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Ultra-thin film laminate

  • US 5,478,634 A
  • Filed: 05/23/1995
  • Issued: 12/26/1995
  • Est. Priority Date: 10/12/1992
  • Status: Expired due to Term
First Claim
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1. A wear-resistant member comprising a hard or surface-hardened substrate made of a WC-based cemented carbide, a cement or a hard-speed steel and an ultra-thin film laminate having a thickness of 0.5 to 10 μ

  • m coated on the surface of said substrate, said ultra-thin film laminate comprising at least one nitride or carbonitride of at least one element selected from the group consisting of the elements in the Groups IVa, Va and VIa in the Periodic Table and Al and B, said nitride or carbonitride having a cubic crystal structure and having mainly metallic bonding properties, and at least one compound having a crystal structure other than the cubic crystal structure at normal temperature and normal pressure and under an equilibrium state and having mainly covalent bonding properties, said at least one nitride or carbonitride and said at least one compound being alternately laminated in the form of layers, each layer of said nitride or carbonitride and said compound having a thickness of 0.2-20 nm, said laminate having a cubic crystalline X-ray diffraction pattern as a whole.

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