Comb drive micromechanical tuning fork gyro fabrication method

• US 5,496,436 A
• Filed: 06/15/1994
• Issued: 03/05/1996
• Est. Priority Date: 04/07/1992
• Status: Expired due to Term

• Current Assignee: Charles Stark Draper Laboratory Incorporated
• Original Assignee: Charles Stark Draper Laboratory Incorporated
• Inventors: Bernstein, Jonathan J., Weinberg, Marc S.
• Primary Examiner(s): POWELL, WILLIAM A
• Application Number:
  US08/259,989
• Time in Patent Office: 629 Days
• Field of Search: 156/628.1, 156/633.1, 156/643.1, 156/651.1, 156/656.1, 156/657.12, 156/659.11, 156/662.1, 73/505, 437/228, 437/233, 437/245, 216/33, 216/41, 216/67, 216/75, 216/79
• US Class Current: 438/50
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: G01R 33/0286 comprising microelectromechanical systems [MEMS] MEMS devices in general B81B
• CPC Class Codes: H03H 2009/02354 applied along the periphery, e.g. at nodal points of the ring
• CPC Class Codes: H03H 2009/02496 Horizontal, i.e. parallel to the substrate plane
• CPC Class Codes: H03H 9/02259 Driving or detection means

Abstract

A microfabricated, tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support electrodes and the sense electrodes are positioned at each end of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.

Claims

1. A method for fabricating a comb drive tuning fork structure adapted for inertial rate sensitivity comprising the steps of:

providing a silicon substrate;

forming in a surface of said substrate a plurality of sense electrodes electrically isolated from each other and electrically contactable through a surface portion of said substrate;

supporting, over the surface of said substrate having said plurality of sense electrodes, by flexures for rotation about an axis through said flexures, an assembly of first and second vibratable elements supported at opposite ends by first and second support electrodes such that said vibratable elements extend either side of said axis of rotation and have, extending away therefrom, first and second sets of driven electrodes on one side and first and second respective masses on the other side;

forming on said substrate first and second drive electrodes which mesh with said first and second driven electrodes of said vibratable elements and electrical contacts for said first and second flexures.

2. The method of claim 1 wherein said supporting step includes the step of:

growing a semiconductor layer over said plurality of sense electrodes;

forming said assembly in a surface of said grown layer; and

freeing said assembly from said grown layer leaving attachment thereto through said first and second flexures to allow rotation of said assembly.

3. The process of claim 2 wherein said growing step includes the step of epitaxially growing a silicon layer.

4. The process of claim 2 wherein said substrate forming step includes the step of producing etch resistant doped regions corresponding to said substrate and said first and second flexures in the surface of said grown layer.

5. The method of claim 2 wherein said freeing step includes the step of etching said grown layer except for regions defining said formed assembly.

6. The process of claim 4 wherein said etch resistant portion is created by diffusing boron into the surface of said grown layer.

7. The process of claim 1 wherein said supporting step includes the step of forming a bridge structure over the surface of silicon containing said plural sense electrodes as said assembly.

8. The process of claim 7 wherein said bridge forming step includes the step of forming the bridge structure of etch resistant polysilicon or silicon and the drive electrode forming step includes forming the drive electrodes of etch resistant polysilicon or silicon.

9. The process of claim 7 wherein both said drive electrode said bridge structure forming steps includes the steps of forming said bridge structure and drive electrodes of a metal selected from the group consisting of nickel and gold.

11. The process of claim 1 wherein said supporting step includes the steps of:

providing a second silicon substrate having a planar surface with a layer of etch resistant diffusion therein;

forming a dielectric layer over said first mentioned silicon substrate surrounding said plurality of sensor electrodes;

bonding said diffusion layer to said dielectric layer of said second and first substrates respectively;

said assembly being formed in said diffusion layer in portions overlying said plurality of sense electrodes by selective etching of said second silicon substrate diffusion layer.

14. The process of claims 1 or 10 further including the step of forming at least one of said driven and drive electrode fingers by the steps of:

forming electrically conducting regions in said assembly in the regions for said drive and driven electrodes; and

dimensioning edges of said conductive regions by reactive ion etching to separate said drive and driven electrodes.

10. A process for forming a comb driven tuning fork structure for use in rate sensor applications comprising the steps of:

providing a silicon substrate having a planar surface;

forming in said planar surface a plurality of sense electrodes through an insulating layer aperture;

providing a second silicon substrate having a planar surface into which is diffused an etch resistant diffusant;

bonding said first and second silicon substrates planar surface to planar surface;

forming in said diffusion layer an assembly comprising flexures extending to regions of said insulating layer of said first substrate and having vibratable elements supported by electrode elements spaced parallel to each other about a rotation axis passing through said flexures with said vibratable elements having on one respective sides thereof a mass and on opposite respective sides thereof a plurality of driven electrodes in first and second sets forming separated fingers;

forming in said diffusion layer and physically separated from said assembly a plurality of drive electrodes comprising fingers fitting between the fingers of said driven electrodes.

12. The process of claims 10 or 11 further including the step of eliminating substantially all of said second semiconductor substrate in the region of said assembly.

13. The process of claim 12 further comprising the step of providing a metallized electrical contact to said assembly.