Method for contactless real-time in-situ monitoring of a chemical etching process

• US 5,480,511 A
• Filed: 06/30/1994
• Issued: 01/02/1996
• Est. Priority Date: 06/30/1994
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Barbee, Steven G., Li, Leping, Ratzlaff, Eugene H., Heinz, Tony F.
• Primary Examiner(s): TUNG, TA HSUNG
• Application Number:
  US08/269,860
• Time in Patent Office: 551 Days
• Field of Search: 156/626.1, 156/627.1, 324/445, 324/453
• US Class Current: 438/10
• CPC Class Codes: B24B 37/013 Devices or means for detecting lapping completion
• CPC Class Codes: G01B 7/06 for measuring thickness measuring during the manufacture of coatings C23C14/54
• CPC Class Codes: G01N 17/00 Investigating resistance of materials to the weather, to corrosion, or to light
• CPC Class Codes: G01N 27/023 where the material is placed in the field of a coil
• CPC Class Codes: H01L 22/26 Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement endpoint detection arrangements in CMP apparatus B24B37/013, in discharge apparatus H01J37/32
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A contactless method and apparatus for in-situ chemical etch monitoring of an etching process during etching of a workpiece with a wet chemical etchant are disclosed. The method comprises steps of providing at least two toroidal windings in the wet chemical etchant to be proximate to but not in contact with the workpiece; and monitoring an electrical characteristic between said at least two toroidal windings, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process. Such a method and apparatus are particularly useful in a wet chemical etch station.

Claims

1. A contactless method for in-situ chemical etch monitoring of an etching process during etching of a workpiece with a wet chemical etchant, said method comprising the steps of:

a) providing at least two toroidal windings disposed in the wet chemical etchant to be proximate to but not in contact with the workpiece, each of said at least two toroidal windings having a principal axis through a respective hollow center portion thereof, wherein one of said at least two toroidal windings comprises a generator winding and wherein another one of said at least two toroidal windings comprises a detector winding; and

b) monitoring an electrical characteristic of the workpiece and the wet chemical etchant between said at least two toroidal windings, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process.

2. The method of claim 1, wherein monitoring of an electrical characteristic comprises monitoring changes in an electrical impedance and further wherein the prescribed change comprises a prescribed change in impedance.

3. The method of claim 1, wherein providing said at least two toroidal windings comprises providing two toroidal windings.

4. The method of claim 3, further wherein the two toroidal windings are disposed one each on opposite sides of the workpiece, and further wherein the two toroidal windings are in axial alignment with each other.

5. The method of claim 3, further wherein the two toroidal windings are disposed on a same side of the workpiece, and further wherein the two toroidal windings are in axial alignment with each other.

6. The method of claim 3, further wherein the two toroidal windings are disposed on a same side of the workpiece, and further wherein said two toroidal windings are disposed such that respective axes of the two toroidal windings are parallel with each other.

7. The method of claim 6, further comprising the step of:

c) providing a means for directing a current-carrying volume between the two toroidal windings.

8. The method of claim 7, wherein providing said directing means comprises providing a conduit between center hollow portions of the two toroidal windings.

9. The method of claim 8, wherein providing said directing means further comprises providing a chemically inert dielectric material coating on the two toroidal windings and said conduit.

10. A contactless method for in-situ control of an etching process during etching of a workpiece with a wet chemical etchant in an etch station, said method comprising the steps of:

a) providing at least two toroidal windings disposed in the wet chemical etchant to be proximate to but not in contact with the workpiece, each of said at least two toroidal windings having a principal axis through a respective hollow center portion thereof, wherein one of said at least two toroidal windings comprises a generator winding and wherein another one of said at least two toroidal windings comprises a detector winding;

b) monitoring an electrical characteristic of the workpiece and the wet chemical etchant between said at least two toroidal windings, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process; and

c) controlling the etching process in response to the monitoring of the prescribed change in electrical characteristic.

11. The method of claim 10, wherein monitoring of an electrical characteristic comprises monitoring changes in an electrical impedance and further wherein the prescribed change comprises a prescribed change in impedance.

12. The method of claim 10, wherein providing said at least two toroidal windings comprises providing two toroidal windings.

13. The method of claim 12, further wherein the two toroidal windings are disposed one each on opposite sides of the workpiece, and further wherein the two toroidal windings are in axial alignment with each other.

14. The method of claim 12, further wherein the two toroidal windings are disposed on a same side of the workpiece, and further wherein the two toroidal windings are in axial alignment with each other.

15. The method of claim 12, further wherein the two toroidal windings are disposed on a same side of the workpiece, and further wherein said two toroidal windings are disposed such that respective axes of the two toroidal windings are parallel with each other.

16. The method of claim 15, further comprising the step of:

c) providing a means for directing a current-carrying volume between the two toroidal windings.

17. The method of claim 16, wherein providing said directing means comprises providing a conduit between center hollow portions of the two toroidal windings.

18. The method of claim 17, wherein providing said directing means further comprises providing a chemically inert dielectric material coating on the two toroidal windings and said conduit.