve the accuracy of height measurements in steep regions and in areas with large inter-pixel steps on the test surface. The technique consists of performing VSI measurements to obtain a relatively coarse profile of the test surface and to identify regions separated by a large step. Then PSI measurements are carried out over the test surface to obtain a relatively fine profile. Offsets between VSI and PSI measurements are calculated to correct for misalignments and phase shifts that may have occurred between the two sets of measurements. Finally, the fine PSI data are integrated to within one quarter wavelength of the coarse VSI data. The resulting quality of the height data in each of the step regions is thus improved to within the resolution of the PSI measurements.

Claims

1. A method of profiling a height of a test surface using apparatus adapted to alternatively execute broad-bandwidth scanning or phase-shifting interferometric measurements by illuminating the test surface and a reference arm aligned in an optical path to provide an interference pattern on an array of detector cells, comprising the following steps:

(a) using a broad-bandwidth light source to illuminate said test surface and reference arm while effecting a relative translation therebetween to produce a plurality of broad-bandwidth interference patterns on said detector cells, such that a coarse height for a region of said test surface corresponding to each detector cell is calculated by application of a scanning interferometric technique;

(b) using a narrow-bandwidth light source having a central wavelength to illuminate said test surface and reference arm while effecting a relative translation therebetween to produce a plurality of single-wavelength interference patterns on said detector cells, such that phase data comprising a phase and a fine height for said region of the test surface corresponding to each detector cell are calculated by application of a phase-shifting interferometric technique; and

(c) integrating said phase data to produce a vertically-integrated fine height for each said region of the test surface by adding or subtracting multiples of one half of said central wavelength of said narrow-bandwidth light source to or from each said fine height calculated in step (b) for each detector cell, such that the difference between said vertically-integrated fine height and said coarse height is less than one quarter of the central wavelength.

2. The method of claim 1, wherein said step (b) is carried out by passing a light beam from said broad-bandwidth light source through a narrowband filter to produce a narrow-bandwidth light beam.

3. The method of claim 1, including the step of determining an offset between said coarse height and said fine height calculated for said region corresponding to each detector cell, said offset being determined with reference to one detector cell;

and further including the step of adding said offset to the fine height measured for each said region of the test surface prior to performing the integration of step (c).

4. The method of claim 1, including the step of horizontally integrating said phase data to produce a horizontally-integrated fine height for each said region of the test surface by adding or subtracting multiples of one half of said central wavelength of said narrow-bandwidth light source to or from each said fine height calculated in step (b) for each detector cell, such that the difference between said horizontally-integrated fine height of each cell and the horizontally-integrated fine height of each cell adjacent thereto is less than one quarter of the central wavelength;

further including the step of determining an offset between said coarse height and said horizontally-integrated fine height calculated for said region corresponding to each detector cell, said offset being determined with reference to a plurality of contiguous detector cells; and

further including the step of adding said offset to the horizontally-integrated fine height measured for each said region of the test surface prior to performing the vertical integration of step (c).

5. The method of claim 4, wherein said plurality of contiguous detector cells is selected such that the difference between the coarse height corresponding to each cell and the coarse height corresponding to all cells adjacent thereto is less than one quarter of said central wavelength.

6. The method of claim 5, wherein said offset is determined by averaging individual offsets calculated for each of said plurality of contiguous detector cells as the difference between the coarse height and the horizontally-integrated fine height corresponding to each cell.

7. A method of profiling a height of a test surface using apparatus adapted to alternatively execute white-light vertical-scanning or phase-shifting interferometric measurements by illuminating the test surface and a reference arm aligned in an optical path to provide an interference pattern on an array of detector cells, comprising the following steps:

(a) using a white-light source to illuminate said test surface and reference arm while effecting a relative translation therebetween to produce a plurality of white-light interference patterns on said detector cells, such that a coarse height for a region of said test surface corresponding to each detector cell calculated by application of a vertical-scanning interferometric technique;

(b) using a substantially-monochromatic light source having a central wavelength to illuminate said test surface and reference arm while effecting a relative translation therebetween to produce a plurality of single-wavelength interference patterns on said detector cells, such that phase data comprising a phase and a fine height for said region of the test surface corresponding to each detector cell are calculated by application of a phase-shifting interferometric technique; and

(c) integrating said phase data to produce a vertically-integrated fine height for each said region of the test surface by adding or subtracting multiples of one half of said central wavelength of said substantially-monochromatic light source to or from each said fine height calculated in step (b) for each detector cell, such that the difference between said vertically-integrated fine height and said coarse height is less than one quarter of the central wavelength.

