Efficient semiconductor light-emitting device and method

• US 5,493,577 A
• Filed: 12/21/1994
• Issued: 02/20/1996
• Est. Priority Date: 12/21/1994
• Status: Expired due to Term

• Current Assignee: Sandia Corporation (Martin Marietta Corporation)
• Original Assignee: Sandia Corporation (Martin Marietta Corporation)
• Inventors: Schneider, Richard P. Jr., Choquette, Kent D., Lear, Kevin L.
• Primary Examiner(s): Bovernick, Rodney B.
• Assistant Examiner(s): Song, Yisun
• Application Number:
  US08/361,252
• Time in Patent Office: 426 Days
• Field of Search: 372/46, 372/96, 372/99, 372/45, 372/92
• US Class Current: 372/46.013
• CPC Class Codes: H01L 33/105 with a resonant cavity structure
• CPC Class Codes: H01L 33/145 with a current-blocking structure
• CPC Class Codes: H01S 2301/166 Single transverse or lateral mode
• CPC Class Codes: H01S 5/18313 by oxidizing at least one of the DBR layers
• CPC Class Codes: H01S 5/1833 with more than one structure
• CPC Class Codes: H01S 5/18361 Structure of the reflectors, e.g. hybrid mirrors
• CPC Class Codes: H01S 5/2205 comprising special burying or current confinement layers
• CPC Class Codes: H01S 5/3215 graded composition cladding layers

Abstract

A semiconductor light-emitting device and method. The semiconductor light-emitting device is provided with at least one control layer or control region which includes an annular oxidized portion thereof to channel an injection current into the active region, and to provide a lateral refractive index profile for index guiding the light generated within the device. A periodic composition grading of at least one of the mirror stacks in the device provides a reduced operating voltage of the device. The semiconductor light-emitting device has a high efficiency for light generation, and may be formed either as a resonant-cavity light-emitting diode (RCLED) or as a vertical-cavity surface-emitting laser (VCSEL).

Claims

1. A semiconductor light-emitting device comprising:

(a) a substrate;

(b) a plurality of semiconductor layers grown on the substrate, the semiconductor layers forming a first mirror stack having a first doping type above the substrate, an active region above the first mirror stack, at least one control layer proximate to the active region and including an oxidized portion therein, and a second mirror stack above the active region and having a second doping type and further having a composition different from the non-oxidized portion of the at least one control layer;

(c) a mesa extending downward through the semiconductor layers at least to the control layer; and

(d) an upper electrode above the second mirror stack.

2. The semiconductor light-emitting device of claim 1 in which the oxidized portion of the control layer comprises an oxide of aluminum.

3. The semiconductor light-emitting device of claim 1 in which the control layer comprises an aluminum alloy.

4. The semiconductor light-emitting device of claim 3 in which the aluminum alloy includes at least one element selected from the group consisting of As, Ga, In, and P.

5. The semiconductor light-emitting device of claim 3 in which the aluminum alloy is Al_x Ga_1-x As with 0.8≦

x≦

1.

6. The semiconductor light-emitting device of claim 3 in which the aluminum alloy has an aluminum composition higher than any aluminum composition of any of the semiconductor layers of the second mirror stack.

7. The semiconductor light-emitting device of claim 1 in which at least one of the mirror stacks includes a periodic alloy composition grading therein.

8. The semiconductor light-emitting device of claim 1 in which the active region includes cladding layers surrounding at least one quantum-well layer.

9. The semiconductor light-emitting device of claim 8 in which the quantum-well layer is comprised of a semiconductor alloy selected from the group consisting of InGaAs, GaAs, AlGaAs, AlGalnP, InGaAsP, AlGaAsP, and InAlGaAs.

10. The semiconductor light-emitting device of claim 1 in which the oxidized portion of the control layer defines a current channel into the active region.

11. The semiconductor light-emitting device of claim 1 in which the control layer defines a lateral refractive index profile for index guiding the light.

12. The semiconductor light-emitting device of claim 1 including means for defining a polarization state for the light.

13. The semiconductor light-emitting device of claim 12 in which the means for defining a polarization state for the light is an asymmetric shape of the oxidized portion of the control layer.

14. The semiconductor light-emitting device of claim 1 including means for defining a lateral mode for the light.

15. The semiconductor light-emitting device of claim 14 in which the means for defining a lateral mode for the light is an asymmetric shape of the oxidized portion of the control layer.

16. The semiconductor light-emitting device of claim 1 in which a refractive index in the oxidized portion of the control layer is substantially different from the refractive index in a central oxide-free portion of the control layer.

17. The semiconductor light-emitting device of claim 16 in which the central oxide-free portion of the control layer has an effective optical thickness that is substantially equal to a multiple of one-quarter of the wavelength of the light.

18. The semiconductor light-emitting device of claim 16 in which the oxidized portion of the control layer has an effective optical thickness that is substantially equal to a multiple of one-half of the wavelength of the light.

19. The semiconductor light-emitting device of claim 16 in which a resonant optical cavity formed by the mirror stacks has a lower Q in an off-axis portion of the cavity which includes the oxidized portion of the control layer than the Q of an on-axis portion of the cavity which does not include the oxidized portion.

20. The semiconductor light-emitting device of claim 19 in which an electric field component of the light in the off-axis portion of the cavity has a field node near at least one quantum-well in the active region.

21. The semiconductor light-emitting device of claim 20 in which the field node reduces a spontaneous emission component of the light in the off-axis portion of the cavity.

