Integrated accelerometer with a sensitive axis parallel to the substrate

• US 5,495,761 A
• Filed: 12/22/1993
• Issued: 03/05/1996
• Est. Priority Date: 12/28/1992
• Status: Expired due to Term

• Current Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Original Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Inventors: Diem, Bernard, Michel, France
• Primary Examiner(s): Williams, Hezron E.
• Assistant Examiner(s): Oda, Christine K.
• Application Number:
  US08/171,642
• Time in Patent Office: 804 Days
• Field of Search: 361/280, 361/283.3, 73/514.32, 73/514.36
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: G01R 33/0286 comprising microelectromechanical systems [MEMS] MEMS devices in general B81B

Abstract

An accelerometer with a mobile mass mechanically connected, via an insulator, to a conductive substrate by flexible beams. Mobile conductive teeth are integrally formed with the mobile mass. Fixed conductive teeth are joined to an insulator from the substrate and arranged in an alternating manner with the mobile conductive teeth. Fixed electrodes serving as an electrostatic screen are placed between the fixed teeth and the mobile teeth in such a way that each mobile tooth is intercalated between a fixed electrode and a fixed tooth so as to constitute a series of variable capacitance capacitors.

Claims

1. Integrated accelerometer comprising:

a conductive substrate,

a mobile mass mechanically connected to the substrate by at least one flexible beam and an insulator, said mobile mass being movable in a first direction (Y) parallel to the substrate, the mobile mass having on at least one side conductive mobile teeth which are electrically interconnected and oriented in a second direction (X) parallel to the substrate and perpendicular to the first direction (Y),

fixed conductive teeth which are electrically interconnected, integral and insulated with respect to the substrate, said fixed teeth being parallel to the second direction (X) and alternating with the mobile teeth in order to form variable capacitance capacitors for measuring displacements of the mass in the first direction or servocontrolling said displacements of the mass,

at least one electrostatic screen formed from finger-like fixed electrodes parallel to the second direction (X), said fixed electrodes being electrically interconnected, each of said fixed electrodes being placed between one of said fixed teeth and one of said mobile teeth in such a way that each of said mobile tooth is intercalated between one of said finger-like fixed electrodes and one of said fixed teeth.

3. Accelerometer according to claim 1 or 2, the mobile mass having two series of conductive mobile teeth arranged along two opposite sides of the mobile mass, both sides being parallel to the first direction and each series of mobile teeth being associated with a series of fixed conductive teeth and an electrostatic screen.

4. Accelerometer according to claim 1 or 2, wherein said at least one flexible beam includes two flexible beams.

5. Accelerometer according to claim 1 or 2, said mobile mass said conductive mobile teeth, said conductive fixed teeth, and said at least one electrostatic screen being made from electrically conductive monocrystalline silicon.

6. Accelerometer according to claim 4, wherein said beams are conductive and wherein an electrical insulator is placed between said beams and the substrate.

7. Accelerometer according to claim 6, wherein both electrostatic screens are in direct contact with the substrate.

8. Accelerometer according to claim 1 or 2, wherein the substrate comprises doped monocrystalline silicon.

9. Accelerometer according to claim 1 or 2, wherein said mobile mass comprises through holes.

2. Integrated accelerometer comprising:

a conductive substrate,

a mobile mass mechanically connected to the substrate by at least one flexible beam and an insulator, said mobile mass being movable in a first direction (Y) parallel to the substrate, the mobile mass having on at least one side conductive mobile teeth which are electrically interconnected and oriented in a second direction (X) parallel to the substrate and perpendicular to the first direction (Y),

fixed conductive teeth which are electrically interconnected, integral and insulated with respect to the substrate, said fixed teeth being parallel to the second direction (X) and alternating with the mobile teeth in order to form variable capacitance capacitors for measuring displacements of the mass in the first direction and servocontrolling said displacements of the mass,

at least one electrostatic screen formed from finger-like fixed electrodes parallel to the second direction (X), said fixed electrodes being electrically interconnected, each of said fixed electrodes being placed between one of said fixed teeth and one of said mobile in such a way that each of said mobile tooth is intercalated between one of said finger-like fixed electrodes and one of said fixed teeth.