Fabrication of moly masks by electroetching

• US 5,476,575 A
• Filed: 08/03/1994
• Issued: 12/19/1995
• Est. Priority Date: 08/03/1994
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Kurdziel, Matthew T., Datta, Madhav, Brophy, Denis J., Harris, Derek B., Ryan, Frank S.
• Primary Examiner(s): Valentine, Donald R.
• Application Number:
  US08/285,371
• Time in Patent Office: 503 Days
• Field of Search: 204/129.65, 204/224 M, 204/129.7, 204/129.75, 204/129.55
• US Class Current: 205/652
• CPC Class Codes: C25F 3/14 locally

Abstract

Masks for microelectronics technology are fabricated by electrochemical etching. Molybdenum sheet or foil is masked with patterned photoresist on one side, and a mating, mirror-image pattern of photoresist is applied on the other side of the foil in exact registration with the first pattern. The foil is immersed in electrolyte (an aqueous solution of sodium nitrate, sodium hydroxide, thiourea, and surfactant) along with nickel anode plates held parallel to the foil surfaces 1-3 cm away. The anode plate is made slightly smaller than the mask area of the foil. When voltage is applied across the cell, the foil is etched through to form vias. The electrolyte is pumped across the surface of the foil and uniform flow velocity over the foil surface is achieved.

Claims

1. A method of etching a molybdenum foil having a mask area, the method comprising the steps of:

placing a masking pattern onto the mask area of the molybdenum foil, the masking pattern including bare regions and coated regions;

disposing a cathode at a fixed inter-electrode distance from the mask area;

filling a space between the mask area and the cathode with a liquid electrolyte comprising a 2M-5M aqueous solution of sodium nitrate;

inducing the electrolyte to flow over the mask area;

providing a relatively positive voltage to the molybdenum foil and a relatively negative voltage to the cathode, such that the molybdenum foil is electroetched in the bare regions; and

maintaining the relatively positive molybdenum foil voltage and the relatively negative cathode voltage until the molybdenum foil is etched through to provide openings.

2. The method according to claim 1, wherein the electrolyte is made pH basic.

3. The method according to claim 2, wherein the electrolyte includes 0.05-10M sodium hydroxide.

4. The method according to claim 1, wherein the electrolyte includes a surfactant.

5. The method according to claim 1, wherein the electrolyte includes a banking agent.

6. The method according to claim 5, wherein the banking agent is thiourea at a concentration of 10-30 mM.

7. The method according to claim 1, wherein the fixed inter- electrode distance is between 1 and 3 cm.

8. The method according to claim 7, wherein the fixed inter- electrode distance is between 1.5 and 2.5 cm.

9. The method according to claim 1, wherein the cathode has a surface area such that the surface area of the cathode is between about 40% and about 60% of the mask area.

10. The method according to claim 1, wherein the step of inducing flow includes providing a substantially uniform electrolyte flow velocity over the mask area.

11. An apparatus for electroetching molybdenum foil with a liquid electrolyte, the molybdenum foil having two surfaces, the apparatus comprising:

a container for holding an electrolyte comprising a 2M-5M aqueous solution of sodium nitrate;

a cathode disposed within the container and adapted to be immersed in the electrolyte;

holding means for holding the molybdenum foil such that the molybdenum foil is disposed within the container and adapted to be immersed in the electrolyte;

flow means for inducing electrolyte flow over the molybdenum foil;

anode means for applying a relatively positive electrical voltage to the molybdenum foil; and

cathode means for applying a relatively negative electrical voltage to the cathode.

12. The apparatus according to claim 11, wherein

the flow means includes uniform velocity means for providing a substantially uniform electrolyte flow velocity over a mask area of the foil.

13. The apparatus according to claim 12, wherein the uniform velocity means includes a hydraulic resistance element.

14. The apparatus according to claim 11, wherein:

the foil includes a sheet, the sheet having a central mask area and a perimeter; and

,

the holding means includes an open frame for removably holding the perimeter;

such that the mask area of the sheet is immersed in the electrolyte.

15. The apparatus according to claim 14, wherein:

the sheet is held in a first planar configuration;

the laminar cathode is held in a second planar configuration; and

the sheet and the cathode are parallel.

16. The apparatus according to claim 14, wherein

the frame is removably insertable into the container through a top opening of the container, such that the mask area of the sheet is immersed in the electrolyte when the frame is inserted.

17. The apparatus according to claim 16, wherein

both of the two surfaces of the foil are adapted to be immersed in the electrolyte.

18. A method of etching a metal foil, the foil having two sides together defining a mask area, the method comprising the steps of:

placing a stationary photoresist mask pattern onto both sides of the mask area of the foil, the photoresist mask pattern including bare regions and coated regions;

disposing a cathode on each side of said foil, each cathode at a fixed inter-electrode distance from the photoresist mask pattern;

filling a space between the mask area and the cathode with a liquid electrolyte;

inducing the electrolyte to flow over the mask area;

providing a relatively positive voltage to the foil and a relatively negative voltage to the cathode, such that the foil is electroetched in the bare regions; and

maintaining the relatively positive foil voltage and the relatively negative cathode voltage until the foil is etched through to provide openings.

19. The method according to claim 18, wherein the fixed inter-electrode distance is between 1 and 3cm.

20. The method according to claim 19, wherein the fixed inter-electrode distance is between 1.5 and 2.5cm.

21. The method according to claim 18, wherein each cathode has a surface area and the surface area of each cathode is between about 40% and about 60% of the mask area of the foil.

22. An apparatus for electroetching a metal foil with a liquid electrolyte, the foil having two surfaces, each surface having a stationary photoresist mask, the apparatus comprising:

a container for holding the electrolyte;

two cathodes disposed within the container and adapted to be immersed in the electrolyte;

holding means for holding the foil such that the foil is disposed between the two cathodes and adapted to be immersed in the electrolyte;

flow means for inducing the electrolyte to flow over the foil;

anode means for applying a relatively positive electrical voltage to the foil; and

cathode means for applying a relatively negative electrical voltage to the cathode.

23. A method of etching a metal foil, the foil having a mask area, the method comprising the steps of:

placing a masking pattern onto the mask area of the foil, the masking pattern including bare regions and coated regions;

disposing a cathode at a fixed inter-electrode distance from the mask area;

filling a space between the mask area and the cathode with a liquid electrolyte;

inducing the electrolyte to flow over the mask area;

assuring a substantially uniform electrolyte flow using an hydraulic resistance element;

providing a relatively positive voltage to the foil and a relatively negative voltage to the cathode, such that the foil is electroetched in the bare regions; and

maintaining the relatively positive foil voltage and the relatively negative cathode voltage until the foil is etched through to provide openings.

24. An apparatus for electroetching metal foil with a liquid electrolyte, the foil having two surfaces, the apparatus comprising:

a container for holding an electrolyte;

a cathode disposed within the container and adapted to be immersed in the electrolyte;

holding means for holding the foil such that the foil is disposed within the container and adapted to be immersed in the electrolyte;

flow means which includes all hydraulic resistance element providing a substantially uniform electrolyte flow over the mask area of the foil;

anode means for applying a relatively positive electrical voltage to the foil; and

cathode means for applying a relatively negative electrical voltage to the cathode.