22. The semiconductor light-emitting device of claim 1 in which a first cavity resonance in an on-axis portion of a resonant optical cavity formed by the mirror stacks which does not include the oxidized portion of the control layer has a wavelength that is substantially different from the wavelength of a second cavity resonance in an off-axis portion of the cavity that includes the oxidized portion.

23. A semiconductor light-emitting device comprising:

(a) a substrate;

(b) a plurality of semiconductor layers grown on the substrate, the semiconductor layers forming a first mirror stack having a first doping type above the substrate, an active region above the first mirror stack, and a second mirror stack having a second doping type above the active region, at least one of the mirror stacks including a control portion therein adjacent to the active region, the control portion having at least one oxidized layer with an aluminum composition higher than any aluminum composition of any of the other semiconductor layers in the mirror stack and having a lateral oxidation extent greater than any lateral oxidation extent of the other semiconductor layers in the mirror stack;

(c) a mesa extending downward through the semiconductor layers at least to the control portion; and

(d) an upper electrode above the second mirror stack.

24. The semiconductor light-emitting device of claim 23 in which the oxidized layer of the control portion comprises an oxide of aluminum.

25. The semiconductor light-emitting device of claim 23 in which the oxidized layer comprises an aluminum alloy.

26. The semiconductor light-emitting device of claim 25 in which the aluminum alloy includes at least one element selected from the group consisting of As, Ga, In, and P.

27. The semiconductor light-emitting device of claim 25 in which the aluminum alloy is Al_x Ga_1-x As with 0.8≦

x≦

1.

28. The semiconductor light-emitting device of claim 25 in which the aluminum alloy has an aluminum composition higher than any aluminum composition of any of the semiconductor layers of the second mirror stack.

29. The semiconductor light-emitting device of claim 23 in which at least one of the mirror stacks includes a periodic alloy composition grading therein.

30. The semiconductor light-emitting device of claim 23 in which the active region includes cladding layers surrounding at least one quantum-well layer.

31. The semiconductor light-emitting device of claim 30 in which the quantum-well layer is comprised of a semiconductor alloy selected from the group consisting of InGaAs, GaAs, AlGaAs, AlGalnP, InGaAsP, AlGaAsP, and InAlGaAs.

32. The semiconductor light-emitting device of claim 23 in which the control portion defines a current channel into the active region.

33. The semiconductor light-emitting device of claim 23 in which the control portion defines a lateral refractive index profile for index guiding the light.

34. The semiconductor light-emitting device of claim 23 including means for defining a polarization state for the light.

35. The semiconductor light-emitting device of claim 34 in which the means for defining a polarization state for the light is an asymmetric shape of the oxidized layer of the control portion.

36. The semiconductor light-emitting device of claim 23 including means for defining a lateral mode for the light.

37. The semiconductor light-emitting device of claim 36 in which the means for defining a lateral mode for the light is an asymmetric shape of the oxidized layer of the control portion.

38. The semiconductor light-emitting device of claim 23 in which a refractive index in an on axis portion of the oxidized layer including the oxidation extent is substantially different from the refractive index in a central oxide-free portion of the oxidized layer which does not include the oxidation extent.

39. The semiconductor light-emitting device of claim 38 in which the on-axis portion of the oxidized layer has an effective optical thickness that is substantially equal to a multiple of one-quarter of the wavelength of the light.

40. The semiconductor light-emitting device of claim 38 in which the off-axis portion of the oxidized layer has an effective optical thickness that is substantially equal to a multiple of one-half of the wavelength of the light.

41. The semiconductor light-emitting device of claim 38 in which a resonant optical cavity formed by the mirror stacks has a lower Q in the off-axis portion of the cavity than the Q of the on-axis portion of the cavity.

42. The semiconductor light-emitting device of claim 41 in which an electric field component of the light in the off-axis portion of the cavity has a field node near at least one quantum-well in the active region.

43. The semiconductor light-emitting device of claim 42 in which the field node reduces a spontaneous emission component of the light in the off-axis portion of the cavity.

44. The semiconductor light-emitting device of claim 23 in which a first cavity resonance in an on-axis portion of a resonant optical cavity formed by the mirror stacks which does not include the oxidation extent of the oxidized layer has a wavelength that is substantially different from the wavelength of a second cavity resonance in an off-axis portion of the cavity that includes the oxidation extent.

45. A semiconductor light-emitting device comprising:

(a) a semiconductor substrate;

(b) a plurality of semiconductor layers grown on the substrate, the semiconductor layers forming a first mirror stack having a first doping type above the substrate, an active region above the first mirror stack, a second mirror stack having a second doping type above the active region, and at least one control layer proximate to the active region and comprising a semiconductor alloy with an aluminum composition higher than any aluminum composition of any of the semiconductor layers of the second mirror stack;

(c) a mesa extending downward through the semiconductor layers at least to the control layer; and

(d) an upper electrode above the second mirror stack.

46. A semiconductor light-emitting device comprising:

(a) a substrate;

(b) a plurality of semiconductor layers grown on the substrate, the semiconductor layers forming a first mirror stack having a first doping type above the substrate, an active region above the first mirror stack, and a second mirror stack having a second doping type above the active region, at least one of the mirror stacks including a control portion therein adjacent to the active region, the control portion comprising a semiconductor alloy with an aluminum composition higher than any aluminum composition of any of the other semiconductor layers of the mirror stack;

(c) a mesa extending downward through the semiconductor layers at least to the control portion; and

(d) an upper electrode above the second mirror stack.