Environmental sensor and method therefor
First Claim
Patent Images
1. An environmental sensor comprising:
- a substrate having a surface;
a plurality of parallel grooves on the surface; and
a sol-gel sensor element in each groove of the plurality of parallel grooves.
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Accused Products
Abstract
A sensor (10,30,40,50,70) for detecting chemicals and changes in the surrounding environment utilizes a sol-gel sensor element (14,16,17,54,56,57) containing a chemical indicator. Grooves (12,13,24,52,53) are formed in a substrate (11,51). The grooves are filled with a sol-gel material having a chemical indicator, and the sol-gel is cured to adhere to the substrate (11,51). The grooves (12,13,24,52,53) are formed to facilitate optically coupling a fiber optic cable (46) to the sol-gel sensor element. Light is coupled from the fiber optic cable (46) to the sol-gel sensor element (14,16,17,54,56,57).
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Citations
28 Claims
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1. An environmental sensor comprising:
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a substrate having a surface; a plurality of parallel grooves on the surface; and a sol-gel sensor element in each groove of the plurality of parallel grooves. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An environmental sensor comprising:
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a silicon substrate having a surface; a plurality of parallel V-shaped grooves on the surface; and a sol-gel sensor element in each groove of the plurality of parallel V-shaped grooves, at least one sol-gel sensor element having a chemical indicator. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A method of forming a sensor comprising:
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forming a substrate having a plurality of grooves in a surface of the substrate; and forming a sol-gel sensor element within each groove of the plurality of grooves, at least one sol-gel sensor element having a chemical indicator. - View Dependent Claims (25, 26, 27, 28)
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Specification