Chemical sensor for detecting binding reactions
First Claim
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1. A chemical sensor comprising:
- a piezoelectric support having a surface;
at least two electrodes spaced apart on said surface of said piezoelectric support;
a layer of dielectric material of thickness 0.5 to 20 microns applied to said surface of said piezoelectric support so as to cover at least said electrodes and a region of said surface intermediate said electrodes; and
a layer of specific active reagent immobilized on said layer of dielectric material and at least intermediate said electrodes,wherein, in use of said sensor, a shear horizontal wave can be supported at said surface of said piezoelectric support.
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Abstract
A chemical sensor includes a piezoelectric support (1) capable of supporting a shear horizontal wave provided on its surface with an electrode (2,3). The sensor is characterized in that the surface of the piezoelectric support (1) including the region bearing the electrode (2,3) is covered by a layer of dielectric material (9) of thickness 0.5 to 20 microns. The piezoelectric support (1) is preferably a single crystal. The dielectric layer (1) may be of, for example, silicon dioxide or a suitable polymer, and preferably has a thickness of between 0.5 and 5 μm.
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Citations
13 Claims
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1. A chemical sensor comprising:
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a piezoelectric support having a surface; at least two electrodes spaced apart on said surface of said piezoelectric support; a layer of dielectric material of thickness 0.5 to 20 microns applied to said surface of said piezoelectric support so as to cover at least said electrodes and a region of said surface intermediate said electrodes; and a layer of specific active reagent immobilized on said layer of dielectric material and at least intermediate said electrodes, wherein, in use of said sensor, a shear horizontal wave can be supported at said surface of said piezoelectric support. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification