Piezoresistive silicon pressure sensor implementing long diaphragms with large aspect ratios

• US 5,485,753 A
• Filed: 10/28/1993
• Issued: 01/23/1996
• Est. Priority Date: 12/13/1991
• Status: Expired due to Term

• Current Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Original Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Inventors: Burns, David W., Glenn, Max C.
• Primary Examiner(s): Chilcot, Jr., Richard E.
• Assistant Examiner(s): FELBER, JOSEPH LEON
• Application Number:
  US08/144,096
• Time in Patent Office: 817 Days
• Field of Search: 73/727, 73/726, 73/182, 73/720, 73/721, 338/4, 338/42, 29/621.1
• US Class Current: 73/720
• CPC Class Codes: G01L 9/0042 Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively
• CPC Class Codes: G01L 9/0055 bonded on a diaphragm
• CPC Class Codes: Y10T 29/49103 Strain gauge making

Abstract

A form of pressure sensor diaphragm and method of making that allows for the formation of long rectangular plate structures in semiconducting material, especially Silicon. A plurality or multiplicity of sensors may be constructed on a single chip, thus providing for absolute and relative sensing of pressure on a single device.

Claims

1. A two function pressure sensor disposed on a single sensor chip and having an absolute pressure sensor means for accurately measuring high absolute pressure based on the sensing of the flexing of a plate and also having a differential pressure sensor means sensitive to slight differences in pressure also based on the sensing of the flexing of a plate, each said sensor means having sensing pickoff means associated physically therewith for sensing the flexing of said sensor means plates and wherein the absolute pressure sensor means is a long rectangular plate diaphragm transducer having an aspect ratio of 3 to 1 or greater.

2. A two function pressure sensor as set forth in claim 1 wherein said differential pressure means has substantially greater width than said absolute pressure sensor means.

3. A two function pressure sensor according to claim 1, further comprising:

computational means for applying a compensation formula to a signal generated in response to the sensing pickoff means associated with the differential pressure sensor means, said compensation formula employing an output signal generated by said absolute pressure sensor means; and

means for providing a readout of a corrected signal indicating highly accurate differential pressure.

4. A two function pressure sensor system as set forth in claim 3 wherein each sensing pick-off means comprises a leadout configuration of at least two electrically resistive strips and wherein the resistive strips are balanced for parasitic resistance.

5. The pressure sensor configuration apparatus of claim 4 wherein the resistive strips comprise electrically conductive serpentine traces.

6. The pressure sensor configuration apparatus of claim 5 wherein the resistive strips associated with the differential pressure sensor means and the absolute pressure sensor means are oriented parallel to each other on each respective pressure sensor means.

7. The pressure sensor configuration apparatus of claim 6 wherein resistive strips associated with the absolute pressure sensor means comprise a first resistive strip proximate the periphery of a long edge of a long rectangular plate diaphragm and a second resistive strip disposed centered longitudinally on the long rectangular plate diaphragm.

8. The pressure sensor configuration apparatus of claim 7 further comprising a second long rectangular plate diaphragm of similar dimension as the first plate diaphragm and wherein the second long rectangular plate diaphragm has two resistive strips electrically coupled to the first and second resistive strips of the first long rectangular plate diaphragm to provide a fully active Wheatstone bridge configuration.

9. A two function pressure sensor as set forth in claim 7 wherein the absolute pressure sensor means has a leadout configuration of at least two resistive strips balanced for parasitic resistance.

10. The pressure sensor of claim 9 wherein the at least two resistive strips comprise electrically conductive serpentine traces.

11. A multiple pressure sensor apparatus having a multiplicity of long rectangular diaphragm plates at least two of which are arranged so as to have their long edges in parallel and being of substantially the same dimensions as each other and each long rectangular plate having two linear sensing resistors each and being configured to provide a fully active wheatstone bridge configuration.

12. The pressure sensing apparatus of claim 11 wherein the linear sensing resistors comprise serpentine electrical traces.

13. The pressure sensing apparatus of claim 12 wherein a first trace is disposed centered longitudinally on each of the long rectangular diaphragm plates and is electrically coupled to a second trace disposed proximate the periphery of the long edge of each long rectangular diaphragm plate.

14. A pressure responsive apparatus, comprising:

a substrate bearing a cavity in an exterior surface;

a long rectangular diaphragm plate, having an aspect ratio of greater than ten to one, disposed across the cavity and fixed at both ends of the plate to the substrate;

at least two thin traces of electrically conductive resistive material disposed on the plate, so that a first trace is centered on the long axis of the diaphragm plate and a second trace is located proximate a peripheral long edge of the plate;

at least two other thin traces of electrically conductive resistive material disposed on the plate, so that a first of the other thin traces is centered on the long axis of the diaphragm plate and a second of the other thin traces is located proximate a peripheral long edge of the plate;

bonding pads electrically coupled to the traces; and

wherein the at least two thin traces and the at least two other thin traces are all oriented on the long rectangular diaphragm plate so that the longitudinal axis of each trace is parallel to the longitudinal axis of each other trace disposed on the long rectangular diaphragm plate.

15. A multifunctional pressure sensing apparatus comprising:

a substrate bearing two closely situated cavities in an exterior surface of the substrate;

two long rectangular diaphragm plates, each having a proximal and distal end, wherein the proximal end of the first plate is fixed to the substrate proximate the first cavity and the first plate is disposed lengthwise across the first cavity so that the distal end is fixed to the substrate opposite the proximal end; and

wherein the proximal end of the second plate is fixed to the substrate proximate the second cavity and the second plate is also disposed lengthwise across the second cavity so that the distal end is fixed to the substrate opposite its proximal end so that the first and second plates are oriented parallel to each other; and

on each plate a first and a second electrically resistive trace disposed on a longitudinal axis of both the first and second plates, and wherein each first trace is disposed centered longitudinally on the first and second plates and each second trace is disposed proximate a lengthwise periphery of the first and second plates, and wherein the first and second electrically resistive traces associated with the first and second plates are electrically coupled in a fully active Wheatstone bridge configuration.