Dual-modulation interferometric ellipsometer

• US 5,485,271 A
• Filed: 04/06/1995
• Issued: 01/16/1996
• Est. Priority Date: 01/07/1992
• Status: Expired due to Fees

• Current Assignee: Centre National De La Recherche Scientifique
• Original Assignee: Centre National De La Recherche Scientifique
• Inventors: Biosca, Adolfo C., Drevillon, Bernard
• Primary Examiner(s): Turner, Samuel A.
• Application Number:
  US08/418,162
• Time in Patent Office: 285 Days
• Field of Search: 250/341, 356/351, 356/345, 356/369, 356/346
• US Class Current: 356/491
• CPC Class Codes: G01N 21/211 Ellipsometry optical thickness measurement G01B11/06

Abstract

The invention relates to an infrared ellipsometer intended to take measurements of a sample (1). An exciter group (3) of the ellipsometer includes a source (101), a Michelson interferometer (103), a polarizer (105), and an optical device (107) to align the source (101) and the sample (1). An analysis group (7) has a polarizer-analyzer (701), a detector (703), and an optical device (705) for aligning the sample (1) and the detector (703). This infrared ellipsometer also incorporates a phase modulator (8). An electronic devices (9) controls the modulator (8) and the Michelson interferometer (103), and receives the signal produced by the detector (703).

Claims

1. An infrared ellipsometer for measuring a sample, comprising:

a) an exciter group including a source, a Michelson interferometer providing a first reference signal, a polarizer, and optical means for aligning said source and the sample, said exciter group generating infrared source energy directed at the sample;

b) a sample support for supporting the sample;

c) an analysis group including a polarizer-analyzer, a detector, and optical means for aligning the sample and said detector, said analysis group being aligned for receiving infrared source energy reflected from said sample;

d) an electro-optical phase modulator, located along a beam path of the infrared source energy, for providing a second reference signal, and modulating at a frequency ω

; and

e) electronic means for controlling said exciter group including the Michelson interferometer, for controlling said electro-optical phase modulator, for receiving signals from said analysis group, and for supplying a measurement result, wherein said electronic means includes;

1) a pre-amplifier for receiving a signal produced by said detector in said analysis group and for providing a pre-amplifier output signal;

2) an analog-to-digital converter receiving the pre-amplifier output signal and for providing a digital output signal;

3) a Fourier analyzer for receiving (A) the digital output signal from said analog-to-digital converter, (B) the first reference signal originating from said Michelson interferometer and (C) the second reference signal originating from said electro-optical phase modulator, for simultaneously extracting the dc component of the digital signal and components of the digital signal at frequencies ω and

2ω

, and for producing values which are representative data of the input signal in response to the first reference signal and the second reference signal;

4) a register for receiving the values produced by said Fourier analyzer; and

5) a microcomputer for storing the values produced by said Fourier analyzer, and for generating values of ellipsometer angles of the measurement result by inverse optical Fourier transform.

2. Infrared ellipsometer as claimed in claim 1, wherein:

said Michelson interferometer includes a laser reference;

the laser reference provides a start and end scanning signal (TXEN), a scanning direction signal (DIR) and the first reference signal comprising a number N of equidistant pulses per scan; and

said Fourier analyzer uses values of the digital output signal provided by said analog-to-digital converter corresponding to four successive integrating periods of said phase modulator following each pulse of the first reference signal.

3. Infrared ellipsometer as claimed in claim 2, wherein for each working period of said phase modulator, said analog-to-digital converter provides said Fourier analyzer with eight values of the signal.

4. Infrared ellipsometer as claimed in claim 2, wherein on each pulse of the first reference signal, said Fourier analyzer provides said register with coefficients S₀, S₁ and S₂ of the signal.

5. Infrared ellipsometer as claimed in claim 1, wherein said register is a "First in First out" FIFO register.

6. A method of infrared ellipsometric measuring of representative parameters of a sample using an ellipsometer, in which the sample is illuminated by a luminous flux of an incident light beam produced by an infrared source, and in which the luminous flux is reflected by the sample, analyzed by an analyzer and then measured by a photodetector, said method comprising:

a) passing the luminous flux of the incident light beam through a Michelson interferometer having a moving mirror whose displacement is x;

b) generating a first reference signal from the Michelson interferometer;

c) modulating the luminous flux with a phase modulator at a time t;

d) generating a second reference signal from the phase modulator;

e) inputting into a Fourier analyzer an input signal representative of the luminous flux measured by the photodetector, the first reference signal from the Michelson interferometer, and the second reference signal from the phase modulator;

f) simultaneously extracting from the input signal to the Fourier analyzer, dc component S₀, and components S₁ and S₂ at respective frequencies ω and

2ω

, based on an intensity I of the incident luminous flux defined as;

space="preserve" listing-type="equation">I(x)=∫

I(θ

,t)[(1+cos 2π

x)/2]dθ

wherein;

θ

is the frequency of the luminous flux at a given moment;

t is time; and

I(θ

, t) is modulated by the phase modulator at frequency ω

; and

g) generating output signals representative of the values ψ and

Δ

based on trigonometric relationships with I₀, I_S, I_C which are calculated in a microcomputer from the extracted dc components using inverse spatial Fourier transform to determine S₀, S₁, S₂, wherein;

space="preserve" listing-type="equation">S.sub.0 =I.sub.o +I.sub.c J.sub.0 (kθ

),

space="preserve" listing-type="equation">S.sub.1 =2T.sub.1 J.sub.1 (kθ

) I.sub.s

space="preserve" listing-type="equation">S.sub.2 =2T.sub.2 J.sub.2 (kθ

) I.sub.c

wherein;

J₀, J₁ and J₂ are Bessel functions of order 0, 1, 2, respectively;

k is a constant;

T₁ and T₂ are specific constants of the ellipsometer; and

T₁, T₂ and k are measured by calibration.

7. The method of claim 6, wherein the wavelength of a luminous flux emitted by said source is between 1 and 19 micrometers.

8. The method of claim 6, further comprising:

calibrating the ellipsometer by positioning each of the polarizer, phase modulator and analyzer at orientation angles P, M and A, respectively, relative to an incidence of the incident light beam such that P-M=±

45°

, A=0° and

M=±

45°

by adjustment using the least squares method of a spectral dependency (θ

) of S₂ /S₀.

9. The method of claim 6, wherein the frequency of said modulator is between 30 and 60 kHz.

10. The method of claim 6, wherein the scanning time of said Michelson interferometer is any value from 0.5 to 4 seconds.