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Transferred single crystal arrayed devices including a light shield for projection displays

  • US 5,475,514 A
  • Filed: 08/11/1994
  • Issued: 12/12/1995
  • Est. Priority Date: 12/31/1990
  • Status: Expired due to Term
First Claim
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1. A method of fabricating a projection display comprising:

  • a) providing a back-light source;

    b) forming single crystal silicon material on a supporting substrate;

    c) forming an array of transistors and an array of electrodes such that each electrode is connected to at least one of the transistors, each transistor being formed in the single crystal silicon;

    d) forming an insulator material and a first optical shield material over each transistor in the array of wherein the insulator material is between the transistor and the first optical shield material;

    e) transferring the array of transistors, array of electrodes and the first optical shield material onto an optically transmissive substrate, the single crystal silicon material being attached to the optically transmissive substrate with an adhesive;

    f) positioning adjacent to the array of electrodes a light transmitting material through which light from the back-light source is selectively transmitted to form a light valve matrix such that each light valve is actuatable by a transistor; and

    g) providing an optical system for projecting light transmitted through actuated light valves onto a viewing surface.

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