Q-controlled microresonators and tunable electronic filters using such resonators

• US 5,491,604 A
• Filed: 12/11/1992
• Issued: 02/13/1996
• Est. Priority Date: 12/11/1992
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Nguyen, Clark T.-C., Howe, Roger T.
• Primary Examiner(s): Walberg, Teresa J.
• Assistant Examiner(s): Mills, Gregory L.
• Application Number:
  US07/989,396
• Time in Patent Office: 1,159 Days
• Field of Search: 361/277, 361/278, 361/280, 361/281, 361/287, 361/289, 361/292, 361/296, 333/186, 333/187, 333/191, 333/192, 333/197, 333/198, 333/199, 333/188, 333/219, 331/107 A, 331/116 M, 331/116 R, 331/116 FE, 331/154, 331/156, 331/160, 331/117 FE, 331/177 V, 310/309, 310/313 B, 310/321
• US Class Current: 361/278
• CPC Class Codes: G01R 33/0286 comprising microelectromechanical systems [MEMS] MEMS devices in general B81B
• CPC Class Codes: H01G 5/14 due to longitudinal movement of electrodes
• CPC Class Codes: H03H 2009/02496 Horizontal, i.e. parallel to the substrate plane
• CPC Class Codes: H03H 9/0023 Balance-unbalance or balance-balance networks
• CPC Class Codes: H03H 9/02377 Symmetric folded-flexure
• CPC Class Codes: H03H 9/02393 Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
• CPC Class Codes: H03H 9/02425 by electrostatically pulling the beam
• CPC Class Codes: H03H 9/467 Post-fabrication trimming of parameters, e.g. center frequency

Abstract

Resonator systems with controlled quality factors including a resonator having a plurality of ports and a first quality factor greater than the system quality factor, and an amplifier providing negative feedback among the ports to render the system quality factor independent of the resonator quality factor.

Claims

1. A resonator system with a controlled quality factor, comprising:

a resonator having first, second and third ports, and a quality factor greater than said controlled quality factor;

an amplifier having an input and an output, and a gain high enough to render said controlled quality factor substantially independent of the quality factor of said resonator; and

wherein said second port is connected to the input of said amplifier and the output of said amplifier is connected to said third port so that when an input signal is applied to the resonator system at said first port, an output signal at said second port is applied to the input of said amplifier, and an output of said amplifier is applied to said third port for providing negative feedback to said resonator.

2. The resonator system of claim 1 wherein said resonator is an electromechanical resonator micromachined on a substrate.

3. The resonator system of claim 1 wherein:

said resonator includes a plate movable relative to a substrate, a flexible member connecting said plate to said substrate and first, second and third fixed electrode structures;

said first port has a first and a second terminal, said second port has said first and a third terminal, and said third port has said first and a fourth terminal;

said first terminal is connected to said movable plate;

said second, third and fourth terminals are connected to said first, second and third fixed electrode structures, respectively;

said movable plate and said fixed electrode structures have fingers, the fingers of the plate being interdigitated with the fingers of said fixed electrode structures; and

wherein the gain of said amplifier is sufficient to render the gain of the resonator system substantially equal to the ratio between a number of fingers of said first fixed electrode structure and a number of fingers of said third fixed electrode structure.

4. The resonator system of claim 1 wherein:

said resonator includes a plate movable relative to a substrate, a flexible member connecting said plate to said substrate, and first, second, third, fourth, fifth and sixth fixed electrode structures;

said first port has a first and a second terminal, said second port has a third and a fourth terminal, and said third port has a fifth and a sixth terminal;

said first, second, third, fourth, fifth and sixth terminals being connected to said first, second, third, fourth, fifth and sixth fixed electrode structures, respectively;

said plate and said fixed electrode structures having fingers, the fingers of the plate being interdigitated with the fingers of said fixed electrode structures; and

the gain of said amplifier is sufficient to render the gain of the resonator system substantially equal to the ratio between a number of fingers of said first fixed electrode structure and a number of fingers of said sixth fixed electrode structure.

5. The resonator system of claim 4 wherein said first and second fixed electrode structures have equal numbers of fingers, said third and fourth fixed electrode structures have equal numbers of fingers, and said fifth and sixth fixed electrode structures have equal numbers of fingers.

6. The resonator system of claims 1, 3, 4 or 5 wherein said quality factor of said resonator is pressure dependent.

7. The resonator system of claim 1 wherein the output of said amplifier is used as an output of said resonator system.

8. The resonator system of claim 1 wherein a resonance frequency is stabilized by a microminiaturized micro-oven control comprising a microplatform, and wherein said resonator is positioned on said microplatform.

9. The resonator system of claim 8 wherein said microplatform is connected to a substrate by at least one supporting beam.

10. The resonator system of claim 1 further including:

a biquad stage connected to said resonator and amplifier to form a filter.

11. The filter of claim 10 further including means for correcting a passband.

15. The resonator system of claim 1, 10 or 12 wherein said negative feedback is continuous.

12. A resonator system with a controlled quality factor, comprising:

an electromechanical resonator micromachined on a substrate, said resonator having first, second and third ports, and a quality factor greater than said controlled quality factor;

an amplifier having an input and an output, and a gain high enough to render said controlled quality factor substantially independent of the quality factor of said resonator; and

wherein said second port is connected to the input of said amplifier and the output of said amplifier is connected to said third port so that when an input signal is applied to the resonator system at said first port, and output signal at said second port is applied to the input of said amplifier, and an output of said amplifier is applied to said third port for providing negative feedback to said resonator.

13. The resonator system of claim 12 wherein said amplifier includes an input stage, said input stage including a plurality of MOS transistors interconnected using a current feedback architecture.

14. The resonator system of claim 12 wherein said amplifier includes a plurality of stages, each of said stages including a plurality of MOS transistors interconnected using a current feedback architecture.

16. A method for operating a resonator system with a controlled quality factor, comprising:

providing a resonator with first, second and third ports, and a quality factor greater than said controlled quality factor;

providing an amplifier with an input and an output;

applying an input signal to the resonator system at the first port of said resonator;

applying an output signal from the second port of said resonator to the input of said amplifier; and

applying a negative feedback to the third port of said resonator from the output of said amplifier, with a gain sufficiently high to render said controlled quality factor substantially independent of the quality factor of said resonator.

17. The method of claim 16 further including adjusting said controlled quality factor.

18. The method of claim 16 or 17 further including coupling to said resonator system at least one additional biquad stage.

19. The method of claim 16 wherein said negative feedback is continuous.