Multilayer nanolaminates containing polycrystalline zirconia
First Claim
1. A laminate product, comprising:
- a support;
a thin layer consisting essentially of polycrystalline metastable tetragonal zirconia superposed on the support; and
a thin layer of a hard ceramic other than zirconia formed directly on the zirconia layer.
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Abstract
Layers of zirconium oxide and another ceramic, such as alumina or silicon carbide, are sequentially deposited on a support to form a nanolaminate containing a thin layer of polycrystalline metastable tetragonal zirconia deposited on the support. A process for making a nanolaminate material of the invention is carried out by sputter deposition. Zirconia is deposited on the chosen support by vacuum sputter deposition under conditions effective to form a thin layer of polycrystalline, metastable tetragonal zirconia on the support. A hard ceramic such as alumina is then deposited on the support by vacuum sputter deposition under conditions effective to form a thin layer of hard ceramic superposed on the zirconia layer.
107 Citations
16 Claims
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1. A laminate product, comprising:
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a support; a thin layer consisting essentially of polycrystalline metastable tetragonal zirconia superposed on the support; and a thin layer of a hard ceramic other than zirconia formed directly on the zirconia layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A laminate product, comprising:
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a support; a layer consisting essentially of polycrystalline metastable tetragonal zirconia having a maximum thickness of 6 nm superposed on the support, wherein the metastable tetragonal zirconia is capable of undergoing a transition to a monoclinic zirconia phase upon application of stress to the zirconia layer; and a layer consisting essentially of a hard ceramic selected from the group consisting of oxides, nitrides, and carbides, and mixtures thereof, and having a thickness in the range of 3 nm to about 1 micron formed directly on the zirconia layer. - View Dependent Claims (15, 16)
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Specification