Probe and electrical part/circuit inspecting apparatus as well as electrical part/circuit inspecting method
First Claim
1. An apparatus for probing semiconductor devices having terminal comprising:
- a substrate (1) having a surface;
probe electrodes (B) disposed on the surface of the substrate, wherein the electrodes are arranged on the surface of the substrate in a plurality of columns for probing the semiconductor device, each probing column extending outwardly from a central portion of the substrate surface towards a perimeter of the substrate surface; and
means (6;
S1-S10;
S) for electrically coupling probe electrodes with a test system in such a way so as to provide the devices to be probed with a selection of more than two arrangements in which device terminals contacting the probe electrodes are not shorted with each other by the coupling means, wherein the coupling means includes a plurality of line patterns (6), each line electrically interconnecting the electrode of a respective one of the probing columns, wherein the probe electrodes are arrayed in a grid pattern at contacting regions with the device to be probed by a signal path switching means (S1-S10;
S), and wherein said probe electrode and signal path switching means are both formed on the substrate.
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Accused Products
Abstract
An apparatus and method for providing durable, high performance, probing of semiconductor devices having a large number of narrow pitch terminals. A single probe of the present invention provides flexible probing of a wide range of the devices having various sizes and terminal arrangements. In contrast, teachings of the prior art require a separate probe to be manufactured or a probe to be re-formed for each different size and terminal arrangement of the devices. The probe of the invention includes electrodes electrically coupled with a test system in such a way so as to provide the devices to be probed with a selection of more than two arrangements in which device terminals contacting the probe electrodes are not shorted with each other by the probe.
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Citations
6 Claims
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1. An apparatus for probing semiconductor devices having terminal comprising:
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a substrate (1) having a surface; probe electrodes (B) disposed on the surface of the substrate, wherein the electrodes are arranged on the surface of the substrate in a plurality of columns for probing the semiconductor device, each probing column extending outwardly from a central portion of the substrate surface towards a perimeter of the substrate surface; and means (6;
S1-S10;
S) for electrically coupling probe electrodes with a test system in such a way so as to provide the devices to be probed with a selection of more than two arrangements in which device terminals contacting the probe electrodes are not shorted with each other by the coupling means, wherein the coupling means includes a plurality of line patterns (6), each line electrically interconnecting the electrode of a respective one of the probing columns, wherein the probe electrodes are arrayed in a grid pattern at contacting regions with the device to be probed by a signal path switching means (S1-S10;
S), and wherein said probe electrode and signal path switching means are both formed on the substrate. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification