Method of inspecting articles

• US 5,495,535 A
• Filed: 09/24/1993
• Issued: 02/27/1996
• Est. Priority Date: 01/31/1992
• Status: Expired due to Fees

• Current Assignee: Orbotech, Inc. (KLA Corporation), Orbotech Limited (KLA Corporation)
• Original Assignee: Orbotech, Inc. (KLA Corporation), Orbotech Limited (KLA Corporation)
• Inventors: Smilansky, Zeev, Harel, Eyal, Nissim, Moshe
• Primary Examiner(s): Mancuso, Joseph
• Application Number:
  US08/122,507
• Time in Patent Office: 886 Days
• Field of Search: 382/8, 382/44, 382/45, 382/46, 382/41, 382/141, 382/144, 382/145, 382/147, 382/151, 382/293, 382/294, 382/295, 382/296, 382/298, 348/95
• US Class Current: 382/145
• CPC Class Codes: G01N 2021/95615 with stored comparision signal
• CPC Class Codes: G01N 21/8851 Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002
• CPC Class Codes: G01N 21/95607 using a comparative method
• CPC Class Codes: G06V 10/7515 Shifting the patterns to accommodate for positional errors
• CPC Class Codes: H04N 7/18 Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast

Abstract

A method of inspecting an article with respect to a stored list of reference features by scanning the article to detect online features, transforming their coordinates according to registration transformation parameters to correct for misregistration of the article, and comparing the transformed coordinates of the online features with those of the stored reference features for matches. According to this method, an initial estimate of the required registration transformation parameters is provided and is dynamically improved by continuously computing and periodically updating the estimate from the coordinates of the online features detected during the scanning of the article and the coordinates of the stored reference features.

Claims

1. A method of inspecting an article with respect to a list of reference features each identified by its coordinate location, comprising:

scanning the article to generate online data, identifying detected features and their coordinates detected during the scanning of the article;

transforming the coordinates of the detected features according to registration transformation parameters to correct for global misregistration of the article;

and comparing the transformed coordinates of the detected features with those of the reference features for matches;

said registration transformation parameters of the overall article being determined by;

scanning an initial area of the article;

generating for said initial area, a list of said detected features with their coordinates;

pairwise matching said detected features and their coordinates with said reference features and their coordinates for said initial area;

computing an initial estimate of optimal registration transformation parameters required to minimize disparities between said pairwise matched detected and reference features in said initial area according to a misregistration transformation model;

and dynamically improving said initial estimate of the optimal transformation parameters by progressively increasing the scanned area of said article and progressively updating said initial estimate of the optimal transformation parameters according to said misregistration transformation model to provide optimal registration for the detected and reference features with respect to the complete area scanned.

2. The method according to claim 1, wherein computing said initial estimate of the optimal registration transformation parameters includes:

determining, for each detected feature in said initial area, all the reference features of the same type and within a maximal misregistration distance from the detected feature;

identifying such detected features and reference features as matching pairs;

and utilizing said matching pairs for computing said initial estimate of the optimal registration transformation parameters.

3. The method according to claim 2, wherein said matching pairs are utilized for computing said initial estimate of the optimal registration transformation parameters by:

determining, for each such matching pair, the displacement vector of the respective pair;

collecting all the displacement vectors for said initial area;

computing therefrom a correlation function;

and utilizing said correlation function for computing the initial estimate of the registration transformation parameters.

4. The method according to claim 3, wherein computing said correlation function includes:

defining a bounding box of the features in the initially scanned area;

defining an uncertainty box of the initially scanned area to allow for noise therein;

and counting all the vectors in the uncertainty box centered around the respective vector in the displacement vectors list for computing the correlation function of the respective vector in the displacement vectors list.

5. The method according to claim 1, wherein said initial estimate of the optimal transformation parameters is progressively updated by:

providing a plurality of registers for accumulating the coordinates of the detected features and the reference features;

incrementing the registers for the respective coordinates for each matching pair;

and utilizing the current values of the registers for updating the optimal transformation parameters.

6. The method according to claim 1, wherein the method is used to compensate for misregistration of the article because of article placement errors, scanner errors, and/or production scaling errors.

7. The method according to claim 1, wherein said article is optically scanned and its features are optically detected.

8. The method according to claim 1, wherein said article is a printed circuit board.

9. The method according to claim 1, wherein there is produced, as a result of inspecting the article, a list of excess features present in the inspected article but not in the stored list of reference features, and a list of missing features present in the stored list of reference features but not in the inspected article.

10. A method of inspecting an article with respect to a list of reference features each identified by its coordinate location and feature type, comprising:

computing an initial estimate of optimal registration transformation parameters of the overall article by;

optically scanning an initial area of the article to generate online data identifying detected features and their coordinates detected during the scanning of the article;

computing a displacement vector list of disparities between the detected features relative to the corresponding reference features;

computing an initial estimate of optimal registration transformation parameters required, according to a misregistration transformation model, to correct for said disparities due to misregistration of the article;

and dynamically improving said initial estimate of the optimal registration transformation parameters by progressively increasing the scanned area of said article and progressively updating said initial estimate of the optimal transformation parameters according to said misregistration transformation model to provide optimal registration for the detected and reference features with respect to the complete area scanned.

11. The method according to claim 10, wherein computing said initial estimate of the optimal registration transformation parameters includes:

determining, for each detected feature in said initial area, all the reference features of the same type and within a maximal misregistration distance from the detected feature;

identifying such detected features and reference features as matching pairs;

and utilizing said matching pairs for computing said initial estimate of the optimal registration transformation parameters.

12. The method according to claim 10, wherein said initial estimate of the optimal transformation parameters is progressively updated by:

providing a plurality of registers for accumulating the coordinates of the detected features and the reference features;

incrementing the registers for the respective coordinates for each matching pair;

and utilizing the current values of the registers for updating the optimal transformation parameters.

13. The method according to claim 12, wherein said matching pairs are utilized for computing said initial estimate of the optimal registration transformation parameters by:

determining, for each such matching pair, the displacement vector of the respective pair;

collecting all the displacement vectors for said initial area;

computing therefrom a correlation function;

and utilizing said correlation function for computing the initial estimate of the registration transformation parameters.

14. The method according to claim 13, wherein computing said correlation function includes:

defining a bounding box of the features in the initially scanned area;

defining an uncertainty box of the initially scanned area to allow for noise therein;

and counting all the vectors in the uncertainty box centered around the respective vector in the displacement vectors list for computing the correlation function of the respective vector in the displacement vectors list.

15. The method according to claim 10, wherein there is produced, as a result of inspecting the article, a list of excess features present in the inspected article but not in the stored list of reference features, and a list of missing features present in the stored list of reference features but not in the inspected article.

16. The method according to claim 10, wherein said article is a printed circuit board.