Environmental sensor and method therefor

• US 5,489,988 A
• Filed: 01/03/1995
• Issued: 02/06/1996
• Est. Priority Date: 01/03/1995
• Status: Expired due to Term

• Current Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Krihak, Michael, Shieh, Chan-Long, Ackley, Donald E.
• Primary Examiner(s): Gonzalez, Frank
• Assistant Examiner(s): HANTIS, KAREN
• Application Number:
  US08/368,502
• Time in Patent Office: 399 Days
• Field of Search: 356/244, 356/410, 356/411, 356/440, 356/441, 356/436, 356/300, 356/409, 356/39, 356/412, 356/73, 356/432, 356/433, 356/434, 356/435, 422/57-58, 422/82.06, 422/82.07, 422/82.11, 385/12, 385/13, 250/573-576, 250/227.11, 250/227.14
• US Class Current: 356/436
• CPC Class Codes: G01N 21/783 for analysing gases
• CPC Class Codes: G02B 6/13 Integrated optical circuits characterised by the manufacturing method
• CPC Class Codes: G02B 6/262 Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
• CPC Class Codes: G02B 6/30 for use between fibre and thin-film device
• CPC Class Codes: G02B 6/4214 the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device G02B6/4246 takes precedence

Abstract

A sensor (10,30,40,50,70) for detecting chemicals and changes in the surrounding environment utilizes a sol-gel sensor element (14,16,17,54,56,57) containing a chemical indicator. Grooves (12,13,24,52,53) are formed in a substrate (11,51). The grooves are filled with a sol-gel material having a chemical indicator, and the sol-gel is cured to adhere to the substrate (11,51). The grooves (12,13,24,52,53) are formed to facilitate optically coupling a fiber optic cable (46) to the sol-gel sensor element. Light is coupled from the fiber optic cable (46) to the sol-gel sensor element (14,16,17,54,56,57).

Claims

1. An environmental sensor comprising:

a substrate having a surface;

a plurality of parallel grooves on the surface; and

a sol-gel sensor element in each groove of the plurality of parallel grooves.

2. The sensor of claim 1 further including at least one sol-gel sensor element having a chemical indicator.

3. The sensor of claim 2 wherein the chemical indicator is one of fluorescein, bromocresol green, bromocresol purple, Ru(pby)²⁺, or Ru(Ph₂ phen)₃²⁺.

4. The sensor of claim 2 wherein each sol-gel sensor element has a different chemical indicator.

5. The sensor of claim 1 further including an optical device optically coupled to a first end of each sol-gel sensor element of the sol-gel sensor element in each groove of the plurality of parallel grooves.

6. The sensor of claim 5 further including an optical device optically coupled to a second end of each sol-gel sensor element of the sol-gel sensor element in each groove of the plurality of parallel grooves.

7. The sensor of claim 5 further including a plurality of bonding pads on the surface for interconnecting to the optical device coupled to the first end of each sol-gel sensor element.

8. The sensor of claim 1 further including a fiber ribbon cable having a plurality of optical fibers aligned to the plurality of parallel grooves so that an end of each sol-gel sensor element is optically coupled to the plurality of optical fibers.

9. The sensor of claim 1 further including a plurality of alignment grooves and a locating pin within each alignment groove, the locating pin having a length that is greater than a length of the substrate.

10. The sensor of claim 9 further including a connector body housing a fiber ribbon cable having a plurality of optical fibers, the connector body having an alignment opening aligned to the locating pin so that an end of each sol-gel sensor element is optically coupled to the plurality of optical fibers.

11. The sensor of claim 1 wherein the substrate is a molded plastic material and the plurality of parallel grooves are molded into the molded plastic material.

12. The sensor of claim 11 further including a prism molded into the substrate near a first end of each sensor element, the prism optically coupled to the first end of each sensor element for receiving light from a first sol-gel sensor element of the sol-gel sensor element in each groove and reflecting light into a second sol-gel sensor element of the sol-gel sensor element in each groove.

13. The sensor of claim 1 wherein each sol-gel sensor element has a chemical indicator.

14. An environmental sensor comprising:

a silicon substrate having a surface;

a plurality of parallel V-shaped grooves on the surface; and

a sol-gel sensor element in each groove of the plurality of parallel V-shaped grooves, at least one sol-gel sensor element having a chemical indicator.

15. The sensor of claim 14 further including an alignment V-groove and a locating pin within the alignment V-groove, the locating pin having a length that is greater than a length of the silicon substrate.

16. The sensor of claim 14 wherein the chemical indicator is one of fluorescein, bromocresol green, bromocresol purple, Ru(pby)²⁺, or Ru(Ph₂ phen)₃²⁺.

17. The sensor of claim 16 wherein each sol-gel sensor element has a different chemical indicator.

18. The sensor of claim 14 wherein the plurality of parallel V-shaped grooves have a width of approximately 10 to 50 microns at a top of each groove.

19. The sensor of claim 14 further including an optical device optically coupled to a first end of each sol-gel sensor element.

20. The sensor of claim 19 wherein the optical device is an optical emitter, and further including an optical detector optically coupled to a second end of each sol-gel sensor element.

21. The sensor of claim 20 wherein the optical emitter and the optical detector are formed in the silicon substrate.

22. The sensor of claim 20 wherein the optical emitter and the optical detector are attached to the surface of the silicon substrate.

23. The sensor of claim 19 wherein an end of a groove of the plurality of V-shape grooves functions as a mirror for reflecting light for optically coupling the optical device to the first end.

24. A method of forming a sensor comprising:

forming a substrate having a plurality of grooves in a surface of the substrate; and

forming a sol-gel sensor element within each groove of the plurality of grooves, at least one sol-gel sensor element having a chemical indicator.

25. The method of claim 24 further including forming alignment grooves parallel to the plurality of grooves and positioning a locating pin within each alignment groove.

26. The method of claim 24 wherein forming the sol-gel sensor element within each groove includes spinning a hydrolyzed sol-gel material containing the chemical indicator into each groove then curing the hydrolyzed sol-gel material.

27. The method of claim 24 wherein forming the sol-gel sensor element within each groove includes forming a multi-layer sol-gel sensor element by successive application and curing of a sol-gel material.

28. The method of claim 27 wherein the chemical indicator resides only in a single layer of the multi-layer sol-gel sensor element.