Method of visualizing minute particles

• US 5,495,337 A
• Filed: 01/07/1994
• Issued: 02/27/1996
• Est. Priority Date: 11/06/1991
• Status: Expired due to Term

• Current Assignee: Machine Vision Products, Inc.
• Original Assignee: Machine Vision Products, Inc.
• Inventors: Ayoub, George T., Newberg, Nicholas A., Trozzi, Thomas O., Goshorn, Lawrence A.
• Primary Examiner(s): Pham, Hoa Q.
• Application Number:
  US08/178,918
• Time in Patent Office: 781 Days
• Field of Search: 356/376, 356/375, 356/380, 356/379, 356/394, 356/237, 250/561, 250/562, 348/126
• US Class Current: 356/601
• CPC Class Codes: G01B 11/24 for measuring contours or curvatures
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G01R 31/309 of printed or hybrid circuits or circuit substrates

Abstract

The visualization method includes generating a relatively wide beam of light directed onto an object to be inspected and determining the center of intensity of the wide beam of light reflected from the object for facilitating geometric dimensional calculations of a large number of such objects, such as solder deposits on the surface of a printed circuit board, in a very short period of time and in a very accurate manner.

Claims

1. A method of determining the geometric dimension of a minute particle disposed on the top surface of a substrate, comprising:

generating a plurality of coincident light beams arranged in a row;

directing said plurality of coincident light beams toward the substrate and the minute particle;

viewing said plurality of coincident light beams as they are reflected from the minute particle and the substrate;

determining the gray scale intensity levels of each of the beams reflecting from the minute particle and substrate;

determining a weighted average gray scale value of the plurality of reflected beams;

calculating the center of intensity of the beams reflecting from the minute particle and the substrate; and

determining a weighted average dimension of the minute particle based on the calculated center of intensity.

2. A method according to claim 1, wherein the step of directing said plurality of coincident light beams includes the steps of:

directing a set of forward laser beams toward the surface of the substrate;

directing the set of forward laser beams rearwardly downwardly at an angle θ

_ss relative to the horizontal plane of the substrate;

projecting a set of rear laser beams toward the surface of the substrate; and

directing the set of rear laser beams forwardly downwardly at an angle θ

_SR relative to the horizontal plane of the substrate.

3. A method according to claim 2, wherein θ

_SS is between about 1 degree and about 89 degrees.

4. A method according to claim 3, wherein θ

_SS is between about 15 degrees and about 75 degrees.

5. A method according to claim 4, wherein θ

_SS is about 60 degrees.

6. A method according to claim 2, wherein θ

_SS is between about 180 degrees and about 0 degrees.

7. A method of determining the geometric dimensions of a minute particle according to claim 1, wherein the step of viewing includes:

forming an image of said plurality of coincident light beams;

splitting the image of said beams into a pair of images;

reflecting said pair of images to form a group of image segments; and

developing a pixel image voltage in response to viewing in a predetermined order each segment, wherein each voltage developed is indicative of the gray scale intensity level of the corresponding beam reflecting from the minute particles and substrate.

8. A method of determining the geometric dimension of a minute particle according to claim 1, wherein the step of determining a dimension of the minute particle includes determining the height of the minute particle.

9. A method of determining the geometric dimension of a minute particle according to claim 8, further comprising:

using camera means for viewing the plurality of coincident light beams reflecting from the substrate and the minute particle;

storing the determined height of the minute particle;

moving said camera means and the substrate relative to one another to permit the substrate to be scanned by said plurality of coincident light beams;

repeating the steps of generating, directing, viewing, determining, determining, determining, storing and moving until substantially the entire top surface of the substrate has been scanned by said plurality of coincident light beams;

retrieving the stored determined height information; and

calculating the volume of the minute particle disposed on the top surface of the substrate.

10. A method according to claim 9, wherein the step of calculating the volume includes the step of:

calculating the area of the minute particle disposed on the top surface of the substrate.

11. A method according to claim 8, wherein the step of determining the height includes the step of determining the distance between the center of intensity of each beam reflecting from the minute particle and the center of intensity of each beam reflecting from the substrate.

12. A method according to claim 1, wherein the minute particle is an irregular shaped article.

13. A method according to claim 12, wherein the irregular shaped article is a paste blob having a given area.

14. A method according to claim 13, wherein the given area of the paste blob is calculated by averaging the gray scale values determined relative to a set of determined boundary values for the paste blob.

15. A method of determining the geometric dimensions of minute particles disposed on the top surface of a substrate, comprising:

using a plurality of cameras for observing elongated beams of reflected light;

mounting said plurality of cameras in groups of at least two cameras each, each group being spaced apart from every other group and being aligned parallel with every other group;

separating elongated beams of reflected light into a reflected beam and a transmitted beam, said transmitted beam being observed by the cameras in one of said groups;

deflecting said reflected beam to be received by another one of said groups and for preventing every other group from observing said reflected beam;

illuminating a given area of the substrate and the minute particles within said area with a forward laser beam and a rear laser beam;

viewing reflected forward laser beam images and reflected rear laser beam images by said cameras;

viewing orthogonally the reflected beam images as they are reflected from the minute particles and the substrate in said given area;

determining the gray scale intensity levels of the beam images reflecting from the minute particles and substrate in said given area;

determining the distance between the intensity center of the beam image reflecting from the minute particles and the intensity center of the beam image reflecting from the substrate;

determining the height of the minute particles within said given area;

storing the determined height of the minute particles within said given area;

moving said camera means and the substrate relative to one another to permit another area of the substrate to be scanned by said forward laser beam and said rear laser beam;

repeating the steps of illuminating, using, viewing, determining, determining, storing and moving until substantially the entire top surface of the substrate has been scanned by said forward and rear laser beams;

retrieving the stored determined height information;

calculating the area of each minute particle disposed on the top surface of the substrate; and

calculating the volume of each minute particle disposed on the top surface of the substrate.