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Ultraviolet microscope

  • US 5,481,401 A
  • Filed: 08/15/1994
  • Issued: 01/02/1996
  • Est. Priority Date: 05/16/1991
  • Status: Expired due to Term
First Claim
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1. An ultraviolet microscope comprising:

  • a stage for holding a specimen to be examined;

    light source means for emitting light having a wavelength range from a visible range to a near-ultraviolet range;

    an optical lens system including an illumination lens system for illuminating the specimen held on said stage with light emitted from said light source means and an image forming lens system having an objective lens system for focusing an enlarged optical image of the specimen by light from the specimen, at least said illumination lens system and said objective lens system being made of an optical material which can transmit light having at least a wavelength range from the visible range to the near ultraviolet range and which can correct a chromatic aberration of an image position and a chromatic aberration of a magnification with respect to the light having the wavelength range;

    first observing means for observing at least an ultraviolet image of the specimen;

    second observing means for observing at least a visible image of the specimen; and

    wherein the image forming lens system has a plurality of said objective lens systems and a plurality of enlargement lens systems, and further comprising controller means for determining and selecting a combination of said objective lens systems and said enlargement lens systems having a highest numerical aperture from among a plurality of combinations having the same total magnification.

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