Enhanced electrostatic shutter mosaic modulator

• US 5,488,505 A
• Filed: 10/01/1992
• Issued: 01/30/1996
• Est. Priority Date: 10/01/1992
• Status: Expired due to Fees

• Current Assignee: Craig D. Engle
• Original Assignee: Craig D. Engle
• Inventors: Engle, Craig D.
• Primary Examiner(s): Lopez, F. Daniel
• Application Number:
  US07/955,058
• Time in Patent Office: 1,216 Days
• Field of Search: 359/292, 359/295, 359/279, 358/62, 358/233
• US Class Current: 359/292
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

An electrostatic shutter mosaic modulator contains a substrate, said substrate contains a first face and a second face. A plurality of first electrodes are arranged in a matrix of p rows an q columns. Each first electrode is affixed to the substrate by a suitable means. Each first electrode is overlapped by a respective deformable reflective conductor. Each conductor is affixed to the first face by a suitable means. Every conductor in each column is electrically connected by a respective column buss. Each first electrode is electrically connected to a respective third switch terminal of a respective switching element by a suitable feedthrough means. Each switching element is affixed by a suitable means to the second face. Each first electrode overlapps the respective switching element. A suitable means is provided to control the potential difference between each first electrode and the respective conductor, in accordance with an information bearing signal. The potential difference influences a deformation in the respective conductor, thereby enabling a wavefront incident on the modulator to be phase modulated in accordance with the information bearing signal.

Claims

1. An enhanced electrostatic light modulator for use in modulating an electromagnetic wavefront incident thereon in electronic to optical data conversion applications comprising:

an insulating substrate,

a plurality of first electrodes arranged in a periodic two dimensional spatial distribution,

each said first electrode is affixed to said substrate by a suitable means,

overlapping each said first electrode is a respective reflective conductor,

each said conductor is affixed to said substrate by a suitable conductor affixing means,

a plurality of thin film transistors, each said transistor further includes a drain electrode, a gate electrode and a source electrode,

each said first electrode is electrically connected by a suitable electrical interconnect means to a respective thin film transistor,

each said transistor is affixed by a suitable transistor affixing means to said substrate,

a suitable potential control means to apply between each said first electrode and the respective conductor a respective potential difference,

whereby varying each said respective potential difference varies the separation between said respective conductor and the first electrode thereby modulating said wavefront incident thereon, efficiently, reliability so as to enhance commercial viability of said modulator.

2. The device of claim 1 wherein said insulating substrate further includes a first major surface and a second major surface,

said first major surface and said second major surface are opposing surfaces,

each said conductor is affixed to said first major surface by said suitable conductor affixing means.

3. The device of claim 2 wherein said periodic two dimensional spatial distribution further includes p rows and q columns of said first electrodes,

said suitable potential control means further includes the gate electrodes of said transistors which are electrically connected to said first electrodes in each row p are electrically connected by a respective row select buss,

each said respective row select buss is affixed to said substrate by a suitable buss means.

4. The device of claim 3 wherein each said transistor is affixed to said second major surface by said suitable transistor affixing means,

each said respective row select buss is affixed to said second major surface by said suitable buss means.

5. The device of claim 4 wherein said suitable potential control means further includes the conductors which are overlapping said first electrodes in each column q are electrically connected,

said conductor affixing means further includes means for electrically connecting the conductors in each column q so as to be electrically isolated from the conductors in every other column q.

6. The device of claim 5 wherein said suitable potential control means further includes a plurality of common busses electrically connecting the source electrodes of said transistors to a common potential source,

each said common buss is affixed to said second major surface by a suitable means,

each said common bus is essentially parallel to every said respective row select buss thereby avoiding electrical crossover networks,

each said first electrode overlaps said respective thin film transistor thereby enhancing luminous efficiency and reliability.

7. The device of claim 6 wherein each said conductor is deformable.

8. An enhanced electrostatic light modulator for use in modulating an electromagnetic wavefront incident thereon in electronic to optical data conversion applications comprising:

an insulating substrate,

a plurality of first electrodes arranged into a matrix of p rows and q columns, each said first electrode is affixed to said substrate by a suitable means,

overlapping each said first electrode is a respective reflective conductor, each said conductor is affixed to said substrate by a suitable conductor affixing means,

a plurality of thin film transistors, each said transistor further includes a drain electrode, a gate electrode and a source electrode,

each said first electrode is electrically connected by a suitable electrical interconnect means to a respective thin film transistor,

each said transistor is affixed by a suitable transistor affixing means to said substrate,

a suitable potential control means to control an applied potential difference between each said first electrode and the respective conductor in accordance with an information bearing so as to enhance commercial viability of the modulator.