8. The method of claim 7, wherein said step (b) is carried out by passing a light beam from said white-light source through a narrowband filter to produce a quasi-monochromatic light beam.

9. The method of claim 7, including the step of determining an offset between said coarse height and said fine height calculated for said region corresponding to each detector cell, said offst being determined with reference to one detector cell;

and further including the step of adding said offset to the fine height measured for each said region of the test surface prior to performing the integration of step (c).

10. The method of claim 7, including the step of horizontally integrating said phase data to produce a horizontally-integrated fine height for each said region of the test surface by adding or subtracting multiples of one half of said central wavelength of said substantially-monochromatic light source to or from each said fine height calculated in step (b) for each detector cell, such that the difference between said horizontally-integrated fine height of each cell and the horizontally-integrated fine height of each cell adjacent thereto is less than one quarter of the central wavelength;

further including the step of determining an offset between said coarse height and said horizontally-integrated fine height calculated for said region corresponding to each detector cell, said offset being determined with reference to a plurality of contiguous detector cells; and

further including the step of adding said offset to the horizontally-integrated fine height measured for each said region of the test surface prior to performing the vertical integration of step (c).

11. The method of claim 10, wherein said plurality of contiguous detector cells is selected such that the difference between the coarse height corresponding to each cell and the coarse height corresponding to all cells adjacent thereto is less than one quarter of said central wavelength.

12. The method of claim 11, wherein said offset is determined by averaging individual offsets calculated for each of said plurality of contiguous detector cells as the difference between the coarse height and the horizontally-integrated fine height corresponding to each cell.

13. Apparatus for profiling a height of a test surface by executing white-light vertical-scanning and phase-shifting interferometric measurements in a single test instrument, said apparatus comprising, in combination:

(a) test-surface arm for holding the test surface;

(b) a reference mirror mounted on a reference arm positioned at a variable distance from said test surface;

(c) an array of light-intensity detectors disposed in an optical path with said test surface and reference mirror;

(d) means for varying the distance between said test surface and said reference mirror by predetermined amounts;

(e) means for emitting a white-light beam to illuminate both said reference mirror and test surface to provide white-light interference patterns on said array of light-intensity detectors as the distance between said test surface and reference mirror is varied according to a vertical-scanning interferometric technique;

(f) means for measuring a plurality of intensities of said white-light interference patterns as a result of vertical-scanning signals produced by said light-intensity detectors and for computing corresponding coarse height measurements for the test surface by application of said vertical-scanning interferometric technique, such that a coarse height for a region of said test surface corresponding to each light-intensity detector is calculated;

(g) means for emitting a quasi-monochromatic light beam having a central wavelength to illuminate both said reference mirror and test surface to provide single-wavelength interference patterns on said array of light-intensity detectors as the distance between said test surface and reference mirror is varied according to a phase-shifting interferometric technique;

(h) means for measuring a plurality of intensities of said single-wavelength interference patterns as a result of phase-shifting signals produced by said light-intensity detectors and for computing corresponding phase data comprising phase and fine height measurements for the test surface by application of said phase-shifting interferometric technique, such that a phase and a fine height for said region of the test surface corresponding to each light-intensity detector are calculated; and

means for integrating said phase data to produce a vertically-integrated fine height for each said region of the test surface by adding or subtracting multiples of one half of said central wavelength of said quasi-monochromatic light to or from each said fine height, such that the difference between said vertically-integrated fine height and said coarse height is less than one quarter of the central wavelength.

14. The apparatus of claim 13, wherein said means for emitting a white-light beam and said means for emitting a quasi-monochromatic light beam consist of two separate light sources adapted for alternative utilization to produce white light or quasi-monochromatic light for said vertical-scanning or phase-shifting interferometric techniques, respectively.

15. The apparatus of claim 13, wherein said means for emitting a quasi-monochromatic light beam consist of a removable narrowband filter disposed in the path of a light beam produced by said means for emitting a white-light beam.