9. The device of claim 8 wherein said substrate further includes a first major surface and a second major surface,

said first major surface and said second major surface are opposing surfaces,

each said conductor is affixed to said first major surface by said suitable conductor affixing means.

10. The device of claim 9 wherein said suitable potential control means further includes electrically connecting the gate electrodes of said transistors which are electrically connected to said first electrodes in each row p by a respective row select buss,

each said respective row select buss is affixed to said substrate by a suitable buss means.

11. The device of claim 10 wherein each said transistor is affixed to said second major surface by said suitable transistor affixing means,

each said respective row select buss is affixed to said second major surface by said suitable buss means.

12. The device of claim 11 wherein said suitable potential control means further includes the conductors which are overlapping said first electrodes in each column q are electrically connected,

said conductors affixing means further includes means for electrically connecting the conductors in each column q so as to electrically isolated from the conductors in every other column q.

13. The device of claim 12 wherein said suitable potential control means further includes a plurality of common busses electrically connecting the source electrodes of said transistors to a common potential source,

each said common buss is affixed to said second major surface by a suitable means,

each said common buss is essentially parallel to every said respective row select buss thereby avoiding electrical crossover networks,

each said first electrode overlaps said respective thin film transistor thereby enhancing luminous efficiency and reliability.

14. The device of claim 13 wherein each said conductor is deformable.

16. The device of claim 12 wherein each said conductor is deformable, each said first electrode overlaps said respective transistor.

15. An enhanced electrostatic spatial light modulator for use in modulating an electromagnetic wavefront incident thereon in electronic to optical data conversion applications comprising:

an insulating substrate, said substrate further includes a first major surface and a second major surface,

said first major surface and said second major surface are opposing surfaces,

a plurality of first electrodes arranged into a matrix of p rows and q columns, each said first electrode is affixed to said substrate by a suitable means,

overlapping each said first electrode is a respective reflective conductor,

each said conductor is affixed to said first major surface by a suitable conductor affixing means,

the conductors which are overlapping said first electrodes in each column q are electrically connected,

said suitable conductor affixing means further includes means for electrically connecting the conductors in each column q so as to be electrically isolated from the conductors in every other column q,

a plurality of thin film transistors, each said thin film transistor further includes a drain electrode, a gate electrode and a source electrode,

each said first electrode is electrically connected by a suitable feedthrough means to a respective thin film transistor,

each said transistor is affixed by a suitable means to said second major surface,

the gate electrodes of said transistors which are electrically connected to said first electrodes in each row p are electrically connected by a respective row select buss,

each said respective row select buss is affixed by a suitable means to said second major surface,

a plurality of common busses electrically connecting the source electrodes of said transistors to a common potential source,

each said common buss is affixed to said second major surface by a suitable means,

each said common buss is essentially parallel to every said respective row select buss thereby eliminating electrical crossover networks,

a suitable potential control means to control an applied potential difference between each said first electrode and the respective conductor in accordance with an information bearing signal so as to enhance the commercial viability of the modulator.

17. An enhanced electrostatic shutter mosaic modulator for use in modulating an electromagnetic wavefront incident thereon in electronic to optical data conversion applications comprising:

an insulating substrate,

a plurality of first electrodes arranged into a matrix of p rows and q columns,

each said first electrode is affixed to said substrate by a suitable means,

overlapping each said first electrode is a respective reflective conductor,

each said conductor is affixed to said substrate by a suitable conductor affixing means,

the conductors which are overlapping said first electrodes in each column q are electrically connected,

said suitable conductor affixing means further includes means for electrically connecting the conductors in each column q so as to be electrically isolated from the conductors in every other column q,

a plurality of thin film transistors, each said transistor further includes a drain electrode, a gate electrode and a source electrode,

each said first electrode is electrically connected by a suitable electrical interconnect means to a respective thin film transistor,

each said transistor is affixed by a suitable transistor affixing means to said substrate,

the gate electrodes of said transistors which are electrically connected to said first electrodes in each row p are electrically connected by a respective row select buss,

each said respective row select buss is affixed to said substrate by a suitable buss means,

a plurality of common busses electrically connecting the source electrodes of said transistors to a common potential source,

each said common buss is affixed to said substrate by a suitable means,

each said common buss is essentially parallel to every said respective row select buss,

a suitable potential control means to control an applied potential difference between each said first electrode and the respective conductor in accordance with an information bearing signal so as to enhance reliability, and commercial viability of said modulator.